• Journal of Korean Ophthalmic Optics Society
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• 제10권2호
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• pp.133-138
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• 2005

As Aspheric lenses have producted to development for disadvantage of spherical lenses, the purpose of use on aspheric lenses is in improvement of the imaging quality and decrement of the number of lenses used, they are used for lessen the mass and volume in optical science. The skills to produce optical data and the aspheric are seen as high technology today. The optical science which is composed of aspheric provides broadening view of things and high efficiency. In addition, it provides many advantages such as providing image and reducing the weight. Now, I study with techniques of processing and measuring aspheric to satisfy the necessity of increasing in aspheric data. Furthermore. I emphasize that the techniques of producing, measuring, and evaluating in the aspheric lenses have constantly developing today.

• Journal of the Korean Society of Manufacturing Process Engineers
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• 제10권2호
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• pp.104-109
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• 2011

I present a method of aspheric surface profile measurement using 2nd derivative of local area profile. This method is based on the principle of curvature sensor which measures the local 2nd derivative under test along a line. The profile is then reconstructed from the data on the each point. Unlike subaperture-stiching method and slope detection method, 2nd derivative method has strong points from a geometric point of view in measuring the aspheric surface profile. The second derivative terms of surface profile is an intrinsic property of the test piece, which is independent of its position and tip-tilt motion. The curvature is measured at every local area with high accuracy and high lateral resolution by using White-light scanning interferometry.

• Journal of the Korean Society for Precision Engineering
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• 제21권1호
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• pp.40-45
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• 2004

Recently, aspheric optical lenses and mirrors, which are harder to manufacture and measure than the conventional spherical ones, are widely used, particularly in electronic fabrication process. Generally, interferometric optical method is used for the measurement of spherical optical surface. However, the interferometric method for aspheric surface measurement is difficult because it needs a precise null corrector and strict environmental conditions such as constant temperature, humidity and vibrations. We have been studied on the manufacturing of aspheric optics to improve the surface profile accuracy and productivity using a corrective polishing process. For the corrective polishing, a practical method of On-Machine Measurement (OMM) is required. For this purpose, an optical OMM system has been studied using the Shach-Hartmann test, which is very robust to the practical polishing environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by the least squares fitting. The measured result of the OMM system shows that the maximum deviation is less than 200 nm for the one of commercial Fizeau interferometer Wyko 6000.

• Journal of the Korean Physical Society
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• 제73권11호
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• pp.1657-1662
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• 2018

A null test method which relies on a computer generated hologram (CGH) is widely used to measure a large aspheric surface. For precise measurements of the surface shape of an aspheric optics, the CGH must precisely generate a wavefront that can fit on the ideal surface shape of the aspheric optics. If fabrication errors arise in the CGH, an unwanted wavefront will be generated and the measuring result will lack trustworthiness. Thus far, there has been limited research on wavefronts generated by CGH using only linear-type binary grating models. In this study, a theoretical error model of a circular-type zone plate, the most commonly used types for CGH patterns, is suggested. The proposed error model is checked by simulations and experiments.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 한국공작기계학회 2002년도 추계학술대회 논문집
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• pp.474-480
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• 2002

Aspheric optical lenses and mirrors are widely used in recent. It is more difficult to manufacture and measure the aspherical optics compared to conventional spherical ones. The interferometric optical test is common for the measurement of spherical optical surface. But the application of the interferometry to the measurement of aspheric surface is difficult because it needs a precise null corrector and very careful environmental conditions such as keeping constant temperature, humidity, atmospheric pressure and vibrations. To enhance productivity of optics manufacturing on-machine measurement and correction has been developed in this study. For practical applications, robustness of the measurement method to environments is more important. For the purpose an optical OMM(On-Machine Measurement) system has been developed using Shack-Hartmann test which has robustness to the environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by least square fitting. The measured result of the developed only system gives the maximum deviation only in 200 nm from the result measured by a commercial Fizeau interferometer Wyko 6000.

• Korean Journal of Optics and Photonics
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• 제15권4호
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• pp.313-320
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• 2004

We present a null testing method fer aspheric surfaces, utilizing a phase-shifting diffraction grating interferometer along with a binary amplitude computer generated hologram (CGH). The binary amplitude CGH is designed to compensate for the wavefront between a point source and the aspheric surface under test. The fringe visibility of the grating interferometer is controlled easily by selecting suitable grating diffraction orders for the measurement and reference wavefronts or by optimizing the groove shape of the grating used. The binary amplitude CGH is designed by numerical analysis of ray tracing and fabricated using e-beam lithography for autostigmatic testing. Experimental results of a large-scale aspheric mirror surface are discussed to verify the measurement performance of the proposed diffraction grating interferometer.

• Korean Journal of Optics and Photonics
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• 제18권2호
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• pp.130-134
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• 2007

I present a novel curvature profilometer devised fur the profile measurement of aspheric and free-form surfaces on the nanometer scale. A profile is reconstructed from measuring the curvature of a test part of the surface at several locations along a line. For profile measurement of free-farm surfaces, methods based on local part curvature sensing have strong appeal. Unlike full-aperture interferometry they do not require customized null optics. The measurement accuracy of the curvature profilometer was assessed by comparison with a well-calibrated interferometer in NIST. Experimental results prove that the maximum discrepancy turns out to be 37 nm on the 28 mm measurement range for the spherical mirror.

• Journal of the Korean Society for Precision Engineering
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• 제26권1호
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• pp.57-62
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• 2009

Recently, with the increasing lightness and miniaturization of high resolution camera phones, the demand for aspheric glass lens has increased because plastic and spherical lens are unable to satisfy the required performance. An aspheric glass lens is fabricated by the high temperature and pressure molding using a tungsten carbide molding core, so precision grinding technology for the molding core surface are required. This paper reports a development of feedrate control grinding method for aspherical molding core using parallel grinding method. A plane molding core was ground using conventional and feedrate control grinding method. The performance of the feedrate control method was evaluated by measurement of surface roughness. The result indicated that the average surface roughness was reduced to 1.5 nm, which is more efficient than the conventional grinding method.

• Journal of the Optical Society of Korea
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• 제6권2호
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• pp.21-26
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• 2002

Interferometric metrology with a null CGH(computer-generated hologram) is presented for measuring highly aspheric surfaces used in a large screen projection television system with high accuracy. The cubic spline surface model which works in a single-pass configuration with a refractive index of object space 0 is used for designing a null CGH. A hybrid null corrector with plano-concave lens in front of a CGH is presented to make the CGH easier to fabricate. Experimental results are presented to demonstrate the validity of the proposed technique.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.26-31
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• 2007

A novel scanning probe measurement system was developed to enable precise profile measurements of microaspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented. An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A $50-{\mu}m-diameter$ glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN. The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 nm, The performance of the new scanning probe measurement system was verified by experimental data.