한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2001년도 춘계학술대회 논문집
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- Pages.848-853
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- 2001
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- 2005-8446(pISSN)
높은 세장비의 Comb-parallel 타입 마이크로 액츄에이터의 개발
Development of a Comb-parallel Type Micro Actuator with High Aspect Ratio
초록
Electrostatic actuation was adopted for ease of fabrication. We proposed a new driving scheme that uses the vector sum of force generated by comb-finger and by parallel plate. The moving and fixed electrodes are arranged to maximize the driving force. In this paper, an electrostatic field analysis is performed by Maxwell analysis tool for micro actuators. From the analysis, a comb-parallel type micro-actuator with 4
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