• Title/Summary/Keyword: mass produced particle

Search Result 67, Processing Time 0.023 seconds

반도체 제조공정 중 발생하는 오염입자 측정에 관한 연구

  • Na Jeong-Gil;Kim Tae-Seong
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
    • /
    • 2006.05a
    • /
    • pp.145-149
    • /
    • 2006
  • As the minimum feature size decreases, it is more difficult to control critical contaminant particles. For 16GB flash memory introduced by Samsung a few months ago, 50nm process was used and in this case, contaminant particles as small as 25nm should be control led. The particle beam mass spectrometer (PBMS) was developed to directly sample particles at pressures down to 100 mtorr. This instrument is sensitive to small particles (>5nm) produced in low concentrations ($>20cm^{-3}$). The PBMS has proved to be effect ive in measuring particles generated during semi-conductor fabrication processes, such as low-pressure chemical vapor deposition (LPCVD) of thin films. The operating principle of the PBMS and some measurement results are reviewed in this paper.

  • PDF

Preliminary Estimation of Particle Dry Deposition Fluxes along Coastal Area of Jeju Island

  • Lee, Ki-Ho;Hu, Chul-Goo
    • Environmental Sciences Bulletin of The Korean Environmental Sciences Society
    • /
    • v.10 no.S_2
    • /
    • pp.55-63
    • /
    • 2001
  • This work employs two models to quantify the size-segregated dry deposition fluxes of particle-bound N $O_3$$^{[-10]}$ , N $H_4$$^{+}$, and S $O_4$$^{2-}$ along the coastal area of Jeju Island based on the chemical composition data of aerosol collected during the springtime of 1995. The two approaches produced fairly comparable results, despite the feature differences between the two models. The modelling results obtained indicated that the mean dry deposition velocity was around 0.4 cm $s^{-1}$ for N $O_3$$^{[-10]}$ , 0.2 cm $s^{-1}$ for N $H_4$$^{+}$, and 0.3 cm $s^{-1}$ for S $O_4$$^{2-}$, and the dry deposition flux varied between 371~1368 $\mu\textrm{g}$ $m^{-2}$ da $y^{-1}$ for nitrate, 28~625 $\mu\textrm{g}$ $m^{-2}$ da $y^{-1}$ for ammonium, and 957~6088 $\mu\textrm{g}$ $m^{-2}$ da $y^{-1}$ for sulfate. Although difficulties in collecting giant and/or fine particles limited the understanding of the mass size distribution of particles and thus the ability to refine estimates of the dry deposition flux for the particulate matter, both models were still able to offer sufficient realism to explain the features of the available data collected from the coastal area of Jeju Island.and.

  • PDF

Modeling of 2-D Advection-Diffusion in Natural Streams Using Particle Discrete Probability Distribution Model (입자의 이산확률분포 모형을 이용한 자연하천의 2차원 이송-확산)

  • Kim, Yeong-Do;Seo, Il-Won
    • Journal of Korea Water Resources Association
    • /
    • v.34 no.5
    • /
    • pp.499-509
    • /
    • 2001
  • 2-D transport model based on a discrete probability distribution for a particle displacement was developed too solve advection-diffusion problems in natural stream. In this proposed model, the probabilities expressed as an average and variance function were used to predict the mass transfer between cells in one time step. The proposed model produces solutions without numerical dispersion for constant velocity, diffusion coefficient, and cross-sectional area. When the stability and positivity restrictions were satisfied, the model produced excellent results compared to analytical solutions and other finite difference methods. The proposed model is tested against the dispersion data collected in the Grand River, Canada. The simulation results show that the proposed model can properly describe the two-dimensional mixing phenomena in the natural stream.

  • PDF

Particle loading as a design parameter for composite radiation shielding

  • Baumann, N.;Diaz, K. Marquez;Simmons-Potter, K.;Potter, B.G. Jr.;Bucay, J.
    • Nuclear Engineering and Technology
    • /
    • v.54 no.10
    • /
    • pp.3855-3863
    • /
    • 2022
  • An evaluation of the radiation shielding performance of high-Z-particle-loaded polylactic acid (PLA) composite materials was pursued. Specimens were produced via fused deposition modeling (FDM) using copper-PLA, steel-PLA, and BaSO4-PLA composite filaments containing 82.7, 75.2, and 44.6 wt% particulate phase contents, respectively, and were tested under broad-band flash x-ray conditions at the Sandia National Laboratories HERMES III facility. The experimental results for the mass attenuation coefficients of the composites were found to be in good agreement with GEANT4 simulations carried out using the same exposure conditions and an atomistic mixture as a model for the composite materials. Further simulation studies, focusing on the Cu-PLA composite system, were used to explore a shield design parameter space (in this case, defined by Cu-particle loading and shield areal density) to assess performance under both high-energy photon and electron fluxes over an incident energy range of 0.5-15 MeV. Based on these results, a method is proposed that can assist in the visualization and isolation of shield parameter coordinate sets that optimize performance under targeted radiation characteristics (type, energy). For electron flux shielding, an empirical relationship was found between areal density (AD), electron energy (E), composition and performance. In cases where ${\frac{E}{AD}}{\geq}2MeV{\bullet}cm{\bullet}g^{-1}$, a shield composed of >85 wt% Cu results in optimal performance. In contrast, a shield composed of <10 wt% Cu is anticipated to perform best against electron irradiation when ${\frac{E}{AD}}<2MeV{\bullet}cm{\bullet}g^{-1}$.

