• Current Optics and Photonics
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• 제2권2호
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• pp.153-164
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• 2018

In semiconductor manufacturing, critical dimensions indicate the features of patterns formed by the semiconductor process. The purpose of measuring critical dimensions is to confirm whether patterns are made as intended. The deposition process for an organic light emitting diode (OLED) forms a luminous organic layer on the thin-film transistor electrode. The position of this organic layer greatly affects the luminescent performance of an OLED. Thus, a system for measuring the position of the organic layer from outside of the vacuum chamber in real-time is desired for monitoring the deposition process. Typically, imaging from large stand-off distances results in low spatial resolution because of diffraction blur, and it is difficult to attain an adequate industrial-level measurement. The proposed method offers a new superresolution single-image using a conversion formula between two different optical systems obtained by a deep learning technique. This formula converts an image measured at long distance and with low-resolution optics into one image as if it were measured with high-resolution optics. The performance of this method is evaluated with various samples in terms of spatial resolution and measurement performance.

• Nuclear Engineering and Technology
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• 제54권8호
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• pp.2859-2870
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• 2022

Because nuclear power plants (NPPs) are safety-critical infrastructure, it is essential to increase their safety and minimize risk. To reduce human error and support decision-making by operators, several artificial-intelligence-based diagnosis methods have been proposed. However, because of the nature of data-driven methods, conventional artificial intelligence requires large amount of measurement values to train and achieve enough diagnosis resolution. We propose a graph neural network (GNN) based accident diagnosis algorithm to achieve high diagnosis resolution with limited measurements. The proposed algorithm is trained with both the knowledge about physical correlation between components and measurement values. To validate the proposed methodology has a sufficiently high diagnostic resolution with limited measurement values, the diagnosis of multiple accidents was performed with limited measurement values and also, the performance was compared with convolution neural network (CNN). In case of the experiment that requires low diagnostic resolution, both CNN and GNN showed good results. However, for the tests that requires high diagnostic resolution, GNN greatly outperformed the CNN.

• 한국정밀공학회지
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• 제18권8호
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• pp.40-47
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• 2001

Optical measurement methods make it possible to detect object displacements with high resolution and noncontact measurements. Also, they are very robust against EMI noises and have long operation range. An optical triangulation sensor is one of widely used displacement measurement sensors for its sub-micron resolution, fast response, simple structure, and low cost. However. there are several errors caused by inclinations of a surface. speckle effects, power fluctuations of light sources, and noises of detectors. In this paper, in order to minimize error effects, we performed error analysis and proposed a new structure. Then, we setup a new modeling method and verify it through simulations and experiments. Based on the new model. we propose a new sensor structure and establish design criteria. Finally, we design a signal processing system to overcome a resolution-limited problem of light detectors. The resolution of the proposed system is 0.2${\mu}{\textrm}{m}$ in 5mm operating range.

• Journal of Mechanical Science and Technology
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• 제19권2호
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• pp.716-727
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• 2005

Comprehensive measurements for velocity and temperature fields have been conducted. A Micro PIV 2-color LIF system have been setup to measure the buoyancy driven fields in a 1-mm heated channel with low Grashof-Prandtl numbers [$86]. Fluorescence microscopy is combined with an MPIV system to obtain enough intensity images and clear pictures from nano-scale fluorescence particles. The spatial resolution of the Micro PIV system is $75{\mu}m\;by\;67{\mu}m$ and error due to Brownian motion is estimated $1.05\%$. Temperature measurements have achieved the $4.7\;{\mu}m$ spatial resolution with relatively large data uncertainties the present experiment. The measurement uncertainties have been decreased down to less than ${\pm}1.0^{\circ}C$ when measurement resolution is equivalent to $76\;{\mu}m$. Measured velocity and temperature fields will be compared with numerical results to examine the feasibility of development as a diagnostic technique.

• Current Optics and Photonics
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• 제7권1호
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• pp.73-82
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• 2023

In this study, we demonstrate ultrahigh-resolution spectral-domain optical coherence tomography with a 200-kHz line rate using a superluminescent diode with a -3-dB bandwidth of 100 nm at 849 nm. To increase the line rate, a subset of the total number of camera pixels is used. In addition, a partial-spectrum detection method is used to obtain OCT images within an imaging depth of 2.1 mm while maintaining ultrahigh axial resolution. The partially detected spectrum has a flat-topped intensity profile, and side lobes occur after fast Fourier transformation. Consequently, we propose and apply the super-Gaussian window function as a new window function, to reduce the side lobes and obtain a result that is close to that of the axial-resolution condition with no window function applied. Upon application of the super-Gaussian window function, the result is close to the ultrahigh axial resolution of 4.2 ㎛ in air, corresponding to 3.1 ㎛ in tissue (n = 1.35).

• 한국정밀공학회지
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• 제24권3호
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• pp.140-146
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• 2007

To understand adhesive phenomena, we need to get force curve between two surfaces. And it is said that high stiffness force analysis system is needed to get precise force curve and more information of the surfaces. Usually the stiffness of the force measurement system is under the order of 10N/m. The stiffer force measurement system, however, results in more information on the surface, because higher stiffness lead to the wider range of force curves, secondly because the force curve obtained through the stiffer one describes more precise relationship between relative tip-sample separation and interaction force. In this paper, considering for stiffness and resolution, the cantilever was designed and we made adhesion force measurement apparatus with high stiffness and high resolution, so we measured adhesive force between Ag-ball and wafer.

