• 한국재료학회:학술대회논문집
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• 한국재료학회 1992년도 춘계학술발표회
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• pp.26-27
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• 1992

반도체 기억소자 contact hole의 선택적 충진의 최적 조건을 연구하기 위하여 무전해Ni도금방법을 채택하여 실리콘의 활성화와 선택적 도금의 공정조건이 Contact Hole 도금피막의 제반 특성에 미치는 영향을 조사하였다. p형 실리콘 100 소지 표면의 활성화 처리는 RCA처리에 의해 먼저 표면을 세척한 다음 온도, PdCl$_2$농도, 시간. 교반의 영향을 조사하였다 전처리의 최적조건은 7$0^{\circ}C$, 0.5M HF, ImM PdCl$_2$, 2mM EDTA, 90second이었다. 무전해도금은 NiS0$_4$.6$H_2O$를 DMAB를 환원제로 하여 온도, DMAB 농도, pH, 도금시간의 영향을 조사하였다. 무전해 도금 피막은 비교적 우수한 접촉저 항을 나타냈다. 1$\mu$m의 도금막을 얻는 데 본 실험조건에서 DMAB의 농도가 8mM일 때 30 분이 소요되었다. 도금막의 표면은 온도가 낮을수록 pH가 높을수록 평활하였고,특히 온도 6$0^{\circ}C$와 pH6.8에서 가장 우수하였다. 미세경도는 600Hv 정도였으며, 결정립의 크기 가 증가할수록 저항과 미세경도가 감소하였다.

• Design & Manufacturing
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• 제15권2호
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• pp.11-16
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• 2021

Recently, three-dimensional (3D) cell culture systems, which are superior to conventional two-dimensional (2D) vascular systems that mimic the in vivo environment, are being actively studied to reproduce drug responses and cell differentiation in organisms. Conventional two-dimensional cell culture methods (scaffold-based and non-scaffold-based) have a limited cell growth rate because the culture cannot supply the culture medium as consistently as microvessels. To solve this problem, we would like to propose a 3D culture system with an environment similar to living cells by continuously supplying the culture medium to the bottom of the 3D cell support. The 3D culture system is a structure in which microvascular structures are combined under a scaffold (agar, collagen, etc.) where cells can settle and grow. First, we have manufactured molds for the formation of four types of microvessel-mimicking chips: width / height ①100 ㎛ / 100 ㎛, ②100 ㎛ / 50 ㎛, ③ 150 ㎛ / 100 ㎛, and ④ 200 ㎛ / 100 ㎛. By injection molding, four types of microfluidic chips were made with GPPS (general purpose polystyrene), and a 100㎛-thick PDMS (polydimethylsiloxane) film was attached to the top of each microfluidic chip. As a result of observing the flow of the culture medium in the microchannel, it was confirmed that when the aspect ratio (height/width) of the microchannel is 1.5 or more, the fluid flows from the inlet to the outlet without a backflow phenomenon. In addition, the culture efficiency experiments of colorectal cancer cells (SW490) were performed in a 3D culture system in which PDMS films with different pore diameters (1/25/45 ㎛) were combined on a microfluidic chip. As a result, it was found that the cell growth rate increased up to 1.3 times and the cell death rate decreased by 71% as a result of the 3D culture system having a hole membrane with a diameter of 10 ㎛ or more compared to the conventional commercial. Based on the results of this study, it is possible to expand and build various 3D cell culture systems that can maximize cell culture efficiency by cell type by adjusting the shape of the microchannel, the size of the film hole, and the flow rate of the inlet.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1533_1534
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• 2009

This paper presents an atmospheric micro glow plasma-jet device. The device consists of four components; a thin Ni anode, a porous alumina insulater, a stainless steel cathode and an aluminum case. The Ni anode is fabricated using micromachining technology. The anode has 10 holes, of which the hole diameter and the depth are $250{\mu}m$ and $60{\mu}m$, respectively. The discharge test is performed in nitrogen gas at atmospheric pressure for 20 kHz AC bias. The breakdown voltage is 3.5 kV at gas flow rate of 4 L/min and the the plasma-jet is blown out to ambient at 5.5 kV. In order to verify the characteristics of plasma, the current and the voltage of device are measured. The maximum temperature of plasma is $37^{\circ}C$. The plasma is well generated and stable at high voltage.

• 대한기계학회논문집B
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• 제33권7호
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• pp.535-540
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• 2009

Experiments are conducted to elucidate effects of counterflow burner diameter on flame extinction behaviors in C-curve. Present experimental results with burner diameters of 18, 26, and 50 mm in normal-gravity are compared with the numerical result of Oppdif code as well as the previous experimental results in micro-gravity. The turning point migrates to a higher global strain rate as burner diameter decreases. It is shown that the C-curve with the burner diameter of 50mm is best-fitted to the numerical result of Oppdif code and the previous micro-gravity results also excurse to the numerical result. This suggests that the precise C-curve can be obtained only with an appreciably large burner. The main reason why these differences appear is shown to be attributed to the transition of shrinking flame disk to flame hole due to strong effects of radial conduction heat loss, which is the typical extinction characteristics of low strain rate flames with a finite burner diameter in a counterflow diffusion flame.

