1 |
Schumacher, K., Kromer, O., Wallrabe, D., Mohr, J., and Saile, V., 1999, 'Micromechanical LIGA-Gyroscope,' Proc. Int. Conf. On Solid-State Sensors and Actuators (Transducers '99), pp. 1574-1577
|
2 |
Muller, K. -D., Bacher, W., and Heckele, M., 1998, 'Flexible Integration of Nonsilicon Microstructures on Microelectronic Circuits,' Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS'98), pp. 263-267
DOI
|
3 |
Dunkel, K., Bauer, H. -D., Ehrfeld, W., HoBfeld, J., Weber, L., Horcher, G., and Muller, G., 1998 'Injection-moulded Fibre Ribbon Connectors for Parallel Optical Links Fabricated by the LIGA Technique,' J. Micromech. Microeng., Vol. 8, pp. 301-306
DOI
ScienceOn
|
4 |
Schulze, J., Ehrfeld, w, HoBfeld, J., Klaus, M., Kufner, M., Kufner, S., Muller, H., and Picard, A., 1999, 'Parallel Optical Interconnection using Selfadjusting Microlenses on Injection Molded Ferrules Made by LIGA Technique,' Proc. SPIE, Vol. 3737, pp 562-571
DOI
|
5 |
Guckel, H., 1998, 'High-Aspect-Ratio Micromachining Via Deep X-ray Lithography,' Proc. of the IEEE, Vol. 86(8), pp. 1586-1593
DOI
ScienceOn
|
6 |
Christenson, T. R. and Schmale, D. T., 1999, 'A Batch Wafer Scale LIGA Assembly and Packaging Technique via Diffusion Bonding,' Proc. IEEE Int. Conf on Micro Electro Mechanical Systems (MEMS'99), pp. 476--481
DOI
|
7 |
Pan, L. -W. and Lin, L., 2001, 'Batch Transfer of LIGA Microstructures by Selective Electroplating and Bonding,' J. of Microelectromech. Sys., Vol. 10(1), pp. 25-32
DOI
ScienceOn
|
8 |
Maas, D., Bustgens, B., Fahrenberg, J., Keller, W., Ruther, P., Schomburg, W. K., and Seidel, D., 1996, 'Fabrication of Microcomponents using Adhesive Bonding Techniques,' Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS'96), pp. 331-336
DOI
|
9 |
Ehrfeld, W. and Schmidt, A., 1998, 'Recent Developments in Deep X-ray Lithography,' J. Vac. Sci. Technol. B, Vol. 16(6), pp. 3526-3534
DOI
ScienceOn
|
10 |
Feinerman, A. D., Lajos, R. E., White, V., and Denton, D. D., 1996, 'X-ray Lathe: an X-ray Lithographic Exposure Tool for Nonplanar Objects,' J. of Microelectromech. Sys., Vol. 5(4), pp. 250-255
DOI
ScienceOn
|
11 |
Katoh, T., Nishi, N., Fukugawa, M., Ueno, H., and Sugiyama, S., 2001, 'Direct Writing for Threedimensional Microfabrication using Synchrotron Radiation Etching,' Sen. and Act. A, Vol. 89, pp. 10-15
DOI
ScienceOn
|
12 |
Tabata, O., Matsuzuka, N., Yamaji, T., and You, H., 2001, 'Fabrication of 3-dimensional Microstructures using Moving Mask Deep X-ray Lithography ( ),' Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS'01), pp. 94-97
DOI
|
13 |
Tabata, O., Matsuzuka, N., Yamaji, T., Vemura, S., and Yamamoto, K., 2002, '3D Microfabrication by Moving Mask Deep X-ray Lithography ( ) with Multiple Stages,' Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS'02), pp. 180-183
DOI
|
14 |
Cheng, Y., Kuo, N. -Y., and Su, C. H., 1997, 'Dose Distribution of Synchrotron X-ray Penetrating Materials of Low Atomic Numbers,' Rev. Sci. Instrum., Vol. 68(5), pp. 180-183
DOI
ScienceOn
|
15 |
Samper, V. D., Sangster, A. J., Reuben, R. L., and Wallrabe, D., 1999, 'Torque Evaluation of a LIGA Fabricated Electrostatic Micromotor,' J. of Microelectromech. Sys., Vol. 8(1), pp. 115-123
DOI
ScienceOn
|
16 |
Koo, Y. and Shin, N., 2000, X-ray Science & Applications (In Korean), A-Jin, Seoul, pp. 29-64
|
17 |
Sugiyama, S. and Veno, H., 2001, 'Novel Shaped Microstructures Processed by Deep X-ray Lithography,' Proc. Int. Conf. On Solid-State Sensors and Actuators (Transducers'01), pp. 1574-1577
|
18 |
Becker, E. W., Ehrfeld, W., Hagmann, P., Maner, A., and Miinchmeyer, D., 1986, 'Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding (LIGA Process),' Microelectron. Eng., Vol. 4, pp. 35-56
DOI
ScienceOn
|
19 |
Guckel, H., Fischer, K., and Stiers, E., 1998, 'Closed Loop Controlled, Large Throw, Magnetic Linear Microactuator with 1000 Structural Height,' Proc. IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS'98), pp. 41-18
DOI
|
20 |
Rogge, B., Schulz, J., Mohr, J., Thommes, A., and Menz, W., 1995, 'Fully Batch Fabricated Magnetic Microactuators using a Two Layer LIGA Process,' Proc. Int. Conf. On Solid-State Sensors and Actuators (Transducers '95), pp. 320-323
DOI
|
21 |
Strohtrnann, M., Bley, P., Fromhein, O., and Mohr, J., 1994, 'Acceleration Sensor with Integrated Compensation of Temperature Effects Fabricated by the LIGA Process,' Sen. and Act. A, Vol. 41-42, pp. 426-429
DOI
ScienceOn
|