• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.464-467
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• 1997

In this paper, a high precision track following control algorithm is proposed for micro electrostatic actuator considering of the application for hard disk drive. The micro electrostatic actuator proposed has nonlinear voltage-displacement characteristic in a working range of 0.8.mu.m and has uni-directional movement. Mid range reference and open-loop bias are proposed for the revision of negative position error, and inverse model for linearization.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.5
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• pp.249-252
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• 2001

The paper represents the design and fabrication of an electrostatic micro actuator with $p^+$,/TEX> Si cantilevers. The micro actuator consists of a plate suspended by four $p^+$,/TEX> silicon cantilevers and an electrode on a glass substrate. The $p^+$,/TEX> Si structure is fabricated by the boron diffusion process and the anisotropic wet etch process. The cantilevers of the micro actuator curl down because of the residual stress gradient in $p^+$,/TEX> silicon. When the electrostatic forec is applied to the $p^+$,/TEX> cantilevers, the vertical displacement of the plate can be achieved. The deflection of the cantilever due to the residual stress gradient and the vertical displacement by electrostatic force were calculated. The displacement of the plate was measured with a laser displacement meter for various input voltages and frequencies. The feasibility of the proposed micro actuator for the applications to optical pickup devices or optical communication devices was confirmed by the experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.848-853
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• 2001

Electrostatic actuation was adopted for ease of fabrication. We proposed a new driving scheme that uses the vector sum of force generated by comb-finger and by parallel plate. The moving and fixed electrodes are arranged to maximize the driving force. In this paper, an electrostatic field analysis is performed by Maxwell analysis tool for micro actuators. From the analysis, a comb-parallel type micro-actuator with 4${\mu}{\textrm}{m}$ width, 6${\mu}{\textrm}{m}$ overlap and 45${\mu}{\textrm}{m}$ height could be designed. In order to compare the new type of actuator with the conventional comb type of actuator, we arranged that both types have the same area and the same number of actuators. To make a high aspect ratio structure, we are developing fabrication process using SU-8 and electro-plating.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.1
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• pp.55-59
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• 2003

With the progress of optical communication technology recently, the development of micro actuator using MEMS technology has been made for optical switching. The actuation types are various; electrostatic, electromagnetic, and electrostatic +electromagnetic etc. Among them, the electrostatic type is the most popular because of the relative ease of fabrication, integration and shielding as well as low power consumption. However, it needs a high voltage to generate a larger driving force. To overcome this problem, we proposed a new type of electrostatic actuator with an extra vertical electrode in addition to the horizontal one. The vertical electrode also lays a role of making the stable angular rotation as a stopper. From the theoretical analysis and experiment, we find the actuation voltage can be reduced up to 50 % of that of the conventional one.

• Proceedings of the KSME Conference
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• 2001.06a
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• pp.854-859
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• 2001

An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the electrostatic force and the displacement at the equilibrium. A staggered algorithm is employed to perform the coupled analysis of the electrostatic and elastic fields. The stiffness matrix of the actuator is modified at this equilibrium state. The displacement field is perturbed using an eigenmode profile of the actuator. The configuration change of the actuator due to perturbation modifies the electrostatic field and thus the electrostatic force. The equivalent stiffness matrix corresponding to the perturbation and the change in the electrostatic force is then added to stiffness matrix in order to explain natural frequency shifting. The numerical examples are presented and compared with the experiments in the literatures.

• The Transactions of the Korean Institute of Electrical Engineers A
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• v.48 no.6
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• pp.773-780
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• 1999

A digital tracking controller is proposed for micro electrostatic actuator with input nonlinearity, where disturbance observer is utilized in cooperation with inverse function. Generally the disturbance observer is announced to be robust to modeling uncertainty, and external disturbance. But, when the nonlinearity exists in the systems, the disturbance observer may not directly be applied to that system, because the nonlinearity may destabilize the overall system. Therefore, first, we linearize the nonlinear input characteristics of micro electrostatic actuator by the use of inverse function. Secondly, we apply disturbance observer to approximately linearized system for eliminating the residuals of nonlinearity and the modeling uncertainty. Then, we get the good properties of the disturbance rejection as well as the robustness due to the own nature of disturbance observer. In this case, we propose a sufficient condition for the robust stability of overall systems. Furthermore, we discuss the problem that may be exposed when disturbance observer is applied to the internally stable system with saturation, and analyze two methods to overcome input saturation problem in the sense of internal stability. Simulations have been carried out to show the effectiveness of the proposed controller.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.1
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• pp.115-121
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• 2005

Micromachines are extremely novel artifacts with a variety of special characteristics. Utilizing their tiny dimensions ranging roughly from 10 to $10^3$ micro-meters, the micromachines can perform tasks in a revolutionary manner that would be impossible for conventional artifacts. Micromachines are in general related to various coupled physical phenomena. They are required to be evaluated and designed considering the coupled phenomena. This paper describes finite element analysis (FEA) simulation of practical behaviors for the micro actuator. Especially, electric field modeling in micro actuators has been generally restricted to in-plane two-dimensional finite element analysis because of the complexity of the micro actuator geometry. However, in this paper, the actual three-dimensional geometry of the micro actuator is considered. The starting torque obtained from the in-plane two-dimensional analytical solutions were compared with that of the actual three-dimensional FE analysis results. The starting torque is proportional to $V^2$, and that the two-dimensional analytical solutions are larger than the three- dimensional FE ones. It is found that the evaluation of micro actuator has to be considered electrical leakage phenomenon.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.711-715
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• 1996

This paper describes an automated computer-aided engineering (CAE) system for micromachines whose size range 10 to 10$^3$${\mu}{\textrm}{m}$. An automatic finite element mesh generation technique, which is based on the fuzzy knowledge processing and computational geometry techniques, is incorporated into the system, together with one of commercial finite clement (FE) analysis codes, MARC, and one of commercial solid modelers, Designbase. The system allows a geometry model of concern to be a automatically converted to different FE models, depending on physical phenomena to be analyzed, i.e. electrostatic analysis, stress analysis, modal analysis and so on. The FE analysis models are then exported to the FE analysis code, and then analyses are performed. This system is successfully applied to an electrostatic micro actuator.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.11
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• pp.1796-1801
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• 2001

For micro-machines, very few design methodologies based on optimization hale been developed so far. To overcome the difficulties of design optimization of micro-machines, the search method for multi-dimensional design window (DW)s is proposed. The proposed method is defined as areas of satisfactory design solutions in a design parameter space, using both continuous evolutionary algorithms (CEA) and the modified K-means clustering algorithm . To demonstrate practical performance of the proposed method, it was applied to an optimal shape design of micro electrostatic actuator of optical memory. The shape design problem has 5 design parameters and 5 objective functions, and finally shows 4 specific design shapes and design characters based on the proposed DWs.

• Proceedings of the KIEE Conference
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• 1994.07a
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• pp.141-143
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• 1994

In this paper, an electrostatic micro-actuator is fabricated using flat p+ diaphragm. To avoid the buckling of the flat p+ diaphragm, the processes are designed appropriately. The fabrication processes of the actuator are the anisotropic etching with EPW, the boron diffusion process, Al deposition and the silicon to glass bonding using the negative photoresist. The distance between the p+ and Al electrodes is $10{\mu}m$, and the thickness of the p+ diaphragm is $2{\mu}m$. The measurement of the characteristic of the actuator is performed at 50V. The center displacement of the diaphragm is $1.5{\mu}m$ at 10Hz. In comparison with the experimental data of the actuator with corrugated diaphragm, it is confirmed that the actuator with flat diaphragm is more effective than that with corrugated one in the small deflection region.