• Transactions of the Society of Information Storage Systems
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• v.2 no.4
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• pp.236-239
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• 2006

Glass micro molding process is the most suitable process for fabricating high precision glass microlens amy at low cost. A new glass micro molding process was proposed. Tungsten carbide mold was fabricated by imprinting and sintering process to overcome the difficulties of the conventional process. In the glass micro molding process, process conditions such as processing temperature and compression force were changed. Geometrical properties of the replicated glass microlens array were measured and compared at variety process conditions. The condition of glass micro molding process was optimized. The experimental result showed that developed process was effective to produce a glass microlens array.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.5
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• pp.307-311
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• 2014

Because of a waveguiding effect and total internal reflection caused by a difference in refractive indices, only 20% of generated light is emitted to the air and the rest is trapped or absorbed in the device. An improvement of outcoupled efficiency of organic light-emitting diodes was studied using a microlens array. Mold of microlens array was fabricated by using photo-lithography with the AZ9260 photoresist, and the microlens array was formed onto the glass substrate using the UV curing agent named ZPU13-440. Device structure consists of microlens/glass/ITO/TPD/$Alq_3$/LiF/Al. It was found that there is an improvement of external quantum efficiency by about 20% at the same current density for the device with the microlens array compared to that of the reference one. Simulated outcoupled efficiency shows the improvement by about 20% for the device with the microlens array compared to that of the reference one. These results are consistent with the experimental ones.

• Korean Journal of Optics and Photonics
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• v.18 no.6
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• pp.441-446
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• 2007

Outcoupling efficiency of the OLED device is improved by incorporating both a microlens array and a diffractive grating pattern. The microlens array improves the light transmission at the interface of glass and air, and the diffractive grating outcouples the guided mode propagating at the waveguide, which consists of ITO and organic layers. By using the PDMS soft mold imprinting method, the microlens array is fabricated on the glass substrate. The diffractive grating pattern is directly fabricated on the ITO surface by using laser interferometry. A microlens array with a diameter of $10{\mu}m$ improves the light coupling efficiency by 22%. The diffractive grating made of TSMR photoresist enhances the luminance power efficiency by 41% at a current density of $20mA/cm^2$.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.10a
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• pp.36-39
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• 2004

Glass molding is an advantageous method to manufacture glass micro optical components. However, it is difficult to make Tungsten Carbide core for glass microlens array. We have developed novel method to fabricate Tungsten Carbide core for micro glass components using pressure forming. Silicon masters were fabricated by micro machining. Tungsten Carbide core was fabricated by pressure forming and sintering. And we made high quality surface of Tungsten Carbide core by using the magnetic-field-assisted polishing process.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1682-1683
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• 2011

Through-silicon microlens array has been implemented using glass thermal reflow process. Design, numerical analysis, fabrication, and measurement results are discussed. Microlenses with six different volumetric dimensions were successfully fabricated and characterized. Radius of curvature of each microlenses were measured with less than 1% deviation compared to calculated value. Measured average roughness of the microlens surface was 16.5 nm.

• Korean Journal of Optics and Photonics
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• v.16 no.4
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• pp.340-344
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• 2005

Microlens cells of Ge-doped BPSG (Boro-Phospho-Silicate Glass) are fabricated by dicing the film produced by FHD (Flame Hydrolysis Deposition). Microlens arrays of $53.4{\mu}m$ square unit are produced by the thermal reflow of the diced unit cells at $1200^{\circ}C$. The gap between the microlenses was about $70{\mu}m,$ and the thickness of the produced lens was about $28.4{\mu}m$. We analyzed the reflowed shape of the microlens cell by an image-process technique, and the focal length was about $62.2{\mu}m$. This method of fabricating a microlens is simple and inexpensive compared to the conventional method using the photolithographic process. Also, the control of the radius of curvature of the microlens is easier and a more precise microlens way of various types can be fabricated using this method.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.76-79
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• 2003

Glass molding is an advantageous method to manufacture glass micro optical components. However, it is difficult to make tungsten carbide core for glass molded micro optics way. We have developed novel method to fabricate tungsten carbide core for glass molding of glass micro optical components. Silicon masters were fabricated by micro machining. Tungsten Carbide cores were fabricated by forming, sintering and coating. Finally we fabricated glass molded V-groove with pitch of 192$\mu\textrm{m}$ and glass microlens way with lens diameter of 36∼225$\mu\textrm{m}$ by the present method.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.199-199
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• 2009

Recently, polymeric microlens arrays have become important elements in many applications. Microlens arrays have been used to enhance luminance efficiency and luminance power efficiency of light-emitting diodes (LEDs) and organic LEDs. Many processes for fabrication of microlens array are studied. Though the MLA has been fabricated by electroformed mold, LIGA process and reflow method, these methods were required masks, multiple process steps and post processing. In this paper, we proposed rapid and direct UV laser direct fabrication process using colorless liquid photopolymer, NOA60 for polarization activated microlens. The microlens arrays are formed on the NOA60 on glass, after the focused laser energy was irradiated to the material. The diameter of MLA was varied from 42 to 88 ${\mu}m$, and the height from 0.9 to 1.6 ${\mu}m$. The MLA fabricated using NOA60 shows more then 85% transmittance as well as good hardness for optical module.

• Transactions of Materials Processing
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• v.15 no.1 s.82
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• pp.34-41
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• 2006

Microlens arrays were fabricated by a modified LIGA process composed of the exposure of a PMMA (Polymethylmethacrylate) sheet to deep x-rays and subsequent thermal treatment. A successful modeling and analyses for microlens formation were presented according to the experimental procedure. A nickel mold insert was fabricated by the nickel electroforming process on the PMMA microlens arrays fabricated by the modified LIGA process. For the replication of microlens arrays having various diameters with different foci on the same substrate, both hot embossing and microinjection molding processes have been successfully utilized with the fabricated mold insert. Replicated microlenses showed very good surface roughness with the order of 1 nm. The focal lengths of the injection molded microlenses were successfully estimated theoretically and also measured experimentally.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.09a
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• pp.23-28
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• 2005

Microlens arrays were fabricated using a modified LIGA process based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep x-rays and subsequent thermal treatment. A successful modeling and analyses for microlens formation were presented according to the experimental procedure. A nickel mold insert was fabricated by the nickel electroforming process on the PMMA microlens arrays fabricated by the modified LIGA process. For the replication of microlens arrays having various diameters with different foci on the same substrate, the hot embossing and the microinjection molding processes have been successfully utilized with the fabricated mold insert. Fabricated microlenses showed good surface roughness than the mold insert. The focal lengths of the injection molded microlenses were successfully measured experimentally and also estimated theoretically.