• KIEE International Transactions on Electrophysics and Applications
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• 제2C권5호
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• pp.262-267
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• 2002

In this paper, we first studied the factors affecting the motor current (MC) signal, which was strongly affected by the systematic hardware noises depending on polishing such as pad conditioning and arm oscillation of platen and recipe, head motor. Next, we studied the end point detection (EPD) for the chemical mechanical polishing (CMP) process of shallow trench isolation (STI) with reverse moat structure. The MC signal showed a high amplitude peak in the fore part caused by the reverse meal. pattern. We also found that the EP could not be detected properly and reproducibly due to the pad conditioning effect, especially when conventional low selectivity slurry was used. Even when there was no pad conditioning effect, the EPD method could not be applied, since the measured end points were always the same due to the characteristics of the reverse moat structure with an open nitride layer.

• KIEE International Transactions on Electrophysics and Applications
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• 제3C권1호
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• pp.28-32
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• 2003

In this paper, we have studied the in-situ end point detection (EPD) for direct chemical mechanical polishing (CMP) of shallow trench isolation (STI) structures without the reverse moat etch process. In this case, we applied a high selectivity $1n (HSS) that improves the silicon oxide removal rate and maximizes oxide to nitride selectivity Quite reproducible EPD results were obtained, and the wafer-to-wafer thickness variation was significantly reduced compared with the conventional predetermined polishing time method without EPD. Therefore, it is possible to achieve a global planarization without the complicated reverse moat etch process. As a result, the STI-CMP process can be simplified and improved using the new EPD method.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 추계학술대회논문집
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• pp.415-420
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• 2000

This paper describes a part of the results obtained in the process of the development of thin sound isolation sheets filled mineral compound powder with PVC. The raw materials used are pyrophillite, pottery stone and graphite. The physical properties such as the crystal structures, compositions, and specific gravities, etc. of raw materials are analyzed and discussed from a point of view of sound isolation material. From the analysis of experimental results, the particle size and the additive amount of mineral compound powder for manufacturing sample isolation sheets are decided. The resistant capability against fire of sound isolation sheets including mechanical, thermal and physical properties is tested. The transmission loss measuremenst of sound isolation sheets are performed using two-microphone method in an impedance tube. It is shown that the sound isolation capability of thin sheets has an excellent performance in excess of the object of development.

• 전기학회논문지
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• 제60권5호
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• pp.1068-1072
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• 2011

Hydrogen Fuel Cell Vehicle(HFCV) is system that uses electrical energy of fuel cell stack to main power source, which is different system with other vehicles that use high-voltage, large-current. Isolation performance of this system which is connected with electrical fire and electrical shock is important point. Isolation resistance of electric installation is divided according to working voltage, it follows criterion more than $100{\Omega}$/VDC (or $500{\Omega}$/VAC) about system operation voltage in a hydrogen fuel cell vehicle. Although measurement of isolation resistance in a hydrogen fuel cell vehicle is two methods, it uses mainly measurement by megger. However, the present isolation resistance measurement system that is optimized to use in electrical facilities is unsuitable for isolation performance estimation of a hydrogen fuel cell vehicle because of limit of maximum short current and difference of measurement resolution. Therefore, this research developed the isolation resistance measurement system so that may be suitable in isolation performance estimation of a hydrogen fuel cell vehicle, verified isolation performance about known resistance by performance verification of laboratory level about developed system, and executed performance verification through comparing results of developed system by performance verification of vehicle level with ones of existing megger. Developed system is judged to aid estimation and upgrade of isolation performance in a hydrogen fuel cell vehicle hereafter.

• Journal of Ecology and Environment
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• 제31권4호
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• pp.255-260
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• 2008

A commonly held view in studies of character displacement is that character states of both species are shifted in areas of sympatry. This view has been confirmed in an overwhelming number of cases for ecological character displacement. Excluding species pairs in which one of the two interacting species is found only within the distribution of the other species and species displaying gynogenesis, the pattern of reproductive character displacement is asymmetrical in that the shift in character states between areas of symaptry and allopatry occurs in only one of the two interacting species. Hypotheses for the reasons behind this asymmetry in reproductive character displacement include (1) homogenization by gene flow, (2) other mechanisms of reproductive isolation, and (3) sufficient reproductive isolation being provided by one of the interacting species exhibiting a pattern of reproductive character displacement. Because reproductive isolation can be achieved by divergence at any point in a sequence of premating reproductive behaviors and postmating developments, it is necessary to understand the mechanisms of reproductive isolation of two interacting taxa in areas of sympatry and allopatry and to analyze the relative contributions of potential factors to reproductive isolation to disentangle hypotheses for the patterns of asymmetry.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 춘계학술대회논문집
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• pp.1081-1085
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• 2002

