• Title/Summary/Keyword: low-temperature oxide

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Simulation Results of Piezoelectric Microspeakers due to Structural Changes (구조변화에 따른 압전형 마이크로스피커의 모의해석)

  • Jeong, Kyong-Shik;Ur, Soon-Chul;Cho, Hee-Chan;Yi, Seung-Hwan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.327-327
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    • 2007
  • This paper reports the simulation results of piezoelectric microspeakers due to structural changes(diaphragm materials, corrugation width and electrode shapes). When we compared the dependence of diaphragm material properties, the microspeaker with LTO(Low Temperature Oxide) diaphragm shows higher deflection than that of silicon nitride diaphragm, even though the resonant frequencies are almost same in both cases. In case of circular-electrode microspeaker, the deflection of diaphragm is about $16\;{\mu}m$ at 20 V, and it decreases as the corrugation width is decreased. However, the deflection of diaphragm with the square-electrode reveals almost twice times higher value at the same applied voltage than the circular one, and it increases as the corrugation depths are decreased from $30\;{\mu}m\;to\;10\;{\mu}m$. The first resonant frequency of microspeakers present about 1.8 kHz in circular-electrode and 1.2 kHz in square-electrode, respectively.

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Properties of ZnO thin film grown on $Al_2O_3$ substrate pretremented by nitrogen ion beam (이온빔으로 질화처리된 사파이어기판위에 성장한 ZnO박막의 특성)

  • Park, Byung-Jun;Jung, Yeon-Sik;Park, Jong-Young;Choi, Du-Jin;Choi, Won-Kook;Yoon, Seok-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07a
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    • pp.413-416
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    • 2004
  • In this study, zinc oxide(ZnO) having large misfit(18.2%) with sapphire was tried to be grown on very thin nitride buffer layers. For the creation of various kinds of nitride buffer layer, sapphire surface was modified by an irradiation of nitrogen ion beam with low energy generated from stationary plasma thruster(SPT) at room temperature. After the irradiation of ion beam, Al-N and Al-O-N bonding was identified to be formed as nitride buffet layers. Surface morphology was measured by AFM and then ZnO growth was followed by pulsed laser deposition(PLD). Their properties are analyzed by XRD, AFM, TEM, and PL. We observed that surface morphology was improved and deep level emission related to defects was almost vanished in PL spectra from the ZnO grown on nitride buffer layer.

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Preparation of Conductive SrMoO3 Thin Films by RF Magnetron Sputtering and Evaluation of Their Electrical Conduction Properties (RF 마그네트론 스퍼터법을 사용한 전도성 SrMoO3 박막 제조 및 전기전도특성 평가)

  • Ryu, Hee-Uk;Sun, Ho-Jung
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.6
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    • pp.468-472
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    • 2011
  • Conductive $SrMoO_3$ thin films were fabricated by RF magnetron sputtering with the powder-type sputtering target, and annealed for crystallization. When RTP (rapid thermal processing) in vacuum was applied, the fabricated thin films showed the mixed phases of $SrMoO_3$ and $SrMoO_4$, but $SrMoO_3$ phase could be promoted by the lowering of the working pressure during deposition. In order to eliminate $O_2$ gas during deposition and annealing, further lowering of the working pressure and furnace annealing in hydrogen atmosphere were tried. With the optimization of the deposition and annealing conditions, the thin film with nearly single-phase of $SrMoO_3$ was obtained, and it showed good electrical conduction properties with a low resistivity of $2.5{\times}10^{-3}{\Omega}{\cdot}cm$ at room temperature.

A Study of the Dielectric Properties of the Silver-Tantalate-Niobate Thick Films (Silver-Tantalate-Niobate Thick Film의 유전 특성 연구)

  • Lee, Ku-Tak;Yun, Seok-Woo;Kang, Ey-Goo;Koh, Jung-Hyuk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.7
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    • pp.521-524
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    • 2010
  • Low loss perovskite niobates and tantalates have been placed on a short list of functional materials for future technologies. In this study, we fabricated Ag(Ta,Nb)$O_3$ thick films on the $Al_2O_3$ substrates by the screen printing method. The Ag(Ta,Nb)$O_3$ powders were fabricated by the mixed oxide method. The sintering temperature and time were $1150^{\circ}C$ and 2 hrs, respectively. The results of XRD analysis showed that the specimens employed in this study had the pesudo cubic structure. The dielectric permittivity and loss tangent of the films have been characterized from 1 kHz to 1 MHz. Also the dielectric permittivity and loss tangent were measured from 303 K to 393 K. The electrical properties of the film are also discussed.

