• Title/Summary/Keyword: inter layer

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패턴 웨이퍼의 화학기계적 연마시 패턴 밀도의 영향과 모델링에 관한 연구 (A Study on the Effect of Pattern Density and it`s Modeling for ILD CMP)

  • 홍기식;김형재;정해도
    • 한국정밀공학회지
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    • 제19권1호
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    • pp.196-203
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    • 2002
  • Generally, non-uniformity and removal rate are important factors on measurements of both wafer and die scale. In this study, we verify the effects of the pressure and relative velocity on the results of the chemical mechanical polishing and the effect of pattern density on inter layer dielectric chemical mechanical polishing of patterned wafer. We suggest an appropriate modeling equation, transformed from Preston\`s equations which was used in glass polishing, and simulate the removal rate of patterned wafer in chemical mechanical polishing. Results indicate that the pressure and relative velocity are dominant factors for the chemical mechanical polishing and pattern density effects on removal rate of pattern wafers in die scale. The modeling is well agreed to middle and low density structures of the die. Actually, the die used in Fab. was designed to have an appropriate density, therefore the modeling will be suitable for estimating the results of ILD CMP.

플라즈마 스프레이 (Ca, Co)-Doped LaCrO3 코팅층의 치밀화 및 전기전도도 (Densification and Electrical Conductivity of Plasma-Sprayed (Ca, Co)-Doped LaCrO3 Coating)

  • 박희진;백경호
    • 한국재료학회지
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    • 제27권3호
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    • pp.155-160
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    • 2017
  • Doped-$LaCrO_3$ perovskites, because of their good electrical conductivity and thermal stability in oxidizing and/or reducing environments, are used in high temperature solid oxide fuel cells as a gas-tight and electrically conductive interconnection layer. In this study, perovskite $(La_{0.8}Ca_{0.2})(Cr_{0.9}Co_{0.1})O_3$ (LCCC) coatings manufactured by atmospheric plasma spraying followed by heat treatment at $1200^{\circ}C$ have been investigated in terms of microstructural defects, gas tightness and electrical conductivity. The plasma-sprayed LCCC coating formed an inhomogeneous layered structure after the successive deposition of fully-melted liquid droplets and/or partially-melted droplets. Micro-sized defects including unfilled pores, intersplat pores and micro-cracks in the plasma-sprayed LCCC coating were connected together and allowed substantial amounts gas to pass through the coating. Subsequent heat treatment at $1200^{\circ}C$ formed a homogeneous granule microstructure with a small number of isolated pores, providing a substantial improvement in the gas-tightness of the LCCC coating. The electrical conductivity of the LCCC coating was consequently enhanced due to the complete elimination of inter-splat pores and micro-cracks, and reached 53 S/cm at $900^{\circ}C$.

Sn8Zn3Bi 솔더를 이용한 1608 칩 솔더링부의 열충격 신뢰성 평가 (Reliability evaluation of 1608 chip joint using Sn8Zn3Bi solder under thermal shock)

  • 이영우;김규석;홍성준;정재필;문영준;이지원;한현주;김미진
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2005년도 추계학술발표대회 개요집
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    • pp.225-227
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    • 2005
  • Sn-8wt%Zn-3wt%Bi (이하, Sn-8Zn-3Bi) 솔더의 장기 신뢰성을 평가하기 위하여 열 충격 시험을 행하였다. 열 충격 시험은 $-40^{\circ}C$에서 $80^{\circ}C$범위에서 1000 사이클 동안 하였다. 접합 기판으로는 각각 OSP(Organic Solderability Preservative), Sn 그리고 Ni/Au 처리를 한 PCB(Printed Circuit Board) 패드를 사용하였다. 접합에 사용한 부품은 1608 Chip(Multi Layer Chip Capacitor, Chip Resistor) 으로 전극 부위에 Sn-37wt%Pb, Sn 도금하여 사용하였다. 솔더링 후 1608 Chip의 전단 강도와 솔더링부에서 미세조직 및 IMC(Inter Metallic Compound) 변화를 관찰하였다. 측정결과, Sn-8Zn-3Bi 솔더의 초기 전단 강도는 기판의 표면처리에 상관없이 약 40N 이상이었다. 그리고 열충격 시험 1000 사이클 후에는 모든 기판에서 2N 정도 약간의 강도 저하를 보였다.

