• 한국진공학회지
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• 제12권3호
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• pp.193-199
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• 2003

아크-마그네트론 복합 공정법에 의해 Cu, Ag 도핑된 TiN 나노 복합 화합물 박막을 합성하고 각 금속원소 종류 및 함량에 따른 기계적 특성 및 나노 구조로의 상변화 거동을 관찰하였다. 합성된 박막은 약 40 ㎬의 높은 경도치를 나타내었으며 2 at% 미만의 낮은 금속 원소 함량에서 최대 경도간을 나타내었다. 금속 원소 함량이 증가할수록 결정립 미세화 및 다결정화가 진행되어 초고경도 특성을 나타내는 나노구조 박막이 합성되었으며 도핑되는 금속원소 종류에 따라 나노 구조로의 상변화 기구가 상이함을 관찰하였다. TiN 박막내 도핑된 Cu는 Ti와 일부 결합을 이루면서 Ti의 자리를 치환하는 것으로 나타났으나, Ag는 Ti와 결합을 이루거나 Ti 격자 자리를 치환하는 것이 아니라 독립적으로 결정립계에 존재하여 charge transfer만을 발생시키는 것으로 관찰되었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.266-266
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• 2010

Ion beam sputtering(IBS)을 이용한 pattern 형성은 대상 물질의 제한이 적고 물리적 변수의 조절에 의해 쉽게 nano 구조의 형태와 크기를 조절할 수 있다는 점에서 관심을 받아오고 있다. 하지만 IBS를 이용한 pattern 형성이 어려운 물질들도 있어 다양한 기판에서의 nano pattern 형성에 관련된 많은 연구가 보고되고 있다. 본 연구발표에서는 유용한 반도체인 Si 표면에서의 IBS를 이용한 nano 구조 형성이 가능함과 그 과정에 대해 말하고자 한다. Ru을 100nm 두께로 증착시킨 Si(100)을 sputter 했을 때, Ru 표면에 잘 order된 nano pattern이 형성되었다. Sputter 시간이 증가하면서 pattern은 유지된 채 Ru이 깎여 나가다가 pattern의 가장 낮은 부분부터 Si기판이 드러나게 된다. 이 때 노출된 Si은 sputtering에 의해 깎여나가고 아직 Ru이 덮여있는 부분의 Si은 그대로 유지되어, Ru이 모두 sputter 되면서 보여지는 Si의 pattern은 Ru의 그것과 동일한 형태를 띄게 된다. 그 결과, Ru의 pattern이 Si으로 transfer되었음을 AFM과 SAM을 통해 확인할 수 있었다. 또한 IBS를 이용해 pattern 형성이 힘든 metallic glass에도 같은 방식으로 Ru을 쌓아 sputter 해봄으로써 pattern transfer를 확인해 볼 계획이다. 이러한 pattern transfer는 sputtering을 통한 pattern 형성이 어려웠던 다른 물질들에 그 가능성이 있음을 보여주고 있어 sputtering의 응용 폭이 넓어질 것을 기대한다.

• Applied Microscopy
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• 제43권4호
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• pp.173-176
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• 2013

The oxidation behavior of the crystallized $Al_{87}Ni_3Y_{10}$ alloy has been investigated with an aim to compare with that of the amorphous $Al_{87}Ni_3Y_{10}$ alloy. The oxidation at 873 K occurs as follows: (1) growth of an amorphous aluminum-yttrium oxide layer (~10 nm) after heating up to 873 K; and (2) formation of $YAlO_3$ crystalline oxide (~220 nm) after annealing for 30 hours at 873 K. Such an overall oxidation step indicates that the oxidation behavior in the crystallized $Al_{87}Ni_3Y_{10}$ alloy occurs in the same way as in the amorphous $Al_{87}Ni_3Y_{10}$ alloy. The simultaneous presence of aluminum and yttrium in the oxide layer significantly enhances the thermal stability of the amorphous structure in the oxide phase. Since the structure of aluminum-yttrium oxide is dense due to the large difference in ionic radius between aluminum and yttrium ions, the diffusion of oxygen ion through the amorphous oxide layer is limited thus stabilizing the amorphous structure of the oxide phase.

