Design and Analysis of Two-Axis Stage Driven by Piezoelectric elements

피에조 구동형 2축 스테이지의 설계 및 해석

Piezoelectric elements driven ultra-precision stages have been used for high accuracy, fast response and high load rapacity. which are allowable to apply the stages to AFMs. Most of the piezoelectric driven stages are guided by flexure hinges for force transmission and mechanical amplification. However the flexure hinge mechanisms cause lack of position accuracy due to coupled and parasitic motions. Hence it is important that the mechanism design of the stage is focused on the stiffness of the flexure hinges to accomplish fast response and hish accuracy without the coupled and parasitic motions. In this study, some constraints for optimal design of a piezoelectric elements driven stage and a design method are proposed. Next, an optimal design is carried out using mathematical calculation. Finally the designed results are verified by FEM.