Experimental Verification on the Corrective Machining Algorithm for Improving the Motion Accuracy of Hydrostatic Bearing Tables

Effectiveness of a corrective machining algorithm, which can construct the proper machining information to improve motion errors utilizing measured motion errors, is verified experimentally in this paper, Corrective machining process is practically applied to single and double side hydrostatic bearing tables. Lapping process is applied as a machining method. The machining information is obtained from the measured motion errors by applying the algorithm, without any information on the rail profile. In the case of the single-side table, after 3 times of corrective remachining, linear and angular motion errors are improved up to 0.13 $\mu\textrm{m}$ and 1.40 arcsec from initial error of 1.04 $\mu\textrm{m}$ and 22.71 arcsec, respectively. In the case of the double-side table, linear and angular motion error are improved up to 0.07 /$\mu\textrm{m}$ and 1.42 arcsec from the initial error of 0.32 $\mu\textrm{m}$ and 4.14 arcsec. The practical machining process is performed by an unskilled person after he received a preliminary training in machining. Experimental results show that the corrective machining algorithm is very effective and easy to use to improve the accuracy of hydrostatic tables.