Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Shape Design of Micro Electrostatic Actuator using Multidimensional Design Windows

다차원 설계윈도우 탐색법을 이용한 마이크로 액추에이터 형상설계

  • Jeong, Min-Jung (Dept.of Mechanical Design, Graduate School of Sungkyunkwan University) ;
  • Kim, Yeong-Jin (Dept.of Mechanical Engineering, Sungkyunkwan University) ;
  • Daisuke Ishihara (Dept. of Quantum Engineering and System Science The University of Tokyo) ;
  • Yoshimura, Shinobu (Institute of Environmental Studies The University of Tokyo) ;
  • Yagawa, Genki (Dept. of Quantum Engineering and System Science The University of Tokyo)
  • Published : 2001.11.01
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Abstract

For micro-machines, very few design methodologies based on optimization hale been developed so far. To overcome the difficulties of design optimization of micro-machines, the search method for multi-dimensional design window (DW)s is proposed. The proposed method is defined as areas of satisfactory design solutions in a design parameter space, using both continuous evolutionary algorithms (CEA) and the modified K-means clustering algorithm . To demonstrate practical performance of the proposed method, it was applied to an optimal shape design of micro electrostatic actuator of optical memory. The shape design problem has 5 design parameters and 5 objective functions, and finally shows 4 specific design shapes and design characters based on the proposed DWs.

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References

  1. Folkmer, B., Siber, A., Grobse Bley, W., Sandmaier, H. and Lang, W., 1999, 'Improved Simulation for Strongly Coupled Micro-electro-mechanical Systems : Resonant Vaccum Sensor Optimization,' Sensors and Actuators A : Physical, Volume 74, Issues 1-3, pp. 190-192 https://doi.org/10.1016/S0924-4247(98)00336-7
  2. Nagler, O., Trost, M., Hillerich, B. and Kozlowski, F., 1998, 'Efficient Design and Optimization of MEMS by Intergrating Commercial Simulation Tools,' Sensors and Actuators A: Physical, Volume 66, Issues 1-3, pp. 15-20 https://doi.org/10.1016/S0924-4247(98)00052-1
  3. Haronian, D., 1995, 'Maximizing Microelectromechanical Sensor and Actuator Sensitivity by Optimizing Geometry,' Sensors and Actuators A: Physical, Volume 50, Issue 3, pp. 223-236 https://doi.org/10.1016/0924-4247(96)80111-7
  4. 권대갑, 이문구, 1997, '광픽업 미세구동부의 최적설계,' 대한기계학회, 대한기계학회논문집(A), 제21권, 제5호, pp. 819-827
  5. Furukawa, T., and Yagawa, G., 1995, 'Genetic Algorithms for Real Search Space and Their Use for Nonlinear Inverse Problems,' Transactions of Japan Society of Mechanical Engineers, Vol. 61A, pp. 1409-1415
  6. Lee, J.S., Yoshimura, S., Yagawa, G. and Shibaike, N., 1995, 'A CAE System for Micromachines: Its Application to Electrostatic Micro Wobble Actuator,' Sensors and Actuators A : Physical, Volume 50, pp. 209-221 https://doi.org/10.1016/0924-4247(96)80110-5
  7. Yoshimura, S., Furukawa, T., Kowalezyk, T. and Yagawa, G., 1997, 'An Automated CAE System for Multidisclipinary Structural Design and Its Application to Microaccelerometer Design,' Transactions of Japan Society of Materials Engineers, Vol. 62C, pp. 2173-2180
  8. http://www.nedo.go.jp
  9. Mochizuki, Y., Yoshimura, S. and Yagawa, G., 1997, 'Automated System for Structural Design using Design Window Search Method: Its Application to Fusion First Wall Design,' Advances in Engineering Software, Vol. 28, pp. 103-113 https://doi.org/10.1016/S0965-9978(96)00049-X
  10. Jane, A. J. and Dubes, R. C., 1988, Algorithm for Clustering Data, Prentice-Hall, Inc.
  11. 남원우, 이상조, 1993, '퍼지 클러스터링과 스트링 매칭을 통합한 형상 인식법,' 대한기계학회, 대한기계학회논문집, 제17권, 제11호, pp. 2711-2922
  12. Esogbue, A. O. and Liu, B., 1999, 'Cluster Validity for Fuzzy Criterion Clustering,' Computer and Mathematics with Application, Vol. 37, pp. 95-100 https://doi.org/10.1016/S0898-1221(99)00147-9
  13. Kowalczyk, T., Yoshimura, S. and Yagawa, G., 1997, 'Integrated CAE System for Micro-machine Design,' Conference on Compulational Engineering and Science, Vol. 2, pp. 547-550
  14. Ishihara, D., Yoshimura, S. and Yagawa, G., 1999, 'Automated Design for Micro-machine of Optical Memory,' JSME Design and Systems Conference'99, No. 99-27, pp. 70-73