• 한국전자통신학회논문지
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• 제16권3호
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• pp.451-456
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• 2021

반도체 메모리 소자의 커패시터에서 셀 커패시턴스의 향상과 scale down을 위해 유전막으로써 적층형 ONO 구조가 도입되었고 이들의 박막화가 지속적으로 시도되고 있으나 공정 처리 과정에서 많은 문제들이 대두되고 있다. 본 연구에서는 L/L LPCVD를 사용하여 약 10Å의 자연산화막 성장을 억제함으로써 3fF/cell의 정전 용량을 확보할 수 있었다. 또한 유전막의 박막화에 따른 질화막의 이상산화에 미치는 영향을 고찰함으로써 내산화성을 확보할 수 있는 유전막 형성의 안정적인 공정 관리 방법을 제안하였다.

• 소성∙가공
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• 제6권2호
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• pp.110-117
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• 1997

Sticking behavior under the hot rolling conditions for ferritic stainless steels have been studied. Sticking, which is a phenomenon that the naked metal exposed to the surface by scale breakaway during hot rolling sticks to the roll surface, was affected by both high temperature tensile strength and oxidation resistance of the steels. A steel having higher tensile strength and lower oxidation resistance exhibits better resistance to the sticking. It is due to that higher tensile strength increases localized deformation resistance and lower oxidation resistance creates lower friction between steel and roll by forming thicker scale as a lubricant during hot rolling. So, the sticking tends to occur more severely in the order of 430J1L, 436L, 430 and 409L. The most sensitive temperature to the sticking was found to be 90$0^{\circ}C$ for all grade of steels. It was also found that the high speed steel(HSS) roll compared to the Hi-Cr roll was more beneficial to prevent sticking. Because higher surface hardness of HSS roll compared to that of Hi-Cr roll provides less nucleation sites for sticking such as scratch on the roll surface.

• 한국분말재료학회지
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• 제28권2호
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• pp.110-119
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• 2021

In this study, the high-temperature oxidation properties of austenitic 316L stainless steel manufactured by laser powder bed fusion (LPBF) is investigated and compared with conventional 316L manufactured by hot rolling (HR). The initial microstructure of LPBF-SS316L exhibits a molten pool ~100 ㎛ in size and grains grown along the building direction. Isotropic grains (~35 ㎛) are detected in the HR-SS316L. In high-temperature oxidation tests performed at 700℃ and 900℃, LPBF-SS316L demonstrates slightly superior high-temperature oxidation resistance compared to HR-SS316L. After the initial oxidation at 700℃, shown as an increase in weight, almost no further oxidation is observed for both materials. At 900℃, the oxidation weight displays a parabolic trend and both materials exhibit similar behavior. However, at 1100℃, LPBF-SS316L oxidizes in a parabolic manner, but HR-SS316L shows a breakaway oxidation behavior. The oxide layers of LPBF-SS316L and HR-SS316L are mainly composed of Cr₂O₃, Fe-based oxides, and spinel phases. In LPBF-SS316L, a uniform Cr depletion region is observed, whereas a Cr depletion region appears at the grain boundary in HR-SS316L. It is evident from the results that the microstructure and the high-temperature oxidation characteristics and behavior are related.

• 한국분말재료학회지
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• 제22권4호
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• pp.271-277
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• 2015

As wrought stainless steel, sintered stainless steel (STS) has excellent high-temperature anti-corrosion even at high temperature of $800^{\circ}C$ and exhibit corrosion resistance in air. The oxidation behavior and oxidation mechanism of the sintered 316L stainless was reported at the high temperature in our previous study. In this study, the effects of additives on high-temperature corrosion resistances were investigated above $800^{\circ}C$ at the various oxides ($SiO_2$, $Al_2O_3$, MgO and $Y_2O_3$) added STS respectively as an oxidation inhibitor. The morphology of the oxide layers were observed by SEM and the oxides phase and composition were confirmed by XRD and EDX. As a result, the weight of STS 316L sintered body increased sharply at $1000^{\circ}C$ and the relative density of specimen decreased as metallic oxide addition increased. Compared with STS 316L sintered parts, weight change ratio corresponding to different oxidation time at $900^{\circ}C$ and $1000^{\circ}C$, decreased gradually with the addition of metallic oxide. The best corrosion resistance properties of STS could be improved in case of using $Y_2O_3$. The oxidation rate was diminished dramatically by suppression the peeling on oxide layers at $Y_2O_3$ added sintered stainless steel.

• 한국재료학회지
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• 제13권1호
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• pp.36-42
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• 2003

The oxidation behaviors of Y-Cr bilayer deposited on ferritic steel by magnetron-sputtering for application of the Fe-Cr alloys as interconnectors of planar-type solid oxide fuel cells (SOFCs) were studied. After oxidation at $800^{\circ}C$ for 40 hours, the major phase of $Y_2$$O_3$and the minor phase of $YCrO_3$, $Mn_{1.5}$ $Cr_{1.5}$ $O_4$and Cr$_2$SiO$_4$were formed in the Y/Cr bilayered samples, while the major phase of Cr$_2$O$_3$and the minor phase of $Y_2$$O_3$were formed as the major phase in the Cr/Y bilayered samples. The Log(ASR/T) that expresses electric resistance of the Y/Cr coated specimen with nonconducting $_Y2$$O_3$oxide showed high value of -2.80 Ω$\textrm{cm}^2$$K^{-1}$ / and that of the Cr/Y coated specimen with conducting $Cr_2$$O_3$oxide appeared to be -4.11 Ω$\textrm{cm}^2$$^{K}$ . The electric resistance of the Y/Cr coated specimen was largely increased due to the formation of high resistance oxide scales. However, the Cr/Y coated specimen did not show any increase in the electric resistance and had the long-term stability of oxidation because there was no formation of the secondary phases with low conductivity.