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돼지에서 근육주사한 Abamectin에 대한 HPTLC 분석 및 약물동태학 (Quantitation of abamectin by HPTLC and its pharmacokinetics after intramuscular injection in pigs)

  • 박승춘;윤효인
    • 대한수의학회지
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    • 제40권1호
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    • pp.35-41
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    • 2000
  • We established a new method to analyze abamectin using HPTLC (high performance thin layer chromatography) in order to obtain its pharmacokinetic profiles in pigs. Recovery of abamectin in pig serum after fluorescence derivatization was $80.01{\pm}3.82%$ at 0.1ppm and $83.67{\pm}3.63%$ at 10ppm, respectively. Detection reproducibility in terms of coefficient variation (c.v.) was 3.09% and 2.74% (intra-day), and 3.71% and 51.7%(inter-day), for 0.1 and 10ppm, respectively. Pharmacokinetics of abamectin was studied in five Yorkshire-Landrace mixed bred male pigs ($35.0{\pm}2.7kg$) administered intramuscularly 0.3mg/kg b.w. Pharmacokinetic profiles of abamectin in pigs were described by the 1-compartment open model with first-order absorption and first-order elimination. AUC (area under the curve) was $262.65{\pm}16.44ng{\cdot}day/ml$ and the biological elimination half-life ($t_{1/2},\;k_e$) was $5.28{\pm}0.84$ days, indicating somewhat high bioavailability and long half-life by the intramuscular route. We suggest intramucular injection of abamectin could be also used in place of the recommended route of its subcutaneous administration so far.

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SHVC 및 MVC 통합 기반의 스케일러블 다시점 비디오 부호화 설계 및 구현 (Design and Implementation of Scalable Multi-view Video Coding Based on Integration of SHVC and MVC)

  • 정태준;서광덕
    • 방송공학회논문지
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    • 제22권3호
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    • pp.405-408
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    • 2017
  • 다시점 이미지의 뷰포인트 간에 높은 유사도가 존재함을 바탕으로 MV-HEVC는 뷰포인트 내에서 전통적인 시간적 방향 예측 뿐만 아니라 뷰포인트 간에 예측을 수행함으로써 높은 부호화 효율을 얻는다. 본 논문에서는 HEVC를 기본 계층으로 사용하는 스케일러블다시점 비디오 부호화를 구현하기 위해 SHVC와 MVC를 통합 구현함을 제안한다. 실험결과에 의해 BD-PSNR 개선이 1.5dB에 이르고 동시에 BD-Bitrate를 50~60% 가량 줄일 수 있음을 확인하였다.

Dynamic Analysis of Laminated Composite and Sandwich Plates Using Trigonometric Layer-wise Higher Order Shear Deformation Theory

  • Suganyadevi, S;Singh, B.N.
    • International Journal of Aerospace System Engineering
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    • 제3권1호
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    • pp.10-16
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    • 2016
  • A trigonometric Layerwise higher order shear deformation theory (TLHSDT) is developed and implemented for free vibration and buckling analysis of laminated composite and sandwich plates by analytical and finite element formulation. The present model assumes parabolic variation of out-plane stresses through the depth of the plate and also accomplish the zero transverse shear stresses over the surface of the plate. Thus a need of shear correction factor is obviated. The present zigzag model able to meet the transverse shear stress continuity and zigzag form of in-plane displacement continuity at the plate interfaces. Hence, botheration of shear correction coefficient is neglected. In the case of analytical method, the governing differential equation and boundary conditions are obtained from the principle of virtual work. For the finite element formulation, an efficient eight noded $C^0$ continuous isoparametric serendipity element is established and employed to examine the dynamic analysis. Like FSDT, the considered mathematical model possesses similar number of variables and which decides the present models computationally more effective. Several numerical predictions are carried out and results are compared with those of other existing numerical approaches.

