High Quality Vertical Silicon Channel by Laser-Induced Epitaxial Growth for Nanoscale Memory Integration |
Son, Yong-Hoon
(Semiconductor R&D center, Samsung Electronics Co., Ltd.)
Baik, Seung Jae (Department of Electrical, Electronic, and Control Engineering, Hankyong National University) Kang, Myounggon (Semiconductor R&D center, Samsung Electronics Co., Ltd.) Hwang, Kihyun (Semiconductor R&D center, Samsung Electronics Co., Ltd.) Yoon, Euijoon (Department of Materials Science and Engineering, Seoul National University) |
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