• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.70-76
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• 2002

Effectiveness of corrective machining algorithm is verified experimentally in this paper by performing corrective machina work practically to single side and double sides hydrostatic tables. Lapping is applied as machining method. Machining information is calculated from measured motion errors by applying the algorithm, without information on rail profile. It is possible to acquire 0.13$\mu$m of linear motion error, 1.40arcsec of angular motion error in the case of single side table, and 0.07$\mu$m of linear motion error, 1.42arcsec of angular motion error in the case of double sides table. The experiment is performed by an unskilled person after he experienced a little of preliminary machining training. Experimental results show that corrective machining algorithm is very effective, and anyone can improve the accuracy of hydrostatic table by using the algorithm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.380-384
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• 1997

For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. Reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, correctwe machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysls method proposed in the previous paper. These processes can be rtcrated if the analized motion errors are worse than target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail after corrective machining are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm IS effective to acquire the corrective machming information to improve the accuracy of hydrostatic table.

• Journal of Institute of Control, Robotics and Systems
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• v.18 no.9
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• pp.823-829
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• 2012

An excitation table is commonly used for vibration and ride tests for parts or assemblies of automobiles, aircrafts, or other heavy systems. The authors have analyzed several kinematic properties of an excitation table that is under development for heavy transport vehicles. It consists of one table and 7 linear hydraulic actuators. The authors have performed mobility analysis, inverse kinematics, forward kinematics, and singularity analysis. Especially, we have proposed a fast forward kinematic solution considering the limited motion of the excitation table. On the assumption that the motion variables such as rotation angles and displacements are small, the forward kinematic problem is converted to the observer problem of a linear system. This provides a fast solution. Also we have verified that there are no singularity points in the working range by numerical analysis.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.5
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.1
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• pp.65-70
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• 2002

An analysis method for calculating motion accuarcy of double sides hydrostatic table is proposed in this paper. In this method, profiles of each rails are assumed as periodic function, therefore it is represented as the sum of spacial frequencies. Bearing clearance at any position rail is depended on the variation of linear, angular motion error of table and the form errors of both sides of a rail. Finite element method is applied to calculate pressure distributions in bearing clearance. In order to simplify the analyzing process, double sides table model is converted into equivalent single side table model. Results calculated by the proposed modeling method agree well with the results directly caculated by double sides modeling method, and also agree well with experimental results. From the theoretical and experimental analysis, it is verified that the proposed analysis method is very effective to analyze the motion accuracy of double sides hydrostatic table.

• International Journal of Precision Engineering and Manufacturing
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• v.5 no.3
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• pp.62-68
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• 2004

Effectiveness of a corrective machining algorithm, which can construct the proper machining information to improve motion errors utilizing measured motion errors, is verified experimentally in this paper, Corrective machining process is practically applied to single and double side hydrostatic bearing tables. Lapping process is applied as a machining method. The machining information is obtained from the measured motion errors by applying the algorithm, without any information on the rail profile. In the case of the single-side table, after 3 times of corrective remachining, linear and angular motion errors are improved up to 0.13 $\mu\textrm{m}$ and 1.40 arcsec from initial error of 1.04 $\mu\textrm{m}$ and 22.71 arcsec, respectively. In the case of the double-side table, linear and angular motion error are improved up to 0.07 /$\mu\textrm{m}$ and 1.42 arcsec from the initial error of 0.32 $\mu\textrm{m}$ and 4.14 arcsec. The practical machining process is performed by an unskilled person after he received a preliminary training in machining. Experimental results show that the corrective machining algorithm is very effective and easy to use to improve the accuracy of hydrostatic tables.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.269-270
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• 2007

• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.62-69
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• 2002

For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, corrective machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysis method proposed in the previous paper. These processes can be iterated until the analized motion errors are satisfied with target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail, after corrective machining, are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm is effective to acquire the corrective machining information to improve the accuracy of hydrostatic table.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.135-141
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• 2005

Measurement of five DOF motion errors in a ultra precision feed table was attempted in this study. Yaw and pitch error were measured by using a laser interferometer and roll error was measured by using the reversal method. Linear motion errors in the vertical and horizontal directions were measured by using the sequential two point method. In this case, influence of angular motion errors was compensated by using the previously measured ones by the laser interferometer and the reversal method. The capacitive type sensors and an optical straight edge were used in the reversal method and the sequential two point method. Influence of thermal deformation on sensor jig was investgated and minimized by the periodic measurement according to the variation of room temperature. Deviation of gain between sensors was also compensated using the step response data. 5 DOF motion errors of a hydrostatic table driven by the linear motor werer tested using the measurement method. In the horizontal direction, measuring accuracies for the linear and angular motion were within ${\pm}0.02\;{\mu}m$ and ${\pm}0.04$ arcsec, respectively. In the vertical direction, they were within ${\pm}0.02{\mu}m$ and ${\pm}0.05$ arcsec. From these results, it was found that the introduced measurement method was very effective to measure 5 DOF motion errors of the ultra precision feed tables.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.692-695
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• 2000

This paper is concerned with Accuracy Design of LM Guide System in Machine Tools. Elastic deformation of bearing is calculated by Hertz contact theory and motion error of LM block is analyzed. A new algorithm using block stiffness is proposed fur the analysis of motion accuracy of the table. The best advantage of this algorithm is fast analysis speed because it isn't necessary iteration processes for satisfying equilibrium equation of the table. Motion errors of the table analyzed under artificial form error of rail theoretically and experimentally. Only one of two rails is bent by putting a thickness gauge into horizontal direction. This form error of rail is measured by gap sensor against the other rail. Then, motion errors of the table are predicted by proposed new algorithm theoretically and measured by laser interferometer. Measurements are carried out by changing the preload and thickness. The results show that the table motion errors are reduced from 1/2 to 1/60 times than form error of rail according to its height and width. And the effect of preloading is almost negligible.