HPLC를 이용한 생체 시료중의 새로운 플라보노이드 유도체인 DA-6034의 분석 (Analysis of DA-6034, a New Flavonoid Derivative in Biological Fluids by HPLC)

  • 이종진;손미원;유무희;장민선;김원배;이강춘
    • 약학회지
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    • 제42권2호
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    • pp.149-152
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    • 1998
  • A high performance liquid chromatographic method was developed for the determination of DA-6034 in biological fluids using internal standard. Plasma containing DA-6034 and inter nal standard was extracted by liquid-liquid extraction at an acidic pH. After evaporation of the organic layer, the drug and internal standard were reconstituted with mobile phase and injected into the column. They were separated by high performance liquid chromatography on inertsil ODS II column at 334 nm. The detection limit of DA-6034 in plasma was 0.02 ${\mu}$g/ml. In this method, the range of recovery and coefficients of variation were 96-110% and 0.40-3.78%, respectively. There was no interference from endogenous substances. Urine and bile were analysed using the deproteinization method and the detection limit of DA-6034 was 1${\mu}$g/l.

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이어도 주변해역에서 수중음속의 시공간적 변동성 (Temporal and Spatial Variability of Sound Speed in the Sea around the Ieodo)

  • 박경주
    • 한국환경과학회지
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    • 제29권11호
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    • pp.1141-1151
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    • 2020
  • The impact of sound speed variability in the sea is the very important on acoustic propagation for the underwater acoustic systems. Understanding of the temporal and spatial variability of ocean sound speed in the sea around the Ieodo were obtained using oceanographic data (temperature, salinity). from the Korea Oceanographic Data Center, collected by season for 17 years. The vertical distributions of sound speed are mainly related to seasonal variations and various current such as Chinese coastal water, Yellow Sea Cold Water (YSCW), Kuroshio source water. The standard deviations show that great variations of sound speed exist in the upper layer and observation station between 16 and 18. In order to quantitatively explain the reason for sound speed variations, Empirical Orthogonal Function (EOF) analysis was performed on sound speed data at the Line 316 covering 68 cruises between 2002 and 2018. Three main modes of EOFs respectively revealed 55, 29, and 5% the total variance of sound speed. The first mode of the EOFs was associated with influence of surface heating. The second EOFs pattern shows that contributions of YSCW and surface heating. The first and second modes had seasonal and inter-annul variations.

전기적 상호작용을 고려한 3차원 순차적 인버터의 SPICE 시뮬레이션 (SPICE Simulation of 3D Sequential Inverter Considering Electrical Coupling)

  • 안태준;유윤섭
    • 한국정보통신학회:학술대회논문집
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    • 한국정보통신학회 2017년도 춘계학술대회
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    • pp.200-201
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    • 2017
  • 이 논문은 3D 순차적 CMOS 인버터 회로의 전기적 상호작용을 고려한 시뮬레이션을 제시하고자 한다. 상층 NMOS는 BSIM-IMG, 하층 PMOS에는 LETI-UTSOI 모델을 사용하여 전기적 상호작용이 잘 반영되는지 TCAD 데이터와 SPICE 데이터를 비교하였다. 트랜지스터 간의 높이가 작을 때 하층 게이트의 전압의 변화에 따라 상층 전류-전압 특성에 전기적 상호작용이 잘 반영되는 것을 확인하였다.

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Application of tuned liquid dampers in controlling the torsional vibration of high rise buildings

  • Ross, Andrew S.;El Damatty, Ashraf A.;El Ansary, Ayman M.
    • Wind and Structures
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    • 제21권5호
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    • pp.537-564
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    • 2015
  • Excessive motions in buildings cause occupants to become uncomfortable and nervous. This is particularly detrimental to the tenants and ultimately the owner of the building, with respect to financial considerations. Serviceability issues, such as excessive accelerations and inter-story drifts, are more prevalent today due to advancements in the structural systems, strength of materials, and design practices. These factors allow buildings to be taller, lighter, and more flexible, thereby exacerbating the impact of dynamic responses. There is a growing need for innovative and effective techniques to reduce the serviceability responses of these tall buildings. The current study considers a case study of a real building to show the effectiveness and robustness of the TLD in reducing the coupled lateral-torsional motion of this high-rise building under wind loading. Three unique multi-modal TLD systems are designed specifically to mitigate the torsional response of the building. A procedure is developed to analyze a structure-TLD system using High Frequency Force Balance (HFFB) test data from the Boundary Layer Wind Tunnel Laboratory (BLWTL) at the University of Western Ontario. The effectiveness of the unique TLD systems is investigated. In addition, a parametric study is conducted to determine the robustness of the systems in reducing the serviceability responses. Three practical parameters are varied to investigate the robustness of the TLD system: the height of water inside the tanks, the amplitude modification factor, and the structural modal frequencies.