• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.1230-1233
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• 2004

Ozone is useful oxidizing gas for the fabrication of oxide thin films. Accordingly researching on oxidizing gas is required. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at $825^{\circ}C$.

• 대한전자공학회논문지
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• 제22권4호
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• pp.44-50
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• 1985

본 논문은 YTR servo계의 위상을 제어하는 위상제어용 집적회로의 설계및 제작에 대하여 기술한다. 6μm 설계법칙을 적용하여 설계하였으며 ?의 크기는 3.6×3.55mm²이다. SBC공정, analog-compatible I2L공정및 이중금속배선공정을 이용하여 집적회로를 제작하였다. 그 결과 D.C특성및 위상제어기능이 만족스러운 직접회로의 제작에 성공하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.945-949
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• 2003

LIGA(Lithographie Galvanoformung Abformung), a fabrication method for the production of microstructrues with a high aspect ratio, is now playing an important role in a fabrication of polymeric optical waveguide device as the replication processes have been developed such as hot embossing and injection molding. The present report deals with the fabrication of Ni master used for the replication of multi-mode polymeric optical waveguide. With the basic technological features in the sequence of the LIGA technique, we fabricated Ni master with 12 channel microstructures of $100\;{\times}\;100{\mu}m\;^2{\times}\;60mm$, and achieved an accuracy of ${\pm}1\;{\mu}m$. Manufactured polymeric optical wavegude with the same using hot embossing process has also the same accuracy and approved its mass production capability.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.910-913
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• 2000

In this research we investigate geometric issues involved while using a particular rapid prototyping system, called Stereolithography(SLA). SLA create prototypes layer by layer, each layer being formed by scanning a laser beam across the x, y surface of a vat of liquid monomer mix. The performance of SLA is influenced by orientation and layer thickness of designed fabrication. The number of layer and the area needed support is influenced by the orientation and layer thickness of designed fabrication. The step influence and volume error is influenced by slice thickness. We minimize the support are, the number of layer and cusp height. These variables of fabrication is minimized using genetic algorithm. The time for genetic algorithm is as little as we can accept. So we calculate support area and cusp height simply.

• 대한기계학회논문집A
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• 제25권3호
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• pp.443-451
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• 2001

This paper addresses an on-line scheduling method for track systems in semiconductor fabrication. A track system is a clustered equipment performing photolithography process in semiconductor fabrication. Trends toward high automation and flexibility in the track systems accelerate the necessity of the intelligent controller that can guarantee reliability and optimize productivity of the track systems. This paper proposes an-efficient on-line scheduling method that can avoid deadlock inherent to track systems and optimize the productivity. We employ two procedures for the on-line scheduling. First, we define potential deadlock set to apply deadlock avoidance policy efficiently. After introducing the potential deadlock set, we propose a deadlock avoidance policy using an on-line Gantt chart, which can generate optimal near-optimal schedule without deadlock. The proposed on-line scheduling method is shown to be efficient in handling deadlock inherent to the track systems through simulation.

• 대한기계학회논문집A
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• 제33권1호
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• pp.64-71
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• 2009

In this paper, a study on low-velocity impact response of honeycomb sandwich panels was done for the changes of impact location and core fabrication angles. The test specimens were made of glass/epoxy laminate facesheet and aluminum honeycomb core. Square samples of 100mm and 100mm sides were subjected under low-velocity impact loading using instrumented testing machine at three energy levels. Impact parameters like maximum force, time to maximum force, deflection at maximum force and absorbed energy were evaluated and compared for the changes of impact location and core fabrication angle. The impact damage size were measured at facesheet surface by 3-Dimensional scanner. Also, sandwich specimens after impact test were cut to analyse the failure mode.

• 대한기계학회논문집A
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• 제31권1호
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• pp.50-54
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• 2007

Nickel nano and microstructures are fabricated with simple process. The fabrication process consists of nickel deposition, lithography, nickel ion etching and plasma ashing. Well-aligned nickel nanowalls and nickel self-encapsulated microchannels were fabricated. We found that the ion etching condition as a key fabrication process of nickel nanowalls and self-encapsulated microchannels, i.e., 40 sccm Ar flow, 550 W RF power, 15 mTorr working pressure, and $20^{\circ}C$ water cooled platen without using He backside cooling unit and with using it, respectively. We present the experimental results and discuss the formational conditions and the effect of nickel redeposition on the fabrication of nickel nano and microstructures.

• 대한전자공학회논문지
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• 제25권6호
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• pp.637-646
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• 1988

The CMOS physical parameters are extracted using by processing models in fabrication steps, processing parameters, fabrication disturbances, control parameters. Statistical CMOS process and device simulator is proposed to evaluate the effect of inherent fluctuations in IC fabrication. Using this simulator, we perform worst case analysis in terms of statistically independent disturbances and compare this proposed method to Monte Carlo method, previous Worst Case method. And simulation results with this proposed method are more accurate than the past worst case analysis. This package is written in C language and runs on a IBM PC AT(OPUS).

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.298-298
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• 2000

This paper presents the optimization technique to analyze the effect of the design parameters of rapid prototyping system for human brain model fabrication. The optimization method considers the functional relationships among the design parameters such as thickness gap, shrink rate, and laser speed that govern the operation of fabrication system. This paper applies a discrete optimization technique as the optimization method to determine the dominant parameter values. Additional study includes manner of complement surface image of ellipse which approximates the brain model using the adaptive slicing and the offset contour. According to the parameters tuning and interaction of effect, more suitable parameter values can be obtained by enhanced 3D brain model fabrication.

• 한국정밀공학회지
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• 제29권6호
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• pp.686-692
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• 2012

Solid free-form fabrication (SFF) technology was developed to fabricate three-dimensional (3D) scaffolds for tissue engineering (TE) applications. In this study, we developed a polymer deposition system (PDS) and created 3D microstructures using a bioresorbable polycaprolactone (PCL) polymer. Fabrication of 3D scaffolds by PDS requires a combination of several devices, including a heating system, dispenser, and motion controller. The system can process a polymer with extremely high precision by using a 200 ${\mu}m$ nozzle. Based on scanning electron microscope (SEM) images, both the line width and the piled line height were fine and uniform. Several 3D micro-structures, including the ANU pattern (a pattern named after Andong National University), $45^{\circ}$ pattern square, frame, cylindrical, triangular, cross-shaped, and hexagon, have been fabricated using the polymer deposition system.