Consumable Approaches of Polysilicon MEMS CMP |
Park, Sung-Min
(School of Mechanical Engineering, Pusan National University)
Jeong, Suk-Hoon (School of Mechanical Engineering, Pusan National University) Jeong, Moon-Ki (School of Mechanical Engineering, Pusan National University) Park, Boum-Young (School of Mechanical Engineering, Pusan National University) Jeong, Hae-Do (School of Mechanical Engineering, Pusan National University) Kim, Hyoung-Jae (Department Research & Development, G&P Technology) |
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