Profile Measurements of Micro-aspheric Surfaces Using an Air-bearing Stylus with a Microprobe |
Shibuya, Atsushi
(Dept of Nanomechanics, School of Engineering, Tohoku University)
Gao, Wei (Dept of Nanomechanics, School of Engineering, Tohoku University) Yoshikawa, Yasuo (Dept of Nanomechanics, School of Engineering, Tohoku University) Ju, Bing-Feng (Dept of Nanomechanics, School of Engineering, Tohoku University) Kiyono, Satoshi (Dept of Nanomechanics, School of Engineering, Tohoku University) |
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