Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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FEA Simulation for Practical Behaviors of Electrostatic Micro Actuator

마이크로 액추에이터의 실제 거동에 대한 FEA 시뮬레이션

  • 이양창 (경기대학교 대학원 기계공학과) ;
  • 이준성 (경기대학교 기계시스템디자인공학부)
  • Published : 2005.01.01
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Abstract

Micromachines are extremely novel artifacts with a variety of special characteristics. Utilizing their tiny dimensions ranging roughly from 10 to $10^3$ micro-meters, the micromachines can perform tasks in a revolutionary manner that would be impossible for conventional artifacts. Micromachines are in general related to various coupled physical phenomena. They are required to be evaluated and designed considering the coupled phenomena. This paper describes finite element analysis (FEA) simulation of practical behaviors for the micro actuator. Especially, electric field modeling in micro actuators has been generally restricted to in-plane two-dimensional finite element analysis because of the complexity of the micro actuator geometry. However, in this paper, the actual three-dimensional geometry of the micro actuator is considered. The starting torque obtained from the in-plane two-dimensional analytical solutions were compared with that of the actual three-dimensional FE analysis results. The starting torque is proportional to $V^2$, and that the two-dimensional analytical solutions are larger than the three- dimensional FE ones. It is found that the evaluation of micro actuator has to be considered electrical leakage phenomenon.

Keywords

References

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