Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Analysis of Flexure Hinge Neck Thickness of a Lever in Ultra Precision Stages of a Long Travel Range

유연 힌지 구조의 스테이지 구동범위 확대를 위한 힌지의 목두께 해석

  • 황은주 (고려대학교 기계공학과 대학원) ;
  • 민경석 (고려대학교 기계공학과 대학원) ;
  • 송신형 (고려대학교 기계공학과 대학원) ;
  • 최우천 (고려대학교 기계공학과)
  • Published : 2005.05.01
Download PDF
⟨ Previous Next ⟩

Abstract

Lever mechanisms are usually employed to enlarge output displacements in precision stages. In this study, theoretical analysis is done for a precision stage employing a lever and flexure hinges, including bending effect. This study presented relations between design parameters and magnification ratio. This study presents optimal values for the parameters to achieve a longer stage displacement. The analysis is verified by finite element analysis. It is found that adjusting stiffnesses can increase the travel range significantly.

Keywords

References

  1. Paros, J. M. and Weisbord, L., 'How to design flexure hinge,' Machine Design, Vol. 37, pp. 151-157, 1965
  2. Furukawa, E., Mizuno , M. and Hojo, T., 'A twin-type piezo-driven translation mechanism,' JSPE, Vol. 28, No.1, pp. 70-75, 1994
  3. Tseytlin, Y. M., 'Notch flexure hinges: An effective theory,' Rev. Sci. Instrum., Vol. 73, No. 9, pp. 3363-3368, September, 2002 https://doi.org/10.1063/1.1499761
  4. Wu, Y. and Zhou, Z., 'Design calculations for flexure hinges,' Rev. Sci. Instrum., Vol. 73, No.8, pp. 3101-3106, August, 2002 https://doi.org/10.1063/1.1494855
  5. Xu, W. and King, T. G., 'Mechanical amplifier design for piezo-actuator applications,' lEE, 1995 https://doi.org/10.1049/ic:19951045
  6. Chang, S. H. and Du, B. C., 'A precision piezodriven micropositioner mechanism with large travel range,' Rev. Sci. Instrum., Vol. 69, No. 4, pp. 1785-1791, April, 1998 https://doi.org/10.1063/1.1148842
  7. Ryu, J. W., Gweon, D. G. and Moon, K. S., 'Optimal design of a flexure hinge based $XY{\theta}$ wafer stage,' Precision Eng., Vol. 21, No. 1, pp. 18-28, 1997 https://doi.org/10.1016/S0141-6359(97)00064-0
  8. Smith, S. T., 'Flexures : Elements of elastic mechanisms,' Taylor and Francis, pp. 346-352, 2000
  9. Furukawa, E., Mizuno, M., 'Piezo-driven translation mechanisms utilizing linkages,' lnt. J. Japan Soc. Prec. Eng., Vol. 26, No. 1, pp. 54-59, 1992
  10. Callister, W. D., 'Materials science and engineering an introduction,' John Wiley & Sons, 5th edition, pp. 798, 2000
  11. Culpepper, M. L. and Anderson, G., 'Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism,' Precision Engineering, Vol. 28, pp.469-482, 2004 https://doi.org/10.1016/j.precisioneng.2004.02.003