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Analysis of Flexure Hinge Neck Thickness of a Lever in Ultra Precision Stages of a Long Travel Range  

Hwang Eunjoo (고려대학교 기계공학과 대학원)
Min Kyungsuk (고려대학교 기계공학과 대학원)
Song Sinhyung (고려대학교 기계공학과 대학원)
Choi Woo Chun (고려대학교 기계공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.5, 2005 , pp. 121-129 More about this Journal
Abstract
Lever mechanisms are usually employed to enlarge output displacements in precision stages. In this study, theoretical analysis is done for a precision stage employing a lever and flexure hinges, including bending effect. This study presented relations between design parameters and magnification ratio. This study presents optimal values for the parameters to achieve a longer stage displacement. The analysis is verified by finite element analysis. It is found that adjusting stiffnesses can increase the travel range significantly.
Keywords
Stage; Flexure Hinge; Lever; Magnification Ratio; Output Displacement to Input Force; Travel Range; Design Parameter; Spring Rate; Neck Thickness;
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  • Reference
1 Callister, W. D., 'Materials science and engineering an introduction,' John Wiley & Sons, 5th edition, pp. 798, 2000
2 Culpepper, M. L. and Anderson, G., 'Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism,' Precision Engineering, Vol. 28, pp.469-482, 2004   DOI   ScienceOn
3 Furukawa, E., Mizuno, M., 'Piezo-driven translation mechanisms utilizing linkages,' lnt. J. Japan Soc. Prec. Eng., Vol. 26, No. 1, pp. 54-59, 1992
4 Wu, Y. and Zhou, Z., 'Design calculations for flexure hinges,' Rev. Sci. Instrum., Vol. 73, No.8, pp. 3101-3106, August, 2002   DOI   ScienceOn
5 Xu, W. and King, T. G., 'Mechanical amplifier design for piezo-actuator applications,' lEE, 1995   DOI
6 Chang, S. H. and Du, B. C., 'A precision piezodriven micropositioner mechanism with large travel range,' Rev. Sci. Instrum., Vol. 69, No. 4, pp. 1785-1791, April, 1998   DOI   ScienceOn
7 Ryu, J. W., Gweon, D. G. and Moon, K. S., 'Optimal design of a flexure hinge based $XY{\theta}$ wafer stage,' Precision Eng., Vol. 21, No. 1, pp. 18-28, 1997   DOI   ScienceOn
8 Smith, S. T., 'Flexures : Elements of elastic mechanisms,' Taylor and Francis, pp. 346-352, 2000
9 Paros, J. M. and Weisbord, L., 'How to design flexure hinge,' Machine Design, Vol. 37, pp. 151-157, 1965
10 Furukawa, E., Mizuno , M. and Hojo, T., 'A twin-type piezo-driven translation mechanism,' JSPE, Vol. 28, No.1, pp. 70-75, 1994
11 Tseytlin, Y. M., 'Notch flexure hinges: An effective theory,' Rev. Sci. Instrum., Vol. 73, No. 9, pp. 3363-3368, September, 2002   DOI   ScienceOn