• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2092-2094
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• 2000

As a next generation lithography (NGL) technology for VLSI semiconductor fabrication, electron beam, ion beam, X-ray and extreme ultraviolet(EUV) are considered as possible candidates. Among these methods, EUV lithography(EUVL) is thought to be the most probable because it is easily realized by improving current optical lithography technology. In order to set EUV radiation which can be applied to EUVL, it is essential to generate very high density and high temperature plasma stably. The method using a pulse power laser and a high voltage pulse discharge is commonly used to accomplish such a high density and high temperature plasma. In this paper we review the recent trends of the EUV generation technique by high density and high temperature plasma.

• 천문학회보
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• 제37권2호
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• pp.131.1-131.1
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• 2012

We use three-dimensional magnetohydrodynamic (MHD) simulations of flux emergence from solar subsurface to corona. In our previous work, we reported the relation between magnetic-field configuration and the flux expansion factor. Following these results, we investigate where an upflow is generated in an active region and how its location is related to the flux expansion factor. We also derive physical quantities of a real active region from observation data provided by Nobeyama Radioheliograph (NoRH), X-Ray Telescope (XRT), and Extreme Ultraviolet Imaging Spectrometer (EIS) onboard Hinode. These physical quantities are plasma density, temperature and flow. By comparing the simulation result and observational one, we will discuss the properties of the location producing a solar wind.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.332-332
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• 2011

The extreme ultraviolet (EUV) radiation, whose wavelength is from 120 nm down to 10 nm, and the energy from 10 eV up to 124 eV, is widely utilized such as in photoelectron spectroscopy, solar imaging, especially in lithography and soft x-ray microscopy. In this study, we have investigated the plasma diagnostics as well as the debris characteristics between the two types of dense plasma focusing devices with coaxial electrodes of Mather and hypocycloidal pinch (HCP), respectively. The EUV emission intensity, electron temperature and plasma density have been investigated in these cylindrical focused plasma along with the debris characteristics. An input voltage of 5 kV has been applied to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas at pressure ranged from 1 mTorr and 180 mTorr. The inner surface of the cathode was covered by polyacetal insulator. The central anode electrode has been made of tin. The wavelength of the EUV emission has been measured to be in the range of 6~16 nm by a photo-detector (AXUV-100 Zr/C, IRD). The visible emission has also been measured by the spectrometer with the wavelength range of 200~1,100 nm. The electron temperature and plasma density have been measured by the Boltzmann plot and Stark broadening methods, respectively, under the assumption of local thermodynamic equilibrium (LTE).

• Korean Chemical Engineering Research
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• 제58권4호
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• pp.624-634
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• 2020

The ability of natural and modified clay to adsorb phenol was studied. The clay samples were analyzed by different technical instruments, such as X-ray fluorescence (XRF), X-ray diffraction (XRD) and FT-IR spectroscopy. Surface area, pore volume and average pore diameter were also determined using B.E.T method. Up to 73 and 99% of phenol was successfully adsorbed by natural and activated clay, respectively, from the aqueous solution. The experiments carried out show that the time required to reach the equilibrium of phenol adsorption on all the samples is very close to 60 min. The amount of phenol adsorbed shows a declining trend with higher pH as well as with lower pH, with most extreme elimination of phenol at pH 4. The adsorption of phenol increases proportionally with the initial phenol concentration. The maximum adsorption capacity at 25 ℃ and pH 4 was 29.661 mg/g for modified clay (NaMt). However, the effect of temperature on phenol adsorption was not significant. The simple modification causes the formation of smaller pores in the solid particles, resulting in a higher surface area of NaMt. The equilibrium results in aqueous systems were well fitted by the Freundlich isotherm equation (R² > 0.98). Kinetic studies showed that the adsorption process is best described by the pseudo-second-order kinetics (R² > 0.99). The adsorption of phenol on natural and modified clay was spontaneous and exothermal.

• 천문학회보
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• 제37권1호
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• pp.32.2-32.2
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• 2012

Gamma Ray Bursts (GRBs) are the most energetic events in the universe, and are known to arise from the death of massive stars in many cases. Their extreme brightness makes it possible to detect them at very high redshift (z > 6.5), well into the epoch of re-ionization, providing us with an opportunity to investigate the deaths of the first stars when the universe was much younger than 1 Gyr. Here, we report the discovery of GRB 100905A, a GRB at $z$ - 7.5 (age of the universe at 700 Myr). Our observation revealed a strong spectral break between z and J band, allowing us to estimate its photometric redshift. Its gamma-ray light curve shows a very short duration of about 0.7 sec, the shortest duration event at z > 5. Investigation of this and three other known GRBs at z > 6.5 reveals that they are all short duration bursts. This is puzzling, considering that GRBs from death of massive stars do not show short duration. We suggest two possible explanations for this: (i) the BAT light curves of the high redshift GRBs suffered from observational selection effect where we are only observing the very tip of the light curve; (ii) the stars in the early universe had a peculiar nature that are different from ordinary stars at lower redshifts.