• 대한기계학회논문집B
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• 제24권1호
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• pp.21-28
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• 2000

Although commercial PIV systems have been widely used for the non-intrusive velocity field measurement of fluid flows, they are still under development and have considerable room for improvement. In this study, a single-frame double-exposure PIV system using a high-resolution CCD camera was developed. A pulsed Nd:Yag laser and high-resolution CCD camera were synchronized by a home-made control circuit. In order to resolve the directional ambiguity problem encountered in the single-frame PIV technique, the second particle image was genuinely shifted in the CCD sensor array during the time interval dt. The velocity vector field was determined by calculating the displacement vector at each interrogation window using cross-correlation with 50% overlapping. In order to check the effect of spatial resolution of CCD camera on the accuracy of PIV velocity field measurement, the developed PIV system with three different resolution modes of the CCD camera (512 ${\times}$ 512, lK ${\times}$ IK, 2K ${\times}$ 2K) was applied to a turbulent flow which simulate the Zn plating process of a steel strip. The experimental model consists of a snout and a moving belt. Aluminum flakes about $1{\mu}m$ diameter were used as scattering particles for the liquid flow in the zinc pot and the gas flow above the zinc surface was seeded with atomized olive oil with an average diameter of 1-$3{\mu}m$. Velocity field measurements were carried out at the strip speed $V_s$=1.0 m/s. The 2K ${\times}$ 2K high-resolution PIV technique was significantly superior compared to the smaller pixel resolution PIV system. For the cases of 512 ${\times}$ 512 and 1K ${\times}$ 1K pixel resolution PIV system, it was difficult to get accurate flow structure of viscous flow near the wall and small vortex structure in the region of large velocity gradient.

• 전자공학회논문지SC
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• 제45권1호
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• pp.25-30
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• 2008

본 논문에서는 상용 고휘도 백색광 LED 및 CCD 어레이 검파기를 이용하여 Fourier-domain 방식의 광 계측기를 구현하였다. 제안된 기술의 축 방향 측정 거리 범위는 $125{\mu}m$이고, 축 방향 분해능은 $1.24{\mu}m$이다. 기존 시스템이 고가의 광대역 광원을 사용하면서도 분해능이 수 ${\mu}m$ 이상인 것에 비추어 볼 때, 본 시스템은 저가의 상용 LED와 CCD 어레이 검파기를 사용하여 구현되므로 소형이며 가격적인 면에서 유리하면서도 높은 분해능을 얻을 수 있다.

• 한국임상수의학회지
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• 제39권3호
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• pp.114-120
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• 2022

The purpose of this study is to examine the status of quality control using multipurpose phantom of ultrasound equipment used in hospital of veterinary college in South Korea by using ATS-539 multipurpose phantom so as to examine quantitative and objective new image evaluation method. Specialists discussed and analyzed multipurpose phantom images acquired by using convex transducer of 10 ultrasound imaging devices, currently used in 9 veterinary colleges, at 4.0-6.0 MHz. Total 8 items that can be measured with ATS-539 multipurpose phantom including dead zone, vertical and horizontal measurement, axial/lateral resolution, sensitivity, focal zone, functional resolution and gray scale/dynamic range were evaluated. For qualitative evaluation, valid decisions were made based on dead zone, axial/lateral resolution, and gray scale/dynamic range which are resolution index, and coefficient of variation (COV) and blind referenceless image spatial quality evaluator (BRISQUE) were found to increase objectivity. As a result of experiment, all the targeted ultrasonic devices were found appropriate from qualitative evaluation items of dead zone, axial/lateral resolution, and gray scale/dynamic range. In other evaluation items, they were found to be appropriate from focal zone and vertical measurement of quantitative evaluation while inappropriate from horizontal measurement, sensitivity, and functional resolution. COV value was 0.12 ± 0.04, and BRISQUE value was 47.77 ± 2.77, both analysis results show that the noise level of all ultrasonic devices was located within tolerance range. Upon image examination using ATS-539 multipurpose phantom, they were 100% appropriate with inspection standards of dead zone, axial/lateral resolution, and gray scale/dynamic range, and besides, focal zone and functional resolution can be used as evaluation items. In the field of veterinary medicine, 8 standard items using ATS-539 multipurpose phantom and image evaluation items using COV and BRISQUE can be used as standards for quality control of ultrasonography machine.

• Current Optics and Photonics
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• 제5권3호
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• pp.298-305
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• 2021

Modern distance sensing methods employ various measurement principles, including triangulation, time-of-flight, confocal, interferometric and frequency comb. Among them, the triangulation method, with a laser light source and an image sensor, is widely used in low-cost applications. We developed an omnidirectional two-dimensional (2D) distance sensor based on the triangulation principle for indoor floor mapping applications. The sensor has a range of 150-1500 mm with a relative resolution better than 4% over the range and 1% at 1 meter distance. It rotationally scans a compact one-dimensional (1D) distance sensor, composed of a near infrared (NIR) laser diode, a folding mirror, an imaging lens, and an image detector. We designed the sensor layout and configuration to satisfy the required measurement range and resolution, selecting easily available components in a special effort to reduce cost. We built a prototype and tested it with seven representative indoor wall specimens (white wallpaper, gray wallpaper, black wallpaper, furniture wood, black leather, brown leather, and white plastic) in a typical indoor illuminated condition, 200 lux, on a floor under ceiling mounted fluorescent lamps. We confirmed the proposed sensor provided reliable distance reading of all the specimens over the required measurement range (150-1500 mm) with a measurement resolution of 4% overall and 1% at 1 meter, regardless of illumination conditions.