Electrical and Optical properties of TiO2-doped ZnO Films prepared on PEN by RF-magnetron Sputtering Method (고주파 마그네트론 스퍼터링에 의해 성막된 TiO2가 도핑된 ZnO 박막의 전기적 및 광학적 특성)

  • Kim, Hwa-Min;Sohn, Sun-Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.10
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    • pp.837-843
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    • 2009
  • $TiO_2$(2 wt.%)-doped ZnO(TZO) films with thickness from 100 nm to 500 nm were prepared on polyethylene naphthalate(PEN) substrate under various rf-power range from 40 W to 80 W. Their electrical and optical properties were investigated as a function of rf-power. We think that these properties were closely related with the crystallization and the film density of TZO films. It was also presumed that the vaporization of the water vapor and other adsorbed particles such as an organic solvents can affect the electrical properties of the conventional transparent conductive oxide(TCO) films. On the other hand, since the TZO film deposited on glass substrate at room temperature with rf-power of 80 W shows a very low resistivity of $7.5\times10^{-4}\;\Omega{\cdot}cm$ and a very excellent transmittance over an average 85% in the visible range, that is comparable to that of ITO films. Therefore, we expect that the TZO films can be used as transparent electrode for optoelectronic devices such as touch-panels, flat-panel displays, and thin-film solar cells.

Study on Self-Organized Ru Dots Using ALD and Low Temperature Rapid Thermal Annealing Process (ALD와 저온 RTA를 이용한 자가정렬 Ru 응집체의 제조와 물성)

  • Park, Jongseung;Noh, Yunyoung;Song, Ohsung
    • Korean Journal of Metals and Materials
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    • v.50 no.8
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    • pp.557-562
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    • 2012
  • Self-organized ruthenium (Ru) dots were fabricated by $400^{\circ}C$ RTA (rapid thermal annealing) and ALD (atomic layer deposition). The dots were produced under the $400^{\circ}C$ RTA conditions for 10, 30 and 60 seconds on all Si(100)/200 nm-SiO2, glass, and glass/fluorine-doped tin oxide (FTO) substrates. Electrical sheet resistance, and surface microstructure were examined using a 4-point probe and FE-SEM (field emission scanning electron microscopy). Ru dots were observed when a 30 nm-Ru layer on a Si(100)/200 nm-SiO2 substrate was annealed for 10, 30 and 60 seconds, whereas the dots were only observed on a glass substrate when a 50 nm-Ru layer was annealed on glass. For a glass/FTO substrate, RTA <30 seconds was needed for 30 nm Ru thick films. Those dots can increase the effective surface area for silicon and glass substrates by up to 5-44%, and by 300% for the FTO substrate with a < $20^{\circ}$ wetting angle.

A Comparative Study of Morphology and Structure related Properties of Saturated Olefinic Thermoplastic Elastomer Blends of EPDM/PP/Oil and SEBS/PP/Oil

  • Sengupta, P.;Sengers, W.G.F.;Gotsis, A.D.;Noordermeer, J.W.M.
    • Elastomers and Composites
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    • v.38 no.1
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    • pp.27-37
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    • 2003
  • This work presents a comparative study of the morphology and structure related properties of thermoplastic elastomer blends based on SEBS/PP/Oil and dynamically vulcanized EPDM/PP/Oil. A combination of ruthenium oxide staining and low voltage scanning electron microscopy (LVSEM) was found to be suitable for the study of morphology of these highly oil extended blends. h close analogy was found in the mechanical, thermal and rheological properties of the two systems made in an internal Brabender mixer and co-rotating turin screw extruder. The morphology of the blends, as made by the two techniques, was found to be significantly different. In the case of TPVs, the blonds made in the extruder had smaller EPDM domains and better tensile properties. In the case of SEBS, the blends made in the Brabender had more co-continuous phases and showed better tensile properties. Crystallization behavior of the isotactic polypropylene in the blends was found to be influenced by the type of rubber. Blends of SEBS/PP crystallized at a lower temperature than the TPVs. These differences were probably caused by differences in the nucleating ability of the two rubbers.