• Bulletin of the Korean Chemical Society
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• 제25권9호
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• pp.1341-1345
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• 2004

We developed a novel synthesis strategy of titania nanowire arrays by employing simple hydrothermal reaction and ion-exchange reaction techniques. Hydrothermal reactions of metallic titanium powder with $H_2O_2$ in a 10 M NaOH solution produced a new sodium titanate compound, $Na_2Ti_6O_{13}{\cdot}xH_2O$ (x~4.2), as arrays of nanowires of lengths up to 1 mm. Acid-treatment followed by calcination of this material produced arrays of highly crystalline anatase nanowires as evidenced by x-ray diffraction, Raman spectroscopy, and transmission electron microscopy studies. In both cases of sodium titanate and anatase, the nanowires have exceptionally large aspect ratios of 10,000 or higher, and they form arrays over a large area of $1.5 {\times} 3 cm^2$. Observations on the reaction products with varied conditions indicate that the array formation requires simultaneously controlled formation and crystal growth rates of the $Na_2Ti_6O_{13}{\cdot}xH_2O$ phase.

• Journal of the Optical Society of Korea
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• 제16권3호
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• pp.305-312
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• 2012

We numerically demonstrate the performance of a plasmonic lens composed of an array of nanoslits perforated on thin metallic film with slanted cuts on the output surface. Embedding Kerr nonlinear material in nanoslits is employed to modulate the output beam. A two dimensional nonlinear-dispersive finite-difference time-domain (2D N-D-FDTD) method is utilized. The performance parameters of the proposed lens such as focal length, full-width half-maximum, depth of focus and the efficiency of focusing are investigated. The structure is illuminated by a TM-polarized plane wave and a Gaussian beam. The effect of the beam waist of the Gaussian beam and the incident light intensity on the focusing effect is explored. An exact formula is proposed to derive electric field E from electric flux density D in a Kerr-Dispersive medium. Surface plasmon (SPs) modes and Fabry-Perot (F-P) resonances are used to explain the physical origin of the light focusing phenomenon. Focused ion beam milling can be implemented to fabricate the proposed lens. It can find valuable potential applications in integrated optics and for tuning purposes.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 금형가공,미세가공,플라스틱가공 공동 심포지엄
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• pp.49-53
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• 2005

The objective of this research was to establish the size limitation of micro metal forming and analyze the formability of foil. Flat-rolled ultra thin metallic copper foil($3{\mu}m$ in thickness) was used as a forming material and foil was annealed to improve the formability at the temperature of $385^{\circ}C$. Forming die was fabricated by using etching technique of DRIE(deep reactive ion etching) and HNA isotropic etching. For the forming die and coupe. foil were vacuum packed and the forming was conducted as applying hydrostatic pressure of 250MPa to the vacuum packed unit. We successfully obtained the micro channels of $12\~14{\mu}m$ width and $9{\mu}m$ depth from micro forming process we designed. We also investigated the thickness strain distribution of foil from experiment and FE simulation result. Micro channels had a good formability of smooth surface and size accuracy. We expect that micro metal forming technology will be applied to production of micro parts.

• 한국재료학회지
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• 제6권11호
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• pp.1127-1135
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• 1996

반도체 소자가 고집적화 됨에 따라 단위공정의 수가 증가하게 되었고 동시에 실리콘 기판의 오염에 대한 문제가 증가하였다. 실리콘 기판의 주 오염물로는 유기물, 파티클, 금속분순물 등이 있으며 특히, Cu와 Fe과 같은 금속불순물은 이온주입 공정, reactive ion etching, photoresist ashing과 같은 실 공정 중에 1011-1013atoms/㎤정도로 오염이 되고 있다. 그러나 금속불순물 중 Cu와 같은 전기음성도가 실리콘 보다 큰 오염물질은 일반적인 습석세정방법으로는 제거하기 힘들다. 따라서 본 연구에서는 Cu와 Fe과 같은 금속불순물을 제거할 목적을 건식과 습식 세정방법을 혼합한 UV/ozone과 HF세정을 제안하여 실시하였다. CuCI2와 FeCI2 표준용액으로 실리콘 기판을 인위적 오염한 후 split 1(HF-only), split 2 (UV/ozone+HF), split 3 (UV/ozone + HF 2번 반복), split 4(UV/ozone-HF 3번 반복)를 실시하였고 TXRF(Total Reflection X-Ray Fluorescence)와 AFM(Atomic Force Microscope)으로 금속불순물 제거량과 표면거칠기를 각각 측정하였다. 또한 contact angle 측정으로 세정에 따른 표면상태도 측정하였다. TXRF 측정결과 split 4가 가장 적은 양의 금속불순물 잔류량을 보였으며 AFM 분석을 통한 표면거칠기도 가장 작은 RMS 값을 나타내었다. Contact angle 측정 결과 UV/ozone 처리는 친수성 표면을 형성하였고 HF처리는 소수성 표면을 형성하였다.

