Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Atmospheric Micro Glow Plasma-jet Device

상압 마이크로 글로우 방전 분사 소자

  • Kim, Kang-Il (Division of electrical & Computer Engineering, College of Information Technology, Ajou University) ;
  • Kim, Geun-Young (Division of Applied Technology Research Group, National Fusion Research Institute) ;
  • Hong, Yong-Cheol (Division of electrical & Computer Engineering, College of Information Technology, Ajou University) ;
  • Yang, Sang-Sik (Division of electrical & Computer Engineering, College of Information Technology, Ajou University)
  • 김강일 (아주대학교 정보통신대학 전자공학부) ;
  • 홍용철 (국가 핵융합 연구소 응용기술개발부) ;
  • 김근영 (아주대학교 정보통신대학 전자공학부) ;
  • 양상식 (아주대학교 정보통신대학 전자공학부)
  • Published : 2009.07.14
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Abstract

This paper presents an atmospheric micro glow plasma-jet device. The device consists of four components; a thin Ni anode, a porous alumina insulater, a stainless steel cathode and an aluminum case. The Ni anode is fabricated using micromachining technology. The anode has 10 holes, of which the hole diameter and the depth are $250{\mu}m$ and $60{\mu}m$, respectively. The discharge test is performed in nitrogen gas at atmospheric pressure for 20 kHz AC bias. The breakdown voltage is 3.5 kV at gas flow rate of 4 L/min and the the plasma-jet is blown out to ambient at 5.5 kV. In order to verify the characteristics of plasma, the current and the voltage of device are measured. The maximum temperature of plasma is $37^{\circ}C$. The plasma is well generated and stable at high voltage.

Keywords