Kinetic and Thermodynamic Features of Combustion of Superfine Aluminum Powders in Air

  • Kwon, Young-Soon;Park, Pyuck-Pa;Kim, Ji-Soon;Gromov, Alexander;Rhee, Chang-Kyu
    • Journal of Powder Materials
    • /
    • v.11 no.4
    • /
    • pp.308-313
    • /
    • 2004
  • An experimental study on the combustion of superfine aluminum powders (average particle diameter, a$_{s}$: ∼0.1 ${\mu}{\textrm}{m}$) in air is reported. The formation of aluminum nitride during the combustion of aluminum in air and the influence of the combustion scenario on the structures and compositions of the final products are in the focus of this study. The experiments were conducted in an air (pressure: 1 atm). Superfine aluminum powders were produced by the wire electrical explosion method. Such superfine aluminum powder is stable in air but once ignited it can burn in a self-sustaining way due to its low bulk: density (∼0.1 g/㎤) and a low thermal conductivity. During combustion, the temperature and radiation were measured and the actual burning process was recorded by a video camera. Scanning electron microscopy (SEM), X-ray diffraction (XRD) and chemical analysis were performed on the both initial powders and final products. It was found that the powders, ignited by local heating, burned in a two-stage self-propagating regime. The products of the first stage consisted of unreacted aluminum (-70 mass %) and amorphous oxides with traces of AlN. After the second stage the AlN content exceeded 50 mass % and the residual Al content decreased to ∼10 mass %. A qualitative discussion is given on the kinetic limitation for AlN oxidation due to rapid condensation and encapsulation of gaseous AlN.N.

SPH-Based Wave Tank Simulations (SPH 기법 기반의 파동수조 시뮬레이션)

  • Lee, Sangmin;Kim, Mujong;Ko, Kwonhwan;Hong, Jung-Wuk
    • Journal of the Computational Structural Engineering Institute of Korea
    • /
    • v.34 no.1
    • /
    • pp.59-69
    • /
    • 2021
  • Recently, large-scale offshore and coastal structures have been constructed owing to the increasing interest in eco-friendly energy development. To achieve this, precise simulations of waves are necessary to ensure the safe operations of marine structures. Several experiments are required in the field to understand the offshore wave; however, in terms of scale, it is difficult to control variables, and the cost is significant. In this study, numerical waves under various wave conditions are produced using a piston-type wavemaker, and the produced wave profiles are verified by comparing with the results from a numerical wave tank (NWT) modeled using the smoothed particle hydrodynamics (SPH) method and theoretical equations. To minimize the effect by the reflected wave, a mass-weighted damping zone is set at the right end of the NWT, and therefore, stable and uniform waves are simulated. The waves are generated using the linear and Stokes wave theories, and it is observed that the numerical wave profiles calculated by the Stokes wave theory yield high accuracy. When the relative depth is smaller than two, the results show good agreement irrespective of the wave steepness. However, when the relative depth and wave steepness are larger than 2 and 0.04, respectively, the errors are negligible if the measurement position is close to the excitation plate. However, the error is 10% or larger if the measurement position is away from the excitation location. Applicable target wave ranges are confirmed through various case studies.

Physical, Morphological, and Chemical Analysis of Fly Ash Generated from the Coal Fired Power Plant (석탄 화력발전소에서 발생되는 석탄회 특성과 형성 분석에 관한 연구)

  • 이정언;이재근
    • Journal of Energy Engineering
    • /
    • v.7 no.1
    • /
    • pp.146-156
    • /
    • 1998
  • Fly ash produced in coal combustion is a fine-grained material consisting mostly of spherical, glassy, and porous particles. A physical, morphological, and chemical characteristic of fly ash has been analyzed. This study may contribute to the data base of domestic fly ash, the improvement of combustion efficiency, ash recycling and ash collection in the electrostatic precipitator. The physical property of fly ash is determined using a particle counter for the measurement of ash size distribution and gravimeter. Morphological characteristic of fly ash is performed using a scanning electron micrograph and an optical microscope. The chemical components of fly ash are determined using an inductively coupled plasma emission spectrometry (ICP). The distribution of fly ash size was ranged from 15 to 25 $\mu$m in mass median diameter. Exposure conditions of flue gas temperature and duration within the combustion zone of the boiler played an important role on the morphological properties of the fly ash such as shape, relative opacity, coloration, cenosphere and plerosphere. The spherical fly ash might be generated at the condition of complete combustion. The size of fly ash was found to be increased the with particle-particle interaction of agglomeration and coagulation. Fly ash consisted of $SiO_2\;Al_2O_3\;and\;Fe_2O_3$ with 85% and carbon with 3~10% of total mass.

