• Design & Manufacturing
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• v.16 no.3
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• pp.22-27
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• 2022

The demand for new processing technology that can improve productivity is increasing in industries that require large-scale and various products. In response to this demand, a robot machining system with flexibility is required. Because of the low rigidity of the robot, the robot machining system has a large error during machining and is vulnerable to vibration generated during machining. Vibration generated during machining deteriorates machining quality and reduces the durability of the machine. To solve this problem, a stage for fixing the spindle during machining is required. In order to compensate for the robot's low rigidity, a system combining a piezoelectric actuator for generating a large force and a guide mechanism to actuate with a desired direction is required. Since the rigidity of flexible hinges varies depending on the structure, it is important to optimal design the flexible hinge and high-rigidity system. The purpose of this research is to make analytic model and optimize a flexible hinge and to design a high rigidity stage. In this research, to design a flexible hinge stage, a concept design of system for high rigidity and flexure hinge modeling is carried out. Based on analytic modeling, the optimal design for the purpose of high rigidity is finished and the optimal design results is used to check the error between the modeling and actual simulation results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.742-745
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• 2003

Piezoelectric elements driven ultra-precision stages have been used for high accuracy, fast response and high load rapacity. which are allowable to apply the stages to AFMs. Most of the piezoelectric driven stages are guided by flexure hinges for force transmission and mechanical amplification. However the flexure hinge mechanisms cause lack of position accuracy due to coupled and parasitic motions. Hence it is important that the mechanism design of the stage is focused on the stiffness of the flexure hinges to accomplish fast response and hish accuracy without the coupled and parasitic motions. In this study, some constraints for optimal design of a piezoelectric elements driven stage and a design method are proposed. Next, an optimal design is carried out using mathematical calculation. Finally the designed results are verified by FEM.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.537-538
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.587-588
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• 2013

• Journal of the Korean Society for Precision Engineering
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• v.32 no.3
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• pp.263-268
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• 2015

This paper describes lost motion analysis for a novel 6-DOF ultra-precision positioning stage. In the case of flexure hinge based precision positioning stage, lost motion is generated when the displacement of actuator is not delivered completely to the end-effector because of the elasticity of flexure hinge. Consequently, it is need to compute amount of lost motion to compensate the motion or to decide appropriate control method for precision positioning. Lost motion analysis for the vertical actuation unit is presented. The analysis results are presented in two ways: analytic and numerical analyses. It is found that they closely coincide with each other by 1% error. In finite element analysis result, the amount of lost motion is turned out to be about 3%. Although, the amount is not so large, it is necessary procedure to check the lost motion to establish the control method.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2524-2528
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• 2003

High-precision position system is widely used in lots of fields such as semiconductor industry, biotechnology, display and other up-to-date industry field. One of the main issues is to have a long traveling range with precision. There are a few solutions. For instance, there are inchworm methods, lever principle. In this study, we use lever principle to amplify output displacement with a new mechanical amplification structure. We designed new type 3DOF stage with PZT actuator and capacitive sensor. Non-monolithic structure is suggested to obtain the convenience of assembly and modification. Driving parts are designed as modules that generate displacement amplification of each axis. Designed motion module consists of 3 flexure hinges and a PZT actuator with double L lever structure.

• Proceedings of the Earthquake Engineering Society of Korea Conference
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• 2002.03a
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• pp.203-210
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• 2002

The past bridge design specifications of Korea didn't include 1imitation on the amount of lap splices in the plastic hinge zone of piers, and so do current specifications. But these specifications include just limitation on the minimal length of lap splices. Thus, a large majority of non-seismically designed bridge piers may have lap splices in plastic hinge zone. In this study, model pier was selected among existent bridge piers whose failure mode is complex shear-flexure mode. Full scaled RC pier models whose aspect ratio is about 2.67 were constructed and quasi static test according to the drift level history was implemented. From the test results, effect of the lap splices on the seismic performance of bridges piers was analyzed, and the seismic capacity of the model bridges was evaluated by capacity spectrum method.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.8
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• pp.798-803
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• 2009

This paper proposes a grating scanner which is driven by a stack-type piezoelectric element. The mechanism of the grating scanner is based on flexure hinges. Using some constraints, the compliant mechanism is designed and then verified by Finite Element Analysis. The designed compliant mechanism is manufactured by wire electro-discharge machining, and then integrated with a stack-type piezoelectric element for actuation and a capacitance displacement sensor for measuring ultra-precision displacement. Experiments demonstrates the characteristics and the performances of the grating scanner using the terms of working range, resonance frequency, bandwidth and resolution. The grating scanner is applicable to a Moire interferometry for measuring 3-dimensional microscopic surface.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.648-651
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• 2003

This paper presents a 3-axis fine positioning stage. All the procedure concerning the design and fabrication of the stae are described. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. A special flexure hinge is adopted to be able to actuate the single stage in three axes at the same time. A ball contact mechanism is introduced into the piezoelectric actuator to avoid the cross talk among the axes. The final design is obtained with the theoretical analysis on the stage. An actual fine stage is developed and the design specifications are verified through an experiment.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.121-129
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• 2005

Lever mechanisms are usually employed to enlarge output displacements in precision stages. In this study, theoretical analysis is done for a precision stage employing a lever and flexure hinges, including bending effect. This study presented relations between design parameters and magnification ratio. This study presents optimal values for the parameters to achieve a longer stage displacement. The analysis is verified by finite element analysis. It is found that adjusting stiffnesses can increase the travel range significantly.