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http://dx.doi.org/10.3807/KJOP.2005.16.4.340

Ge-doped Boro-Phospho-Silicate Glass Micro-lens Array Produced by Thermal Reflow  

Jeong, Jin-ho (Chonnam National University, Department Of Physics)
Oh, Jin-Gyeong (Chonnam National University, Department Of Physics)
Choi, Jun-Seok (Chonnam National University, Department Of Physics)
Choi, Gi-Seon (Chonnam National University, Department Of Physics)
Lee, Hyeong-Jong (Chonnam National University, Department Of Physics)
Bae, Byeong-Seong (Kyung Hee University, Department Of Information Display)
Publication Information
Korean Journal of Optics and Photonics / v.16, no.4, 2005 , pp. 340-344 More about this Journal
Abstract
Microlens cells of Ge-doped BPSG (Boro-Phospho-Silicate Glass) are fabricated by dicing the film produced by FHD (Flame Hydrolysis Deposition). Microlens arrays of $53.4{\mu}m$ square unit are produced by the thermal reflow of the diced unit cells at $1200^{\circ}C$. The gap between the microlenses was about $70{\mu}m,$ and the thickness of the produced lens was about $28.4{\mu}m$. We analyzed the reflowed shape of the microlens cell by an image-process technique, and the focal length was about $62.2{\mu}m$. This method of fabricating a microlens is simple and inexpensive compared to the conventional method using the photolithographic process. Also, the control of the radius of curvature of the microlens is easier and a more precise microlens way of various types can be fabricated using this method.
Keywords
Micro-lens array; FHD; Ge-BPSC; Dicing saw; Thermal reflow;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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1 S. Sinzinger and J. Jahns, Microoptics(Wiley-VCH, Weinheim, 1999)
2 M. G. Lippmann, 'Epreuves reversibles donnant la sensation du relief,' J. de Phys.,Vol. 7, pp. 821-825, 1908
3 S. Chen, X. Yi, M. He, and X. Zhang, 'Research on hybrid device of Si micro lens arrays with long focus and IR detector arrays,' 25th Infrared and Millimeter Waves Conference Digest, pp. 147-148, 2000
4 김철세, 김재도, 윤경구, '엑사이머 레이저를 이용한 마이크로렌즈 제작,' 한국정밀공학회지, Vol. 20, No. 2, pp. 33-39, 2003
5 M. He, X.-C. Yuan, N.Q. Ngo, J. Bu, and S.H. Tao, 'Low-cost and efficient coupling technique using reflowed sol-gel microlens,' Opt. Express, Vol. 11, No. 14, pp. 1621-1627, 2003   DOI
6 조재걸, 송정환, 정선태, 오윤경, 'FHD를 이용한 구형 마이크로 렌즈 제작,' 한국광학회 제13회 광자기술 학술회의 논문집, FP23, 2004
7 박광범, 김인희, 정석원, 김건년, 문현찬, 박효덕, 신상모, 'Thermal Reflow법에 의한 마이크로렌즈의 제작 및 그 특성,' 한국광학회 동계학술발표회 논문집, FC-II14, 2000
8 김용권, 'Optical MEMS 연구동향,' 서울대학교 반도체 공동연구소 소식지, 제32호, 2001
9 M. Kawachi, 'Silica waveguides on silicon and their application to integrated-optic components,' Opt. Quantum Electron., Vol. 22, pp. 391-416, 1990   DOI
10 M. N. Rahaman, Ceramic Processing and Sintering(Marcel Dekker, Inc., N. Y. 1995)
11 Daniel Malacara and Zacarias Maracara, Handbook of Lens Design(Marcel Dekker, Inc., N. Y. 1994), Chapter 10
12 성승훈, 조두진, '그레이스케일 마스크를 이용한 미소렌즈 배열의 제작,' 한국광학회지, Vol. 13, No. 2, pp. 117-121, 2002   DOI
13 C. P. Lin, H. Yang, and C. K. Chao, 'Hexagonal microlens array modeling and fabrication using a thermal retlow process,' J. Micromech. Microeng., Vol. 13, pp. 775-781, 2003   DOI   ScienceOn