• Nuclear Engineering and Technology
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• 제52권10호
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• pp.2320-2327
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• 2020

The extreme hydrophobicity of expanded polytetrafluoroethylene (ePTFE) hinders bone-tissue integration, thus limiting the use of ePTFE in medical implant applications. To improve the potential of ePTFE as a biomaterial, 2-hydroxyethyl methacrylate (HEMA) was grafted onto the ePTFE surface using the gamma irradiation technique. The characteristics of the grafted ePTFE were successfully evaluated using attenuated total reflectance Fourier transform infrared (ATR-FTIR), field-emission scanning electron microscopy (FESEM)/energy dispersive X-ray (EDX), and X-ray photoelectron spectroscopy (XPS). Under the tensile test, the modified ePTFE was found to be more brittle and rigid than the untreated sample. In addition, the grafted ePTFE was less hydrophobic with a higher percentage of water uptake compared to the untreated ePTFE. The protein adsorption test showed that grafted ePTFE could adsorb protein, which was denoted by the presence of N peaks in the XPS analysis. Moreover, the formation of the globular mineral on the grafted ePTFE surface was successfully visualized using the FESEM analysis, with a ratio of 1.94 for Ca:P minerals by the EDX. To summarize, the capability of the modified ePTFE to show protein adsorption and mineralization indicates the improvement of the polymer properties, and it can potentially be used as a biomaterial for implant application.

• Nuclear Engineering and Technology
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• 제52권6호
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• pp.1252-1258
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• 2020

This study explores the ability of non-destructive assay techniques to detect a partial material defect in which 100 g of plutonium are diverted from the center of a 1000 g can of PuO₂ powder. Four safeguards measurements techniques: neutron multiplicity counting, calorimetry, gravimetry, and gamma ray spectroscopy are used in an attempt to detect the defect. Several materials are added to the partial defect PuO₂ can to replicate signatures of the diverted material. ²⁵²Cf is used to compensate for the doubles neutron counts, ²⁴¹Am is used to compensate for the decay heat, and aluminum is used to compensate for the weight. Although, the doubles and triples difference before and after diversion are statistically indistinguishable with the AWCC in fast and thermal mode, the difference in the singles counts are statistically detectable in both modes. The relatively short half-life of ²⁵²Cf leads to a decrease (three sigma uncertainty) in the doubles neutron counts after 161 days. Combining this with the precise quantity of ²⁴¹Am needed (10.7 g) to mimic the heat signature and the extreme precision in ²⁵²Cf mass needed to defeat neutron multiplicity measurements gives reassurance in the International Atomic Energy Agency's ability to detect partial material defects.

• 대한기계학회논문집A
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• 제27권3호
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• pp.381-386
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• 2003

Gradually engineering designers are determined based on computer simulations. Modeling of the computer simulation however is too expensive and time consuming in a complicate system. Thus, designers often use approximation models called metamodels, which represent approximately the relations between design and response variables. There arc general metamodels such as response surface model and kriging metamodel. Response surface model is easy to obtain and provides explicit function. but it is not suitable for highly nonlinear and large scaled problems. For complicate case, we may use kriging model that employs an interpolation scheme developed in the fields of spatial statistics and geostatistics. This class of into interpolating model has flexibility to model response data with multiple local extreme. In this study. metamodeling techniques are adopted to carry out the shape optimization of a funnel of Cathode Ray Tube. which finds the shape minimizing the local maximum principal stress Optimum designs using two metamodels are compared and proper metamodel is recommended based on this research.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.124-124
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• 2010

Currently, extreme ultraviolet lithography (EUVL) is being investigated for next generation lithography. EUVL is one of competitive lithographic technologies for sub-22nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance due to the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore, new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• 한국재료학회지
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• 제27권10호
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• pp.552-556
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• 2017

Evaluation of the durability and stability of materials used in power plants is of great importance because parts or components for turbines, heat exchangers and compressors are often exposed to extreme environments such as high temperature and pressure. In this work, high-temperature corrosion behavior of 316 L stainless steel in a carbon dioxide environment was studied to examine the applicability of a material for a supercritical carbon dioxide Brayton cycle as the next generation power plant system. The specimens were exposed in a high-purity carbon dioxide environment at temperatures ranging from 500 to $800^{\circ}C$ during 1000 hours. The features of the corroded products were examined by optical microscope and scanning electron microscope, and the chemical compound was determined by x-ray photoelectron spectroscopy. The results show that while the 316 L stainless steel had good corrosion resistance in the range of $500-700^{\circ}C$ in the carbon dioxide environment, the corrosion resistance at $800^{\circ}C$ was very poor due to chipping the corroded products off, which resulted in a considerable loss in weight.