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http://dx.doi.org/10.5302/J.ICROS.2009.15.8.798

A Piezo-Driven Grating Scanner Based on Flexure Hinges for Measuring 3-Dimensional Microscopic Surface  

Choi, Kee-Bong (한국기계연구원 나노융합기계본부)
Ten, Aleksey-Deson (한국기계연구원 나노융합기계본부)
Lee, Jae-Jong (한국기계연구원 나노융합기계본부)
Kim, Sung-Hyun (넥스타테크놀로지(주) 연구소 광학팀)
Ko, Kook-Won (선문대학교 정보통신공학과)
Kwon, Soon-Ki (호서대학교 산학협력단)
Publication Information
Journal of Institute of Control, Robotics and Systems / v.15, no.8, 2009 , pp. 798-803 More about this Journal
Abstract
This paper proposes a grating scanner which is driven by a stack-type piezoelectric element. The mechanism of the grating scanner is based on flexure hinges. Using some constraints, the compliant mechanism is designed and then verified by Finite Element Analysis. The designed compliant mechanism is manufactured by wire electro-discharge machining, and then integrated with a stack-type piezoelectric element for actuation and a capacitance displacement sensor for measuring ultra-precision displacement. Experiments demonstrates the characteristics and the performances of the grating scanner using the terms of working range, resonance frequency, bandwidth and resolution. The grating scanner is applicable to a Moire interferometry for measuring 3-dimensional microscopic surface.
Keywords
stack-type piezoelectric element; grating; scanner; flexure hinge; notch hinge;
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1 J. Tlusty, S. Smith, and C. Zamudia, "Operation planning based on cutting process model," Ann CIRP, vol. 39, pp. 517-521, 1990   DOI   ScienceOn
2 김기홍, 이득우, "Micro-factory 공정간 마이크로 부품 검사 프로브 개발," 한국공작기계학회 춘계학술대회 논문집,pp.424-428,2005
3 최이배, 위상천이 모아레 토포그라피를 이용한 3차원 물체의 미세형상측정,KAIST 박사학위논문, 1998
4 Y. Tian, B. Shrinzadeh, and D. Zhang, A flexure-based five-bar mechanism for micro/nano manipulation, Sensors and Actuators A: Physical, vol. 153, no. I, pp. 96-104,2009   DOI   ScienceOn
5 D. Kang, K Kim, D. Kim, J. Shim, D.-G Gweon, and J. Jeong, "Optimal design of high precision XY-scanner with nanometerlevel resolution and millimeter-level working range," Mechatronics, vol. 19, no. 4, pp. 562-570, 2009   DOI   ScienceOn
6 M. N. M. Zubir, B. Shirinzadeh, and Y. Tian, "Development of a novel flexure-based microgripper for high precision microobject manipulation," Sensors and Actuators A: Physical, vol. 150, no. 2,pp. 257-266, 2009.   DOI   ScienceOn
7 S. T. Smith, Flexures: Elements of Elastic Mechanisms, Gordon and Breach Science Publishers, Amsterdam, Netherlands, 2000
8 N. Lobontiu, Compliant Mechanisms: Design of Flexure Hinges, CRC Press LLC, Florida, USA, 2003
9 K-B. Choi, Dynamics of a compliant mechanism based on flexure hinges, J Mechanical Engineering Science, vol. 219, no. C2, pp. 225-235, 2005   DOI   ScienceOn
10 K-B. Choi and J. J. Lee, "Static model for flexure-based compliant mechanism driven by piezo stacks," J Mechanical Engineering Science, vol. 222, no. C4, pp. 703-709, 2008   DOI   ScienceOn