• Proceedings of the KIEE Conference
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• 2001.11a
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• pp.274-276
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• 2001

This research aims to develop the multiple channel electrochemical DNA chip using microfabrication technology. At first, we fabricated a high integration type DNA chip array by lithography technology. Several probe DNAs consisting of thiol group at their 5-end were immobilized on the sold electrodes. Then target DNAs were hybridized and reacted. Cyclic voltammetry showed a difference between target DNA and control DNA in the anodic peak current values. Therefore, it is able to detect a plural genes electrochemically after immobilization of a plural probe DNA and hybridization of non-labeling target DNA on the electrodes simultaneously. It suggested that this DNA chip could recognize the sequence specific genes.

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.1
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• pp.15-21
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• 2013

In this paper, a MEMS tunable capacitor was successfully designed and fabricated using an aluminum nitride film and a gold suspended membrane with two air gap structure for commercial RF applications. Unlike conventional two-parallel-plate tunable capacitors, the proposed tunable capacitor consists of one air suspended top electrode and two fixed bottom electrodes. One fixed and the top movable electrodes form a variable capacitor, while the other one provides necessary electrostatic actuation. The fabricated tunable capacitor exhibited a capacitance tuning range of 375% at 2 GHz, exceeding the theoretical limit of conventional two-parallel-plate tunable capacitors. In case of the contact state, the maximal quality factor was approximately 25 at 1.5 GHz. The developed fabrication process is also compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for on chip intelligent transceivers and radios.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.10
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• pp.2187-2193
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• 2002

We present a novel method for 3D microfabrication with LIGA process that utilizes a deep X-ray mask in which a micro-actuator is integrated. The integrated micro-actuator oscillates the X-ray absorber, which is formed on the shuttle mass of the micro-actuator, during X-ray exposures to modify the absorbed dose profile in X-ray resist, typically PMMA. 3D PMMA microstructures according to the modulated dose contour are revealed after GG development. An X-ray mask with integrated comb drive actuator is fabricated using deep reactive ion etching, absorber electroplating, and bulk micromachining with silicon-on-insulator (SOI) wafer. 1mm $\times$ 1 mm, 20 $\mu$m thick silicon shuttle mass as a mask blank is supported by four 1 mm long suspension beams and is driven by the comb electrodes. A 10 $\mu$m thick, 50 $\mu$m line and spaced gold absorber pattern is electroplated on the shuttle mass before the release step. The fundamental frequency and amplitude are around 3.6 kHz and 20 $\mu$m, respectively, for a do bias of 100 V and an ac bias of 20 $V_{p-p}$ (peak-peak). Fabricated PMMA microstructure shows 15.4 $\mu$m deep, S-shaped cross section in the case of 1.6 kJ $cm^{-3}$ surface dose and GG development at 35$^{\circ}C$ for 40 minutes.

• Journal of Sensor Science and Technology
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• v.12 no.2
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• pp.88-94
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• 2003

Electromyogram (EMG) is the bioelectric signal induced by motor nerves. Analyzing EMG with the movement produced by muscle contraction, we can provide input commands to a computer as a man-machine interface as well as can evaluate the patient's motional abnormality. In this paper, we developed an integrated miniaturized device which acquires and transmits the surface EMG of an interested muscle. Developed system measures $60{\times}40{\times}25mm$, weighs 100g. Using an amplifier circuitry on the electrodes and the radio frequency transmission, the developed system dispenses with the use of cables among the electrodes, amplifier, and the post processing system (personal computer). The wiring used in conventional systems can be obstacle for natural motion and source of motion artifacts. In results, the developed system improves not only the signal-to-noise ration in dynamic EMG measurement, but also the user convenience. We propose a new human-computer interface as well as a dynamic EMG measurement system as a possible application of the developed system.

• Journal of Electrochemical Science and Technology
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• v.14 no.1
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• pp.1-14
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• 2023

The overuse of pesticides in agricultural sectors exposes people to food contamination. Pesticides are toxic to humans and can have both acute and chronic health effects. To protect food consumers from the adverse effects of pesticides, a rapid monitoring system of the residues is in dire need. Molecularly imprinted polymer (MIP) on a screen-printed electrode (SPE) is a leading and promising electrochemical sensing approach for the detection of several residues including pesticides. Despite the huge development in analytical instrumentation developed for contaminant detection in recent years such as HPLC and GC/MS, these conventional techniques are time-consuming and labor-intensive. Additionally, the imprinted SPE detection system offers a simple portable setup where all electrodes are integrated into a single strip, and a more affordable approach compared to MIP attached to traditional rod electrodes. Recently, numerous reviews have been published on the production and sensing applications of MIPs however, the research field lacks reviews on the use of MIPs on electrochemical sensors utilizing the SPE technology. This paper presents a distinguished overview of the MIP technique used on bare and modified SPEs for the detection of pesticides from four recent publications which are malathion, chlorpyrifos, paraoxon and cyhexatin. Different molecular imprint routes were used to prepare these biomimetic sensors including solution polymerization, thermal polymerization, and electropolymerization. The unique characteristics of each MIP-modified SPE are discussed and the comparison among the findings of the papers is critically reviewed.