• 한국화재소방학회:학술대회논문집
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• 한국화재소방학회 1997년도 International Symposium on Fire Science and Technology
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• pp.120-129
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• 1997

The fire protective coating can reduce certain damages in case of fire, also conserve energy by thermal insulation and prevent corrosion and errosion in normal daily life by means of blocking thermal transfer, that were generally made of organic, inorganic and metallic materials as adiabatic coating. In case of inorganic material such as soluble silicate, it produces less toxic substances which are exposed to Ore, and have a plenty of raw material. Also inorganic thermal insulator is good in heat resistance. To develope such a excellent inorganic thermal insulator, the study of fire protective coating using the alkali silicate is necessary The principle of intumescence for alkali silicate is from rapid evolution of water in the coating material, the quantity of water in it is of course influenced on the degree of intumescence. The phenomenon of intumescence in ternary silicate is increased as the radius of ion is bigger, and this is caused by evolution of so many kinds of water. The individual degree of intumescence is ordered like this ; $K^+$ > $Na^+$ > $Li^+$ . The best protection effect is similarity found to intumescence of ternary silicate. The result of X-ray diffraction analysis indicates that $KHSi_2O_5$ is an important ingredient in K-silicate.

• 방사성폐기물학회지
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• 제19권1호
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• pp.39-49
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• 2021

The behaviors of various desorption agents were investigated during the desorption of cesium (Cs) from samples of clay minerals and actual soil. Results showed that polymeric cation exchange agents (polyethyleneimine (PEI)) efficiently desorbed Cs from expandable montmorillonite, whereas acidic desorption solutions containing HCl or PEI removed considerable Cs from hydrobiotite. However, most desorption agents could desorb only 54% of Cs from illite because of Cs's specific adsorption to selective adsorption sites. Cs desorption from an actual soil sample containing Cs-selective clay mineral illite (< 200 ㎛) and extracted from near South Korea's Kori Nuclear Power Plant was also investigated. Considerable adsorbed 137Cs was expected to be located at Cs-selective sites when the 137Cs loading was much lower than the sample's cation exchange capacity. At this low 137Cs loading, the total Cs amount desorbed by repeated washing varied by desorption agent in the order HCl > PEI > NH4+, and the highest Cs desorption amount achieved using HCl was 83%. Unlike other desorption agents with only cation exchange capabilities, HCl can attack minerals and induce dissolution of metallic elements. HCl's ability to both alter minerals and induce H+/Cs+ ion exchange is expected to promote Cs desorption from actual soil samples.

• 대한금속재료학회지
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• 제47권3호
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• pp.188-194
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• 2009

Recently, new extraction technology for manganese nodule has been developed as alternative noble metallic resources. It is important to understand thermodynamic behaviors of phosphorus in low basic slag system from the viewpoint of the refining processing optimization. Thermodynamic behaviors of phosphorus in the $FeO-MnO-CaO-SiO_2-MgO_{satd.}$ slag system were investigated at 1723 K with various oxygen potential and slag composition of low basicity. The experimental results for dependence of phosphorus on oxygen potential and slag basicity indicated that the dissolution mechanism of phosphorus into slag of low basicity could be derived as follows; $[P]+5/4O_2+(O^{2-})=({PO_{3.5}}^{2-})$ Present experimental results implied that stability of phosphorus in slag would be depended on both of $O^{2-}$ (basicity) and content of $Ca^{2+}$ in molten slag. The thermodynamic effect of FeO, MnO and $Na_2O$ on low basicity on phosphate capacity was discussed.