Analysis of Ni/Cu Metallization to Investigate an Adhesive Front Contact for Crystalline-Silicon Solar Cells

  • Lee, Sang Hee;Rehman, Atteq ur;Shin, Eun Gu;Lee, Doo Won;Lee, Soo Hong
    • Journal of the Optical Society of Korea
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    • v.19 no.3
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    • pp.217-221
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    • 2015
  • Developing a metallization that has low cost and high efficiency is essential in solar-cell industries, to replace expensive silver-based metallization. Ni/Cu two-step metallization is one way to reduce the cost of solar cells, because the price of copper is about 100 times less than that of silver. Alkaline electroless plating was used for depositing nickel seed layers on the front electrode area. Prior to the nickel deposition process, 2% HF solution was used to remove native oxide, which disturbs uniform nickel plating. In the subsequent step, a nickel sintering process was carried out in $N_2$ gas atmosphere; however, copper was plated by light-induced plating (LIP). Plated nickel has different properties under different bath conditions because nickel electroless plating is a completely chemical process. In this paper, plating bath conditions such as pH and temperature were varied, and the metal layer's structure was analyzed to investigate the adhesion of Ni/Cu metallization. Average adhesion values in the range of 0.2-0.49 N/mm were achieved for samples with no nickel sintering process.

Indium doping induced defect structure evolution and photocatalytic activity of hydrothermally grown small SnO2 nanoparticles

  • Zeferino, Raul Sanchez;Pal, Umapada;Reues, Ma Eunice De Anda;Rosas, Efrain Rubio
    • Advances in nano research
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    • v.7 no.1
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    • pp.13-24
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    • 2019
  • Well-crystalline $SnO_2$ nanoparticles of 4-5 nm size with different In contents were synthesized by hydrothermal process at relatively low temperature and characterized by transmission electron microscopy (TEM), microRaman spectroscopy and photoluminescence (PL) spectroscopy. Indium incorporation in $SnO_2$ lattice is seen to cause a lattice expansion, increasing the average size of the nanoparticles. The fundamental phonon vibration modes of $SnO_2$ lattice suffer a broadening, and surface modes associated to particle size shift gradually with the increase of In content. Incorporation of In drastically enhances the PL emission of $SnO_2$ nanoparticles associated to deep electronic defect levels. Although In incorporation reduces the band gap energy of $SnO_2$ crystallites only marginally, it affects drastically their dye degradation behaviors under UV illumination. While the UV degradation of methylene blue (MB) by undoped $SnO_2$ nanoparticles occurs through the production of intermediate byproducts such as azure A, azure B, and azure C, direct mineralization of MB takes place for In-doped $SnO_2$ nanoparticles.

Synthesis of Cu2O Particles Using the Hydrothermal Method (수열합성법을 이용한 Cu2O 입자의 합성)

  • Seongmin Shin;Kyunghwan Kim;Jeongsoo Hong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.37 no.1
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    • pp.63-67
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    • 2024
  • In this study, we successfully synthesized copper oxide (Cu2O) particles through a hydrothermal method at a relatively low temperature (150℃). The synthesis involved the precise control of molar concentrations of NaOH. Notably, Cu2O particles were effectively synthesized when NaOH concentrations of 0.15 M and 0.20 M were utilized. While attempts were made at different molar concentrations, the synthesis of pure Cu2O particles was only achieved at concentrations of 0.15 M and 0.20 M. In this experimental investigation, Cu2O synthesized under these specific conditions exhibited absorption characteristics within the wavelength range of 640 to 570 nm, consistently exhibiting a band gap energy of 1.9 eV. These Cu2O particles, characterized by their small band gap energy and straightforward synthetic method, hold significant promise for various applications including semiconductors and solar cells.