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.259-267
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• 2002

We present a novel 3D fabrication method with single X-ray process utilizing an X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures. 3D microstructures are revealed by development kinetics and modulated in-depth dose distribution in resist, usually PMMA. Fabrication of X-ray masks with integrated electrothermal xy-stage and electrostatic actuator is presented along with discussions on PMMA development characteristics. Both devices use $20-\mu\textrm{m}$-thick overhanging single crystal Si as a structural material and fabricated using deep reactive ion etching of silicon-on-insulator wafer, phosphorous diffusion, gold electroplating, and bulk micromachining process. In electrostatic devices, $10-\mu\textrm{m}-thick$ gold absorber on $1mm{\times}1mm$ Si shuttle mass is supported by $10-\mu\textrm{m}-wide$, 1-mm-long suspension beams and oscillated by comb electrodes during X-ray exposures. In electrothermal devices, gold absorber on 1.42 mm diameter shuttle mass is oscillated in x and y directions sequentially by thermal expansion caused by joule heating of the corresponding bent beam actuators. The fundamental frequency and amplitude of the electrostatic devices are around 3.6 kHz and $20\mu\textrm{m}$, respectively, for a dc bias of 100 V and an ac bias of 20 VP-P (peak-peak). Displacements in x and y directions of the electrothermal devices are both around $20{\;}\mu\textrm{m}$at 742 mW input power. S-shaped and conical shaped PMMA microstructures are demonstrated through X-ray experiments with the fabricated devices.

• The Journal of Korean Academy of Prosthodontics
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• v.25 no.1
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• pp.213-226
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• 1987

The purpose of this study was to standardize and classify the coordination pattern among the left and right masseter and anterior temporal muscles, in terms of integrated EMG values per stroke during gum chewing in normal subjects. In this study, 20 normal subjects were selected to chew a piece of gum and integrated EMG from middle portion of the masseter and anterior temporal muscles on both sides were recorded 20 times during each of the right and left chewing respectively. And the Bioelectric Processor Model EM2 (Myo-tronies Research, Inc., U.S.A.) with the surface electrodes was used to record the EMG activity during all experimental procedures. The results were as follows; 1. In all subjects, the chewing side masseter muscle was predominantly active among the four muscles examined. 2. The integrated EMG value of the middle of masseter muscle was significantly predominant than those of the anterior temporal muscle (p<0.0001) on the chewing side, but no significant predominant was observed on the nonchewing side (p<0.98). 3. In comparison with same muscles on the chewing and nonchewing side, low correlation coefficient was found between the middle of masseter muscles (R=0.317), but high correlation coefficient was found between the anterior temporal muscles (R=0.738). Between two muscles on the same side, there were significant correlation in the chewing (R=0.557) and nonchewing side (R=0.625). 4. In the coordination patterns among four muscles examined, distinct individual differences were found, but in an identical subject one fixed pattern appeared with significant reproducibility.

• Journal of Korean Ophthalmic Optics Society
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• v.3 no.1
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• pp.27-31
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• 1998

We investigated visible light radiated from Plasma focus device by time-resolved analyzed method and time-integrated analyzed method. Plasma focus consisted of two coaxial electrodes is a device that translated from electric energy of maximum 40 kV/20 kJ in capacitor banks into visible light by electric discharge. Spectral analysis is using Monochromator(f =0.5m). Time-resolved spectrum is analyzed with a oscilloscope the light pulse of constant wavelength and time-integrated spectrum does with densitometer the film which developed a constant range of wavelength. The optimum condition of visible emission was that the discharging voltage was 17kV and the gas pressure 0.5 torr Ar.

• Journal of the Korean Electrochemical Society
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• v.11 no.3
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• pp.165-169
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• 2008

The effect of reduction of carbon dioxide by CODH(Carbon Monoxide Dehydrogenase) was compared on glassy carbon and gold working electrodes. In case of gold electrode, the choice of the optimum applied potential is very important since $H_2$ evolution can be mixed with $CO_2$ reduction. On the other hand, efficient $CO_2$ reduction was observed up to -650 mV vs. NHE on glassy carbon in neutral solution due to the larger overpotential for $H_2$ evolution on glassy carbon surface than that on gold surface. The optimum potential for $CO_2$ reduction was found to be $-570{\sim}600\;mV$ vs. NHE. The current efficiency of $CO_2$ to CO decreased dramatically at more negative potential according to the activity of enzyme decrease and the hydrogen evolution.

• Bulletin of the Korean Chemical Society
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• v.27 no.5
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• pp.672-678
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• 2006

A new approach to fabricate an enzyme electrode was described based on the immobilization of horseradish peroxidase (HRP) on dithiobis-N-succinimidyl propionate (DTSP) self-assembled monolayer (SAM) formed on gold-nanoparticles (Au-NPs) which were electrochemically deposited onto glassy carbon electrode (GCE) surface. The overall surface area and average size of Au-NPs could be controlled by varying deposition time and were examined by Field Emission-Scanning Electron Microscope (FE-SEM). The $O_2$ reduction capability of the surface demonstrated that Au-NPs were thermodynamically stable enough to stay on GCE surface. The immobilized HRP electrode based on Au-NPs/GCE presented faster, more stable and sensitive amperometric response in the reduction of hydrogen peroxide than a HRP immobilized on DTSP/gold plate electrode not containing Au-NPs. The effects of operating potential, mediator concentration, and pH of buffer electrolyte solution on the performance of the HRP biosensor were investigated. In the optimized experimental conditions, the HRP immobilized GCE incorporating smaller-sized Au-NPs showed higher electrocatalytic activity due to the high surface area to volume ratio of Au-NPs in the biosensor. The HRP electrode showed a linear response to $H_2O_2$ in the concentration range of 1.4 $\mu$M-3.1 mM. The apparent Michaelis-Menten constant ($K _M\; ^{app}$) determined for the immobilized HRP electrodes showed a trend to be decreased by decreasing size of Au-NPs electrodeposited onto GCE.