• 한국분말재료학회지
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• 제22권1호
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• pp.52-59
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• 2015

As well-known wrought stainless steel, sintered stainless steel (STS) has excellent high-temperature anti-corrosion even at high temperature of $800^{\circ}C$, and exhibits good corrosion resistance in air. However, when temperature increases above $900^{\circ}C$, the corrosion resistance of STS begins to deteriorate and dramatically decreases. In this study, the effects of phase and composition of STS on high-temperature corrosion resistances are investigated for STS 316L, STS 304 and STS 434L above $800^{\circ}C$. The morphology of the oxide layers are observed. The oxides phase and composition are identified using X-ray diffractometer and energy dispersive spectroscopy. The results demonstrate that the best corrosion resistance of STS could be improved to that of 434L. The poor corrosion resistance of the austenitic stainless steels is due to the fact that $NiFe_2O_4$ oxides forming poor adhesion between the matrix and oxide film increase the oxidation susceptibility of the material at high temperature.

• Corrosion Science and Technology
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• 제16권1호
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• pp.8-14
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• 2017

The corrosion behavior of a ferritic/martensitic steel T91 exposed to an aqueous solution containing chloride and sulfate ions is investigated depending on the stimulated all-volatile treatment (AVT) and under oxygenated treatment (OT) conditions. The corrosion of T91 steel under OT condition is severe, while the corrosion under AVT condition is not. The co-existence of chloride and sulfate ions has antagonistic effect on the corrosion of T91 steel in both AVT and OT conditions. Unlike to corrosion resistance in the aqueous solution, OT pretreatment provides T91 steel lower oxidation-resistance than VAT pretreatment. From scanning electron microscopy/energy dispersive X-ray spectroscopy (SEM/EDS) and X-ray diffraction (XRD) analysis, the lower corrosion resistance in the aqueous solution by VAT conditions possibly is due to the formation of pits. In addition, the lower oxidation resistance of T91 steel pretreated by OT conditions is explained as follows: the cracks formed during the immersion under OT conditions accelerated peeling-off rate of the oxide film.

• 한국표면공학회지
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• 제36권6호
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• pp.430-436
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• 2003

The nanoocrystalline Ni-l5W(at.%) coating electrodeposited on the high carbon steel was oxidized at 700 and $800^{\circ}C$ in air, and the resultant oxidation properties were investigated using XRD, EPMA, TGA and TEM. The oxidation resistance of the coating was not so good that most of the coating was oxidized after oxidation at $800^{\circ}C$ for 5 hrs. The oxidation led to the formation of the outer, thin NiO oxide scale and the inner, porous, rather thick ($NiWO_4$＋NiO) mixed layer containing a bit of $WO_2$. During oxidation, substrate elements such as Fe and Cr diffused outwardly toward the coating, according to the concentration gradient.

• 한국분말재료학회지
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• 제23권3호
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• pp.240-246
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• 2016

In order to improve the high-temperature oxidation stability, sintered 434L stainless steel is studied, focusing on the effect of the addition of metallic oxides to form stable oxide films on the inner particle surface. The green compacts of Fecralloy powder or amorphous silica are added on STS434L and oxidized at $950^{\circ}C$ up to 210 h. The weight change ratio of 434L with amorphous silica is higher than that of 434L mixed with Fecralloy, and the weight increase follows a parabolic law, which implies that the oxide film grows according to oxide diffusion through the densely formed oxide film. In the case of 434L mixed with Fecralloy, the elements in the matrix diffuse through the grain boundaries and form $Al_2O_3$ and Fe-Cr oxides. Stable high temperature corrosion resistance and electrical resistivity are obtained for STS434L mixed with Fecralloy.

• Corrosion Science and Technology
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• 제20권3호
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• pp.152-157
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• 2021

Stainless steel is a metal that does not generate rust. Due to its excellent workability, economic feasibility, and corrosion resistance, it is used in various industrial fields such as ships, piping, nuclear power, and machinery. However, stainless steel is vulnerable to corrosion in harsh environments. To solve this problem, its corrosion resistance could be improved by electrochemically forming an anodized film on its surface. In this study, 316L stainless steel was anodized at room temperature with ethylene glycol-based 0.1 M NH₄F and 0.1M H₂O electrolyte to adjust the thickness of the oxide film using different anodic oxidation voltages (30 V, 50 V, and 70 V) with time control. The anodic oxidation experiment was performed by increasing the time from 1 hour to 7 hours at 2-hour intervals. Corrosion resistance according to the thickness of the anodic oxide film was observed. Electrochemical corrosion behavior of oxide films was investigated through polarization experiments.