• 제목/요약/키워드: isotropic stable process

검색결과 8건 처리시간 0.022초

반도체 미세공정 기술을 이용한 Hollow형 실리콘 미세바늘 어레이의 제작 (Fabrication of Hollow-type Silicon Microneedle Array Using Microfabrication Technology)

  • 김승국;장종현;김병민;양상식;황인식;박정호
    • 전기학회논문지
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    • 제56권12호
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    • pp.2221-2225
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    • 2007
  • Hollow-type microneedle array can be used for painless, continuous and stable drug delivery through a human skin. The needles must be sharp and have sufficient length in order to penetrate the epidermis. An array of hollow-type silicon microneedles was fabricated by using deep reactive ion etching and HNA wet etching with two oxide masks. Isotropic etching was used to create tapered tips of the needles, and anisotropic etching of Bosch process was used to make the extended length and holes of microneedles. The microneedles were formed by three steps of isotropic, anisotropic, and isotropic etching in order. The holes were made by one anisotropic etching step. The fabricated microneedles have $170{\mu}m$ width, $40{\mu}m$ hole diameter and $230{\mu}m$ length.

Fabrication of Novel Metal Field Emitter Arrays(FEAs) Using Isotropic Silicon Etching and Oxidation

  • Oh, Chang-Woo;Lee, Chun-Gyoo;Park, Byung-Gook;Lee, Jong-Duk;Lee, Jong-Ho
    • Journal of Electrical Engineering and information Science
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    • 제2권6호
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    • pp.212-216
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    • 1997
  • A new metal tip fabrication process for low voltage operation is reported in this paper. The key element of the fabrication process is that isotropic silicon etching and oxidation process used in silicon tip fabrication is utilized for gate hole size reduction and gate oxide layer. A metal FEA with 625 tips was fabricated in order to demonstrate the validity of the new process and submicron gate apertures were successfully obtained from originally 1.7$\mu\textrm{m}$ diameter mask. The emission current above noise level was observed at the gate bias of 50V. The required gate voltage to obtain the anode current of 0.1${\mu}\textrm{A}$/tip was 74V and the emission current was stable above 2${\mu}\textrm{A}$/tip without any disruption. The local field conversion factor and the emitting area were calculated as 7.981${\times}$10\ulcornercm\ulcorner and 3.2${\times}$10\ulcorner$\textrm{cm}^2$/tip, respectively.

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공동을 포함하는 횡등방성 절리암반 모델의 압축 파괴거동 (Compressive Fracture Behaviors of Transversely Isotropic Jointed Rock Model with an Opening)

  • 사공명;김세철;유재호;박두희;이준석
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2009년도 춘계 학술발표회
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    • pp.58-63
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    • 2009
  • Biaxial compression test was conducted on a transversely isotropic synthetic jointed rock model for the understanding of the fracture behaviors of a sedimentary or metamorphic rocks with well developed bedding or foliation in uni-direction. The joint angles employed for the model are 30, 45, and 60 degrees to the horizontal, and the synthetic rock mass was made of early strength cement. From the biaxial compression test, initiation propagation of tensile cracks at norm to the joint angle was found. The propagated tensile cracks eventually developed rock blocks, which was dislodged from the rock mass. Furthermore, the propagation process of the tensile cracks varies with joint angle: lower joint angle model shows more stable and progressive tensile crack propagation. The experiment results were validated from the simulation by using discrete element method PFC 2D. From the simulation, as has been observed from the test, a rock mass with lower joint angle produces wider damage region and rock block by tensile cracks. In addition, a rock model with lower joint angle shows a progressive tensile cracks generation around the opening from the investigation of the interacted tensile cracks.

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D상 유화물을 이용한 W/O 유화물의 제조와 특성 (Preparation and Properties of W/O Emulsion by D Phase Emulsification)

  • 김형진;정노희;윤영균;박관선;남기대
    • 한국응용과학기술학회지
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    • 제15권2호
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    • pp.25-32
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    • 1998
  • The emulsion stability of W/O emulsion prepared by D phase emulsification during storage and handling is studied by using phase diagrams. The process of D phase emulsification begins with the formation of isotropic surfactant solution, followed by formation of oil-in-surfactant (O/D) gel emulsion by dispersion of octamethylcyclotetrasiloxane(OMCS) in the surfactant solution. Polyols were essential components for this purpose. To understand the function of polyols, the solution behavior of nonionic surfactant/oil/water/polyol systems were investigated by the ternary phase diagrams of polyoxyethylene oleyl ether/OMCS/propylene glycol(PG) aqueous solutions. The addition of PG increased the solubility of oil in the isotropic surfactant phase. D phase emulsification method has been applied to a new type of cosmetics. By using this emulsification technique, O/W emulsion were formed without a need for adjust of HLB. Fine and stable W/O emulsions were prepared by D phase emulsion.

HEAT KERNEL ESTIMATES FOR DIRICHLET FRACTIONAL LAPLACIAN WITH GRADIENT PERTURBATION

  • Chen, Peng;Song, Renming;Xie, Longjie;Xie, Yingchao
    • 대한수학회지
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    • 제56권1호
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    • pp.91-111
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    • 2019
  • We give a direct proof of the sharp two-sided estimates, recently established in [4, 9], for the Dirichlet heat kernel of the fractional Laplacian with gradient perturbation in $C^{1,1}$ open sets by using Duhamel's formula. We also obtain a gradient estimate for the Dirichlet heat kernel. Our assumption on the open set is slightly weaker in that we only require D to be $C^{1,{\theta}}$ for some ${\theta}{\in}({\alpha}/2,1]$.

