• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.562-565
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• 2001

In this paper, novel device structures in order to realize ultra fast and ultra small silicon devices are investigated using ultra-high vacuum chemical vapor deposition(UHVCVD) and Excimer Laser Annealing (ELA). Based on these fundamental technologies for the deep sub-micron device, high speed and low power devices can be fabricated. These junction formation technologies based on damage-free process for replacing of low energy ion implantation involve solid phase diffusion and vapor phase diffusion. As a result, ultra shallow junction depths by ELA are analyzed to 10~20nm for arsenic dosage(2${\times}$10$\_$14//$\textrm{cm}^2$), exciter laser source(λ=248nm) is KrF, and sheet resistances are measured to 1k$\Omega$/$\square$ at junction depth of 15nm and realized sub-50nm n-MOSFET.

• JSTS:Journal of Semiconductor Technology and Science
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• 제14권2호
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• pp.169-174
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• 2014

As a versatile processing method for nanoscale memory integration, laser-induced epitaxial growth is proposed for the fabrication of vertical Si channel (VSC) transistor. The fabricated VSC transistor with 80 nm gate length and 130 nm pillar diameter exhibited field effect mobility of $300cm^2/Vs$, which guarantees "device quality". In addition, we have shown that this VSC transistor provides memory operations with a memory window of 700 mV, and moreover, the memory window further increases by employing charge trap dielectrics in our VSC transistor. Our proposed processing method and device structure would provide a promising route for the further scaling of state-of-the-art memory technology.

• 산업기술연구
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• 제26권B호
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• pp.35-41
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• 2006

Recently, as ultrasonic medical devices are gradually developed, many of those requires smaller and more precision coaxial cables in probe. So, the use of micro coaxial cable becomes an efficient solution for ultrasonic machine. However, there are many difficulties in stripping micro coaxial cable by traditional mechanical process. In this paper, we use the Nd-YAG laser for the efficient stripping of conduct wire of cable. We propose a new method to strip the shield wire of micro coaxial cable. Through some experiments, we found that there is a new possibility in the proposed method. Also, in order to enhance the performance, we propose a preprocess of the cable before stripping.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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• pp.310-313
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• 2005

CW laser dopant activation (CLDA) is suggested as an alternative to conventional thermal annealing. The sheet resistance of the ion doped poly-Si after CLDA is sufficiently low compared to the value measured after thermal annealing. The surface damage due to ion doping on the poly-Si can be recovered while CW laser scan for dopant activation. Therefore, the CLDA can be applied to LTPS processing.

• 대한전기학회논문지
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• 제35권9호
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• pp.375-379
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• 1986

The HCP(Hypocycloidal Pinch) device for plasma focus was modified for a pumping source of the dye laser, and the spectral distribution and time behavior of its light pulses were investigated by using a UV spectrometer, 70 MHz CRO and Si-PIN photodiode detector. An array of multiple stages of HCP and narrower electrode gaps were chosen in order to make a more uniform discharge along the HCP axis. The possible spectral range for the pumping of dye laser is 360-620nm, when the HCP is operated at 5-8kv of apllied voltage and 50-150Torr of Ar fill gas pressure. The rise-time and FWHM of light pulses from the HCP are 5us and 30-50us respectively when it is operated under the same conditions as above.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 하계종합학술대회 논문집(5)
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• pp.9-12
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• 2001

Optical aligning process to archive the maximum optical coupling is crucial in many optical device manufacturing line such as laser diode module. Due to the three-dimensional nature of housing module and the aligning process for laser diode coupler, large amount of the manufacturing time, typically ranging from tens of minutes to an hour has to be devoted to the aligning process alone. In this thesis, we propose a new optical aligning process that employee a two-pass algorithm: coarse-to-fine search. Coarse search is a kind of blind search that finds the candidate region where the maximum optical coupling might mostly occur, followed by a fine searching that finds the maximum within the candidate region. The algorithm has been tested on 50 samples of cam-type laser diode modules, and the experimental results are analyzed in terms of aligning time and coupling efficiency.

• 한국정밀공학회지
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• 제26권9호
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• pp.64-71
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• 2009

Recently as ultrasonic medical devices are gradually developed, many of those require smaller and more precision coaxial cables in the probe. So, the use of micro coaxial cable becomes an efficient solution for ultrasonic machine. However, there are many difficulties in stripping micro coaxial cable by traditional mechanical process. In this paper we use the Nd:YAG laser for the efficient striping of conduct wire of cable. Through some experiments, we found that there is a new possibility in the proposed method. Also, we propose a pre-process of the cable before stripping in order to enhance the performance.

• Current Optics and Photonics
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• 제3권5호
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• pp.445-450
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• 2019

The influence of high-power laser diode (HPLD) emitter width on the device performance is investigated for 975-nm (In,Ga)(As,P)/(Al,Ga)As broad-area HPLDs, using self-consistent electro-thermal-optical simulation. To guarantee the simulation's accuracy, simulated results are matched with the measured results for a sample HPLD with fitting parameters. The influences of HPLD emitter width on temperature distribution, output power, and the beam product parameter (BPP) are analyzed for three different emitter widths of 50, 70, and $90{\mu}m$. It is found that a device with smaller emitter width exhibits both thermal rollover and thermal blooming at lower output power, but smaller BPP.

• 마이크로전자및패키징학회지
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• 제28권4호
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• pp.51-55
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• 2021

본 논문은 보통 병원에서 간호사가 수작업으로 진행하는 약물주입 과정을 대신할 수 있는 의료용 미세 유량 제어 장치를 소개한다. 이는 아두이노로 구현되었으며 환자의 지속적인 관리에 도움이 되고자 한다. 기본적으로 연동펌프를 통해 약물이 주입되며 RGB color sensor를 통해 배출액의 색상을 값으로 받아들이고 이 값을 바탕으로 수액백에 달린 연동펌프의 모터 속도를 조절하는 알고리즘을 아두이노 코딩을 통해 구현한다. 전체적인 시스템은 배터리를 통해 작동되며 연구실에서 355nm UV pulsed laser를 통해 제작한 LIG strain sensor의 추가를 통해 수액백으로부터 주입되는 약물의 양을 측정한다. 이렇게 제작된 미세 유량 제어 장치는 모든 과정을 수작업으로 진행해오던 병원에 곧장 사용 가능하며 간호사의 편의를 제공하고자 한다. 이 장치를 통해 한층 향상된 의료서비스를 제공할 수 있다.

• 한국화재소방학회논문지
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• 제29권4호
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• pp.81-88
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• 2015

본 연구에서는 다양한 화재실험에서 광학 연기밀도 측정을 위하여 광소멸법을 이용한 저가형 장치가 개발되었다. 저가형 장치의 상대적 측정 정확도는 He-Ne 레이저, 포토디텍터 및 다양한 광학부품을 이용한 고가의 표준장치에 의해 측정된 연기밀도의 비교를 통해 평가되었다. 저가형 장치는 레이저 모듈, 포토셀 그리고 아크릴 보드로 구성되었다. 연기농도의 조절이 용이한 연기 발생장치 실험을 통해, 저가형 장치는 표준장치에 비해 ${\pm}10%$의 범위 내에서 연기밀도를 측정할 수 있음을 확인하였다. 저가 장치의 신뢰성은 또한 폴리에틸렌 화염을 이용한 실험에서도 확인되었다. 결론적으로 개발된 저가형 장치는 연기밀도 측정을 위한 간편한 설치 및 실시간 측정과 함께 고가의 표준장치를 대신하여 사용될 것으로 기대된다.