A Piezo-Driven Grating Scanner Based on Flexure Hinges for Measuring 3-Dimensional Microscopic Surface |
Choi, Kee-Bong
(한국기계연구원 나노융합기계본부)
Ten, Aleksey-Deson (한국기계연구원 나노융합기계본부) Lee, Jae-Jong (한국기계연구원 나노융합기계본부) Kim, Sung-Hyun (넥스타테크놀로지(주) 연구소 광학팀) Ko, Kook-Won (선문대학교 정보통신공학과) Kwon, Soon-Ki (호서대학교 산학협력단) |
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