불균질 횡등방성 매질에서의 탄성파 주시토모그래피 (Seismic Traveltime Tomography in Inhomogeneous Tilted Transversely Isotropic Media)

  • 정창호;서정희
    • 지구물리와물리탐사
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    • 제10권4호
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    • pp.229-240
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    • 2007
  • 이 연구에서는 지하 매질의 속도 이방성을 규명하고 이를 고려하여 지하 단면을 해석하는 탄성파 이방성 토모그래피(seismic anisotropic tomography) 알고리듬을 개발하였다. 이는 지하 매질을 대칭축이 기울어진 횡등방성(Tilted Transversely Isotropic) 매질로 가정하여 지하의 속도 구조와 더불어 이방성 구조를 함께 파악할 수 있도록 고안되었다. 개발된 알고리듬은 이방성 토모그래피에서 흔히 나타날 수 있는 역산의 안정성 문제를 해결하기위해여 역산 매개 변수를 역속도비, 역속도 그리고 이방성 대칭축 방향으로 설정하였고, 의사 베타 변환(pseudo-beta transform)을 통해 이방성 계수의 범위를 제한하였으며, ACB (Active Constraint Balancing) 법을 이용하여 효율적으로 역산 제한조건을 적용하였다. 특히, 기존의 등방성 토모그래피에서 사용하던 프레넬대(Fresnel volume)를 고려한 역산 기법을 이방성 토모그래피로 확장하여 파선 토모그래피에 비해 넓은 범위의 전파각 영역을 확보함으로써 이방성 토모그래피의 안정성을 높일 수 있었다. 개발된 이방성 토모그래피 알고리듬을 복잡한 수치 모델에 적용하여 알고리듬의 타당성을 검증하였으며 현장 자료에 적용하여 시추 결과 및 지질 정보들과 일치하는 향상된 결과를 얻었다. 개발된 이방성 토모그래피 알고리듬을 통해 지하매질의 속도 정보와 이방성 정보를 함께 고려함으로써 보다 정확한 지하 구조의 해석이 가능할 것으로 기대된다.

원통형 이종 접합 소재의 $SiO_2/Ag$스퍼터 증착과 온도 변화에 따른 기계적 특성에 관한 연구 (The Study on the Improvement of Mechanical Performance due to Change in Temperature and Sputtering by $SiO_2/Ag$ Material of Bonded Dissimilar Materials with Cylindrical Shape)

  • 이승현;최성대;이종형
    • 한국기계가공학회지
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    • 제11권3호
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    • pp.138-145
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    • 2012
  • The material used in this study is dielectric and ferrite. Because of the unique characteristics of the material, it is easily exposed to external shocks and pressure, which cause damage to the product. However, after being processed under high-temperature environment repeatedly, the mechanical strength of the product is greatly increased due to the change of the electrical properties. In this paper, dielectric and bonded ferrite material was tested for the material properties. The equipment for this experiment was produced and tested to allow Cylindrical and Three-dimensional geometry of the product for the vacuum deposition. For Cylindrical shape of the product, in order to obtain the equivalent film thickness, the device is constructed in a vacuum chamber which gives arbitrary revolving and rotating capability. The electrical performance of the product is obtained through this process as well. However, as mentioned above, with repeating processes under high temperature and exposure to external environment, the product is easy to be broken. This experiment has enabled us to find out a stable condition to apply the communication of the RF high frequency to each of the core elements, such as Ferrite and Dielectric which is then used for the mechanical strength of the Raw material, hetero-junction material, Hetero-junction Ag Coating material and hetero-junction Ag Coating SiO2 Coating material respectively.

온도에 무관한 전압검출기의 바이어스 구현 (An Implementation of Temperature Independent Bias Scheme in Voltage Detector)

  • 문종규;김덕규
    • 전자공학회논문지SC
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    • 제39권6호
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    • pp.34-42
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    • 2002
  • 본 논문에서는 전압검출기에 사용되는 온도에 무관한 검출 전압원을 제안한다. 검출 전압원이 절대온도 영도(Zero degree)에서 실리콘 밴드갭 전압의 m배가 되도록 설계한다. 검출 전압원의 온도계수는 트랜지스터 이미터-베이스 사이의 서로 다른 면적을 가진 다이오드에 생성된 비선형 전압인 ${\Delta}V_{BE}$의 오목한 온도계수와 트랜지스터 순방향 전압인 $V_{BE}$의 볼록한 비선형 온도계수의 합으로 다이오드의 온도계수를 적절히 선택함으로서 거의 제로의 온도계수를 실현한다. 또한 검출 전압원의 값이 ${\Delta}V_{BE}$, $V_{BE}$ 멀티플라이어 회로 및 저항을 이용하여 변화될 수 있도록 설계하였다. 제안한 검출 전압원의 성능을 평가하기 위해, $6{\mu}m$ 바이폴러 기술로 조립된 1.9V용 IC를 제작하여 검출 전압원의 동작특성과 온도계수를 측정하였다. 또한 검출 전압원의 값이 공정에 의해 변화되는 요인을 줄이기 위해 트리밍 기술, 이온 임플란테이션과 이방성 에칭을 도입하였다. 제작된 IC에서 검출 전압원은 -30$^{\circ}C$~70$^{\circ}C$의 온도범위에서 29ppm/$^{\circ}C$의 안정된 온도계수를 얻을 수 있었다. 그리고 전압검출기의 소비전류는 1.9V 공급전압에서 $10{\mu}A$이다.