Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.07a
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- Pages.141-143
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- 1994
Fabrication of an Electrostatic Micro Actuator Using p+ Diaphragm As an Electrode
p+ 박막을 전극으로 한 정전형 마이크로 구동기의 제작
- Han, Sang-Woo (Dept. of Control and Instrumentation Eng., AJOU University) ;
- Yang, Eui-Hyeok (Dept. of Control and Instrumentation Eng., AJOU University) ;
- Yang, Sang-Sik (Dept. of Control and Instrumentation Eng., AJOU University)
- Published : 1994.07.21
Abstract
In this paper, an electrostatic micro-actuator is fabricated using flat p+ diaphragm. To avoid the buckling of the flat p+ diaphragm, the processes are designed appropriately. The fabrication processes of the actuator are the anisotropic etching with EPW, the boron diffusion process, Al deposition and the silicon to glass bonding using the negative photoresist. The distance between the p+ and Al electrodes is
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