• 대한기계학회논문집B
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• 제25권5호
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• pp.634-644
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• 2001

The test facility of a 1/60-scale model for train-tunnel systems has been recently developed to investigate the effects of tunnel portal shapes, hood shapes and air-shafts for reducing the micro-pressure waves radiating towards the surroundings from the tunnel exit. The present test rig has been advanced from a 1/70-scale facility at NLR in Netherlands. The NLR test rig has the two-wise guidance system that needs two ears attached on the external surface of a model train nose. Therefore, their train models have irregular nose shapes. The main characteristics of the present facility are that the train model is guided by only one wire from the compressed air launcher to the absorber parts of test facility and the wire guidance hole is located at the axial center of a train model. In the present test rig, after a train model is launched, the air jet from the launcher does not enter the tunnel model. Experimental results were compared with numerical predictions to prove the performance of the test facility.

• Design & Manufacturing
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• 제12권2호
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• pp.46-50
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• 2018

Recently, as machine components and products are getting smaller, it is demanded to develop superprecision production technologies multilaterally. Along with the advancement of production technology, people are paying keener attention to the development of eco-friendly technology and efficient processing technology. Particularly, in many industries related to automobiles, shipbuilding, or airplane components, it is demanded to obtain technology to process multiple micro-holes. On account of this trend, micro-hole processing employing high-power electron beams is rising nowadays, and more interest is being shown in it, too. In Korea, however, the process of manufacturing vaporized amplification sheets influencing high-power electron beam processing technology and the processability considerably has not been developed sufficiently yet. Therefore, this study has applied vaporized amplification sheets manufactured to analyze the processability of high-power electron beams and examine necessity for vaporized amplification sheets.

• 한국자동차공학회논문집
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• 제7권5호
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• pp.221-229
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• 1999

We examined the governing factors of fatigue limit in annealed and austempered ductile iron specimens machined micro hole(dia.<0.4mm) in rotary bending fatigue test. Also, the quantitative relationship between fatigue limit and maximum defect size in specimens was investigated. Artificial defect(micro-pit type, dia.<0.4mm) on specimen surface did not bring about an obvious reduction of fatigue limit in austempered ductile iton(ADI) as compared with annealed ductile iron. According to the investigation of ${\sqrt{area}}_c$ which is the critical defect size to crack initiation at artificial defect, ${\sqrt{area}}_c$ of ADI was larger than that of annealed ductile iron. This shows that the situation of crack initiation at artificial defect in ADI is more difficult in comparison with annealed ductile iron. Maximum defect size is one of the important parameters to predict fatigue limit. And, the quantitative relationship, between the fatigue limit ${\sigma}_{\omega}$ and the maximum defect size ${\sqrt{area}}_{max}$ can be expressed to ${\sigma}_{\omega}^n{\cdot}{\sqrt{area}}_{max}=C_2$ where, $C_2$ are constant. Moreover, it is possible to explain the difference in fatigue limit between, austempered and annealed ductile iron by introducing the parameter ${\delta}(=N_{sg}/N_{total})$in a plain spectimen.

• 소성∙가공
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• 제13권3호
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• pp.262-267
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• 2004

Ultrasonic machining has been known as one of the conventional machining methods in the glass fabrication processes. In ultrasonic machining, typically, glass is removed by the impulse energy of the abrasive generated by the ultrasonic power. However, when the machining feature decrease under hundreds of micrometers, as conventional ultrasonic machining uses only the impulse energy of the abrasive, the speed of ultrasonic machining decreases significantly and the surface roughness becomes deteriorated. To overcome this size effect, the chemicals which can erode glasses, such as HF, XF, etc, are added to the slurry. The chemical-assisted ultrasonic machining method, so called, is another alternating effective way for micro machining of glasses. In previous work, we used the hydrofluoric acid (HF) as an additive chemical. But, as the HF solution is too poisonous to be used as a ultrasonic process additive, it is needed to be substituted by other safe chemicals. As results of the machinability comparison of several chemicals, the GST-500F was selected to replace the HF. The GST-500F (pH $4.0{\pm}1.0$) is non-volatile, odorless. During experimental works, it was shown that the machining rate increases 1.5 times faster than the conventional ultrasonic machining. The machining load also decreases. However, the enlargement of the hole diameter and significant tool wear are still the problems to be solved.

• Transactions on Electrical and Electronic Materials
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• 제7권4호
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• pp.157-162
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• 2006

Chemical-mechanical polishing (CMP), one of the dominant technology for ULSI planarization, is used to flatten the micro electro-mechanical systems (MEMS) structures. The objective of this paper is to achieve good planarization of the deposited film and to improve deposition efficiency of subsequent layer structures by using surface-micromachining process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages of CMP process for MEMS structures are observed respectively by using the test patterns with structures larger than 1 urn line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of silica slurries: $ILD1300^{TM}\;and\;Nalco2371^{TM}$. And then, the experiments were conducted based on the pretest. A selectivity and pH adjustment of slurry affected largely step heights of MEMS structures. These results would be anticipated as an important bridge stone to manufacture MEMS CMP slurry.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.142-142
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• 2007

Micro thermoelectric generator has been attractive for the alternative power source to operate the wireless sensor node. In this paper, we designed the column-type micro thermoelectric device and their device characteristics were measured. n-type Bi2Te3 and p-type BiSbTe3 thermoelectric thin films were grown on (001) GaAs substrates by metal organic chemical vapour deposition (MOCVD) and they were pattemed. The height of thermoelectric film were controlled by the deposition time, temperature and MO-x gas pressure. Seebeck coefficient was measured at room temperature and hole concentration and electrical resistivity of thermoelectric film were also characterized.