  • PDF

A Review on the Wet Chemical Synthesis of Sulfide Solid Electrolytes for All-Solid-State Li Batteries (전고체전지용 황화물 고체전해질 습식 합성기술 동향)

  • Ha, Yoon-Cheol
    • Journal of the Korean Electrochemical Society
    • /
    • v.25 no.3
    • /
    • pp.95-104
    • /
    • 2022
  • The development of non-flammable all-solid-state batteries (ASSLBs) has become a hot topic due to the known drawbacks of commercial lithium-ion batteries. As the possibility of applying sulfide solid electrolytes (SSEs) for electric vehicle batteries increases, efforts for the low-cost mass-production are actively underway. Until now, most studies have used high-energy mechanical milling, which is easy to control composition and impurities and can reduce the process time. Through this, various SSEs that exceed the Li+ conductivity of liquid electrolytes have been reported, and expectations for the realization of ASSLBs are growing. However, the high-energy mechanical milling method has disadvantages in obtaining the same physical properties when mass-produced, and in controlling the particle size or shape, so that physical properties deteriorate during the full process. On the other hand, wet chemical synthesis technology, which has advantages in mass production and low price, is still in the initial exploration stage. In this technology, SSEs are mainly manufactured through producing a particle-type, solution-type, or mixed-type precursor, but a clear understanding of the reaction mechanism hasn't been made yet. In this review, wet chemical synthesis technologies for SSEs are summarized regarding the reaction mechanism between the raw materials in the solvent.

Comparison of the Characteristics of 16 Commercial Nebulizer/Compressor Combinations Used in Korea (국내 시판되는 16가지 연무기/압축기의 성능 평가)

  • Kim, Hyun Jung;Lee, Cho Ae;Hwang, Eun Kyung;Han, Man Young;Ann, Uk Sung;Cho, Young Min
    • Clinical and Experimental Pediatrics
    • /
    • v.46 no.12
    • /
    • pp.1235-1241
    • /
    • 2003
  • Purpose : We assessed the dynamic characteristics of 16 nebulizer/compressor combinations currently available in Korea. Methods : The 16 nebulizer/compressor combinations(Pariboy Type 38/Long life, Pariboy Type N/Long life, Pariboy Type N/Salter 8900, Pariboy Type N/LC, Devilbiss pulmoaid-LT/Hudson, Devilbiss pulmoaid/Hudson, Mesmed neb-300/Own, San-up 3040/Hudson, Midas(Basic)/Own, AirJolie 2/Hudson, Thomas 1127/Salter 8900, Noel NE-2000/Salter 8900, Omron CX3/Hudson, Chang Woo CWN-100/Salter 8900, Voyage/Mefar, Chang Woo ASI-Pro/Medel jet pulse) were evaluated in terms of particle size and mass output. In addition, we determined the effects of nebulizer fill volume on mass output. Results : Pariboy Type N/Long life has the highest respirable mass of 0.184 mg/min and Mesmed Neb-300/Own has the lowest 0.019 mg/min. Pariboy Type N/Long life has the highest mass output of 0.68 mg/min and the shortest mass median aerodynamic diameter(MMAD) of $3.76{\mu}m$. All combinations other than Pariboy Type N/Long life produced a MMAD of over $5{\mu}m$. MMAD over a 5 min nebulization ranged 3.76 to $9.83{\mu}m$. There were no significant effects of fill volume on mass output. Conclusion : We concluded that there is a wide variation in performance of nebulizer/compressor combinations. The characteristics of nebulizer/compressor combinations should be considered in selecting products.

A Morphological Study on the Titanium-Oxide Foams Processed Using Freeze-Casting (동결 주조법으로 제조된 티타늄 옥사이드 폼의 구조 연구)

  • Yoon, Hyunjung;Choe, Heeman;Choi, Hyelim
    • Journal of the Korean Ceramic Society
    • /
    • v.49 no.5
    • /
    • pp.427-431
    • /
    • 2012
  • The $TiO_2$ foam synthesized using freeze-casting is a promising photocatalyst and photovoltaic electrode for a variety of energy applications, because the freeze-casting technique is easy to use, cheap, and suitable for mass-production. Despite its several advantages, little scientific information is available on the processing and morphology of the $TiO_2$ foams processed by freeze-casting. In particular, no systematic study has been performed on the microstructural evolution and morphological change of the rutile-phase $TiO_2$ foams during sintering. Therefore, in the present study, several $TiO_2$ foam samples were produced using the freeze-casting technique, which were then sintered at a relatively high temperature of $1200^{\circ}C$ for 1, 2, and 4 h to compare the morphological changes in the microstructure and to understand the effects of processing parameters of the rutile-phase $TiO_2$ foams. The foam ligament size increased near linearly with increasing sintering time whereas the average pore size decreased only slightly with increasing sintering time, with changes in particle morphology from sphere to rod and complete phase transformation from anatase to rutile.