Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Simulation Results of Piezoelectric Microspeakers due to Structural Changes

구조변화에 따른 압전형 마이크로스피커의 모의해석

  • Jeong, Kyong-Shik (Department of Mechanical Engineering/RIC-ReSEM, Chungju National University) ;
  • Ur, Soon-Chul (Department of Material Science and Engineering/RIC-ReSEM, Chungju National University) ;
  • Cho, Hee-Chan (Department of Mechanical Engineering/RIC-ReSEM, Chungju National University) ;
  • Yi, Seung-Hwan (Department of Mechanical Engineering/RIC-ReSEM, Chungju National University)
  • 정경식 (충주대학교 기계공학과/친환경 에너지 부품소재센터) ;
  • 어순철 (충주대학교 신소재공학과/친환경 에너지 부품소재센터) ;
  • 조희찬 (충주대학교 기계공학과/친환경 에너지 부품소재센터) ;
  • 이승환 (충주대학교 기계공학과/친환경 에너지 부품소재센터)
  • Published : 2007.11.01
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Abstract

This paper reports the simulation results of piezoelectric microspeakers due to structural changes(diaphragm materials, corrugation width and electrode shapes). When we compared the dependence of diaphragm material properties, the microspeaker with LTO(Low Temperature Oxide) diaphragm shows higher deflection than that of silicon nitride diaphragm, even though the resonant frequencies are almost same in both cases. In case of circular-electrode microspeaker, the deflection of diaphragm is about $16\;{\mu}m$ at 20 V, and it decreases as the corrugation width is decreased. However, the deflection of diaphragm with the square-electrode reveals almost twice times higher value at the same applied voltage than the circular one, and it increases as the corrugation depths are decreased from $30\;{\mu}m\;to\;10\;{\mu}m$. The first resonant frequency of microspeakers present about 1.8 kHz in circular-electrode and 1.2 kHz in square-electrode, respectively.

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