High precision tracking contorl algorithm for micro electrostatic actuator with nonlinearity

Nonlinearity를 갖는 Micro Electorstatic Actuator의 초정밀 추종제어

In this paper, a high precision track following control algorithm is proposed for micro electrostatic actuator considering of the application for hard disk drive. The micro electrostatic actuator proposed has nonlinear voltage-displacement characteristic in a working range of 0.8.mu.m and has uni-directional movement. Mid range reference and open-loop bias are proposed for the revision of negative position error, and inverse model for linearization.