A modeling is developed to predict the isolation performance of sound barrier systems under the sound pressure radiated from excited by point impact. The predicted results are compared with the measured results obtained by using APAMAT II. This instrument provides a combination of structure-borne noise and air-borne noise, which corresponds to rolling noise, by applying the excitation system projected steel balls against the steel sheet.

• 한국지진공학회:학술대회논문집
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• 한국지진공학회 1998년도 추계 학술발표회 논문집 Proceedings of EESK Conference-Spring 1998
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• pp.258-265
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• 1998

Seismic isolation has developed to the point where it may be considered as a viable design alternate for a wide range of building structures. However, it needs to consider various aspects to adopt a suitable isolation system for buildings practically. This report presents the basis for the preliminary design procedure which has been developed for the seismic isolation system using the lead rubber bearings. The design procedures have been developed to ensure that the bearings will safely support the maximum gravity load throughout the life of the structure while they provide a period shift and hysteretic damping during the design earthquake.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집B
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• pp.618-623
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• 2001

In a practical vibration isolation system, vibration is transmitted from the source to the receiver through several paths such as more than one inter-connected point and multi-degree of freedom at each connection point. Therefore, the major path investigation for vibration transmission among them is often required in a point of view of isolation. For the path analysis of multi-dimensional vibration isolation system, it is useful to employ the concept of vibration power in high frequency range where radiation of noise from the receiver structure is concerned. The idea is simple to understand and formulate but rather complicated to apply in practice. For an accurate estimation of power flow especially over a high frequency range, it is well known in theory that rotational motions should be taken into consideration together with translational motions at inter-connected points. In reality, however, power transmissions related to rotational terms are often neglected mainly due to difficulties in the instrumentation. In this paper, necessary formula and measurable mechanical quantities for vibration power analysis will be reviewed and experimental results with rotational terms included for compressor system in a commercial air conditioner will be shown.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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• pp.35-38
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• 2000

In this study, the rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.l8um semiconductor device. Through reverse moat pattern process, reduced moat density at high moat density, STI CMP process with low selectivity could be to fit polish uniformity between low moat density and high moat density. Because this reason, in-situ motor current end point detection method is not fit to the current EPD technology with the reverse moat pattern. But we use HSS without reverse moat pattern on STI CMP and take end point current sensing signal.[1] To analyze sensing signal and test extracted signal, we can to adjust wafer difference within $110{\AA}$.

• 한국환경복원기술학회지
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• 제10권6호
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• pp.15-32
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• 2007

The purposes of this study are carrying out the case study for the urban park planning in point of landscape ecology, analyzing and evaluating the indicator character of the landscape ecological view on the basis of the case study, and proposing the urban park planning in point of landscape ecology. The results of this study are as follows. As a result of the isolation analysis with school green space, Kyukchaebosang Park turned out to be 607m, Chimsan Park to be the highest 647.14m, Ehyeun Park to be the lowest 592m. In the case of connection analysis with all nodes, Kyukchaebosang Park had the lowest score 0.27 and Chimsan Park had the highest score 1. As a result of the circulation analysis with elementary schools, Kyukchaebosang Park and Ehyeun Park got 1 within 500m permissible range, and Chimsan Park got over 1, Ehyeun Park got 0.67, and Kyukchaebosang Park got 0.14 respectively within 700m permissible range. According to these analysis results, special regions which has problems such as high isolation and low connection and circulation in point of landscape ecology can be selected. Also by changing them to valuable green spaces, urban park planning can be improved. In this study, the basic data of landscape ecology can be obtained by the character analysis of landscape ecology. This study has a significant meaning of possibility in planning of the urban park which reflects the character of landscape ecology. This research was only performed in Chimsan Park, so additional researches for various cases will be needed.