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http://dx.doi.org/10.3795/KSME-A.2002.26.10.2187

Deep X-ray Mask with Integrated Micro-Actuator for 3D Microfabrication via LIGA Process  

Lee, Kwang-Cheol (포항공과대학교 기계공학과)
Lee, Seung-S. (포항공과대학교 기계공학과)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.26, no.10, 2002 , pp. 2187-2193 More about this Journal
Abstract
We present a novel method for 3D microfabrication with LIGA process that utilizes a deep X-ray mask in which a micro-actuator is integrated. The integrated micro-actuator oscillates the X-ray absorber, which is formed on the shuttle mass of the micro-actuator, during X-ray exposures to modify the absorbed dose profile in X-ray resist, typically PMMA. 3D PMMA microstructures according to the modulated dose contour are revealed after GG development. An X-ray mask with integrated comb drive actuator is fabricated using deep reactive ion etching, absorber electroplating, and bulk micromachining with silicon-on-insulator (SOI) wafer. 1mm $\times$ 1 mm, 20 $\mu$m thick silicon shuttle mass as a mask blank is supported by four 1 mm long suspension beams and is driven by the comb electrodes. A 10 $\mu$m thick, 50 $\mu$m line and spaced gold absorber pattern is electroplated on the shuttle mass before the release step. The fundamental frequency and amplitude are around 3.6 kHz and 20 $\mu$m, respectively, for a do bias of 100 V and an ac bias of 20 $V_{p-p}$ (peak-peak). Fabricated PMMA microstructure shows 15.4 $\mu$m deep, S-shaped cross section in the case of 1.6 kJ $cm^{-3}$ surface dose and GG development at 35$^{\circ}C$ for 40 minutes.
Keywords
LIGA; Deep X-ray Lithography; 3D Microfabrication; Integrated Micro-Actuate;
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1 Schumacher, K., Kromer, O., Wallrabe, D., Mohr, J., and Saile, V., 1999, 'Micromechanical LIGA-Gyroscope,' Proc. Int. Conf. On Solid-State Sensors and Actuators (Transducers '99), pp. 1574-1577
2 Muller, K. -D., Bacher, W., and Heckele, M., 1998, 'Flexible Integration of Nonsilicon Microstructures on Microelectronic Circuits,' Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS'98), pp. 263-267   DOI
3 Dunkel, K., Bauer, H. -D., Ehrfeld, W., HoBfeld, J., Weber, L., Horcher, G., and Muller, G., 1998 'Injection-moulded Fibre Ribbon Connectors for Parallel Optical Links Fabricated by the LIGA Technique,' J. Micromech. Microeng., Vol. 8, pp. 301-306   DOI   ScienceOn
4 Schulze, J., Ehrfeld, w, HoBfeld, J., Klaus, M., Kufner, M., Kufner, S., Muller, H., and Picard, A., 1999, 'Parallel Optical Interconnection using Selfadjusting Microlenses on Injection Molded Ferrules Made by LIGA Technique,' Proc. SPIE, Vol. 3737, pp 562-571   DOI
5 Guckel, H., 1998, 'High-Aspect-Ratio Micromachining Via Deep X-ray Lithography,' Proc. of the IEEE, Vol. 86(8), pp. 1586-1593   DOI   ScienceOn
6 Christenson, T. R. and Schmale, D. T., 1999, 'A Batch Wafer Scale LIGA Assembly and Packaging Technique via Diffusion Bonding,' Proc. IEEE Int. Conf on Micro Electro Mechanical Systems (MEMS'99), pp. 476--481   DOI
7 Pan, L. -W. and Lin, L., 2001, 'Batch Transfer of LIGA Microstructures by Selective Electroplating and Bonding,' J. of Microelectromech. Sys., Vol. 10(1), pp. 25-32   DOI   ScienceOn
8 Maas, D., Bustgens, B., Fahrenberg, J., Keller, W., Ruther, P., Schomburg, W. K., and Seidel, D., 1996, 'Fabrication of Microcomponents using Adhesive Bonding Techniques,' Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS'96), pp. 331-336   DOI
9 Ehrfeld, W. and Schmidt, A., 1998, 'Recent Developments in Deep X-ray Lithography,' J. Vac. Sci. Technol. B, Vol. 16(6), pp. 3526-3534   DOI   ScienceOn
10 Feinerman, A. D., Lajos, R. E., White, V., and Denton, D. D., 1996, 'X-ray Lathe: an X-ray Lithographic Exposure Tool for Nonplanar Objects,' J. of Microelectromech. Sys., Vol. 5(4), pp. 250-255   DOI   ScienceOn
11 Katoh, T., Nishi, N., Fukugawa, M., Ueno, H., and Sugiyama, S., 2001, 'Direct Writing for Threedimensional Microfabrication using Synchrotron Radiation Etching,' Sen. and Act. A, Vol. 89, pp. 10-15   DOI   ScienceOn
12 Tabata, O., Matsuzuka, N., Yamaji, T., and You, H., 2001, 'Fabrication of 3-dimensional Microstructures using Moving Mask Deep X-ray Lithography ($M^2DXL$),' Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS'01), pp. 94-97   DOI
13 Tabata, O., Matsuzuka, N., Yamaji, T., Vemura, S., and Yamamoto, K., 2002, '3D Microfabrication by Moving Mask Deep X-ray Lithography ($M^2DXL$) with Multiple Stages,' Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS'02), pp. 180-183   DOI
14 Cheng, Y., Kuo, N. -Y., and Su, C. H., 1997, 'Dose Distribution of Synchrotron X-ray Penetrating Materials of Low Atomic Numbers,' Rev. Sci. Instrum., Vol. 68(5), pp. 180-183   DOI   ScienceOn
15 Samper, V. D., Sangster, A. J., Reuben, R. L., and Wallrabe, D., 1999, 'Torque Evaluation of a LIGA Fabricated Electrostatic Micromotor,' J. of Microelectromech. Sys., Vol. 8(1), pp. 115-123   DOI   ScienceOn
16 Koo, Y. and Shin, N., 2000, X-ray Science & Applications (In Korean), A-Jin, Seoul, pp. 29-64
17 Sugiyama, S. and Veno, H., 2001, 'Novel Shaped Microstructures Processed by Deep X-ray Lithography,' Proc. Int. Conf. On Solid-State Sensors and Actuators (Transducers'01), pp. 1574-1577
18 Becker, E. W., Ehrfeld, W., Hagmann, P., Maner, A., and Miinchmeyer, D., 1986, 'Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding (LIGA Process),' Microelectron. Eng., Vol. 4, pp. 35-56   DOI   ScienceOn
19 Guckel, H., Fischer, K., and Stiers, E., 1998, 'Closed Loop Controlled, Large Throw, Magnetic Linear Microactuator with 1000${\mu}m$ Structural Height,' Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS'98), pp. 41-18   DOI
20 Rogge, B., Schulz, J., Mohr, J., Thommes, A., and Menz, W., 1995, 'Fully Batch Fabricated Magnetic Microactuators using a Two Layer LIGA Process,' Proc. Int. Conf. On Solid-State Sensors and Actuators (Transducers '95), pp. 320-323   DOI
21 Strohtrnann, M., Bley, P., Fromhein, O., and Mohr, J., 1994, 'Acceleration Sensor with Integrated Compensation of Temperature Effects Fabricated by the LIGA Process,' Sen. and Act. A, Vol. 41-42, pp. 426-429   DOI   ScienceOn