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A study on the synthesis and formation behavior of nanostructrued TiN films by metal doping  

명현식 (성균관대학교 플라즈마 응용 표면기술 연구센터)
한전건 (성균관대학교 플라즈마 응용 표면기술 연구센터)
Publication Information
Journal of the Korean Vacuum Society / v.12, no.3, 2003 , pp. 193-199 More about this Journal
Abstract
Ti-Cu-N and Ti-Ag-N nanocomposite films with various copper and silver contents were synthesized by arc ion plating and magnetron sputtering hybrid system. The structure and mechanical properties of these films were found to be dependant on the copper and silver concentration. The maximum hardness of Ti-Cu-N and Ti-Ag-N films showed approximately 40 ㎬ below 2 at%Me. The role of soft metallic phase in Ti-Me-N nanosturctured films containing one hard and one soft phase is also discussed.
Keywords
superhard; nanostructure; metal doping;
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