• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.464-467
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• 1997

In this paper, a high precision track following control algorithm is proposed for micro electrostatic actuator considering of the application for hard disk drive. The micro electrostatic actuator proposed has nonlinear voltage-displacement characteristic in a working range of 0.8.mu.m and has uni-directional movement. Mid range reference and open-loop bias are proposed for the revision of negative position error, and inverse model for linearization.

• Proceedings of the KSME Conference
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• 2001.06a
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• pp.854-859
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• 2001

An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the electrostatic force and the displacement at the equilibrium. A staggered algorithm is employed to perform the coupled analysis of the electrostatic and elastic fields. The stiffness matrix of the actuator is modified at this equilibrium state. The displacement field is perturbed using an eigenmode profile of the actuator. The configuration change of the actuator due to perturbation modifies the electrostatic field and thus the electrostatic force. The equivalent stiffness matrix corresponding to the perturbation and the change in the electrostatic force is then added to stiffness matrix in order to explain natural frequency shifting. The numerical examples are presented and compared with the experiments in the literatures.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.1
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• pp.55-59
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• 2003

With the progress of optical communication technology recently, the development of micro actuator using MEMS technology has been made for optical switching. The actuation types are various; electrostatic, electromagnetic, and electrostatic +electromagnetic etc. Among them, the electrostatic type is the most popular because of the relative ease of fabrication, integration and shielding as well as low power consumption. However, it needs a high voltage to generate a larger driving force. To overcome this problem, we proposed a new type of electrostatic actuator with an extra vertical electrode in addition to the horizontal one. The vertical electrode also lays a role of making the stable angular rotation as a stopper. From the theoretical analysis and experiment, we find the actuation voltage can be reduced up to 50 % of that of the conventional one.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.5
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• pp.249-252
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• 2001

The paper represents the design and fabrication of an electrostatic micro actuator with $p^+$,/TEX> Si cantilevers. The micro actuator consists of a plate suspended by four $p^+$,/TEX> silicon cantilevers and an electrode on a glass substrate. The $p^+$,/TEX> Si structure is fabricated by the boron diffusion process and the anisotropic wet etch process. The cantilevers of the micro actuator curl down because of the residual stress gradient in $p^+$,/TEX> silicon. When the electrostatic forec is applied to the $p^+$,/TEX> cantilevers, the vertical displacement of the plate can be achieved. The deflection of the cantilever due to the residual stress gradient and the vertical displacement by electrostatic force were calculated. The displacement of the plate was measured with a laser displacement meter for various input voltages and frequencies. The feasibility of the proposed micro actuator for the applications to optical pickup devices or optical communication devices was confirmed by the experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.848-853
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• 2001

Electrostatic actuation was adopted for ease of fabrication. We proposed a new driving scheme that uses the vector sum of force generated by comb-finger and by parallel plate. The moving and fixed electrodes are arranged to maximize the driving force. In this paper, an electrostatic field analysis is performed by Maxwell analysis tool for micro actuators. From the analysis, a comb-parallel type micro-actuator with 4${\mu}{\textrm}{m}$ width, 6${\mu}{\textrm}{m}$ overlap and 45${\mu}{\textrm}{m}$ height could be designed. In order to compare the new type of actuator with the conventional comb type of actuator, we arranged that both types have the same area and the same number of actuators. To make a high aspect ratio structure, we are developing fabrication process using SU-8 and electro-plating.

• The Journal of Korea Robotics Society
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• v.16 no.1
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• pp.12-16
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• 2021

Attempts are being made to provide various tactile feedbacks to user. In particular, a variety of soft actuators are being inserted into the tactile feedback device to give a more flexible, soft and strong stimulation. In this study, a basic study was performed to utilize a hydraulically amplified self-healing electrostatic (HASEL) actuator as a tactile feedback actuator. The HASEL actuator showed great displacement and force with a simple circuit configuration. In particular, by making the actuator in a circular shape, the angle was reduced and the electrode was arranged in a ring shape to maximize the displacement of the central part. As a result, the HASEL actuator showed a displacement difference according to the input waveform. In addition, in order to use it safely as an actuator for tactile feedback, we covered the surface with silicone and confirmed that the actuator works well. Using these actuators, it will be possible to manufacture a lightweight, portable tactile feedback device.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.3
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• pp.65-70
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• 2008

Capacitive position sensing with modulation technique is widely used in electrostatic actuator applications. To maximize the electrostatic force and the position-sensing gain, capacitors for driving and capacitors for sensing are shared, i.e, after applying the driving voltage with high-frequency modulating signals using op amps, the position is demodulated from the modulated signal. In high-voltage applications, however, low bandwidth of a high-voltage op amp hinders adding the high-frequency modulating signal to the driving voltage. In this paper, new and very simple driving and sensing method is proposed, in which the pulse-width modulated driving voltage eliminates the need of the high-frequency modulating signal for position sensing. This new algorithm is proved by the simulation results using Matlab/SIMULINK.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.4
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• pp.448-452
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• 2004

The micromachined variable optical attenuator(VOA) was presented in the paper. The VOA has two single mode fiber(SMF) aligned with free space and symmetric parallel plate actuator with microshutter, which can control a amount of light by driving the actuator. In the paper, analysis on driving performances of the VOA was performed and can be reduced threshold voltage through the decreasing displacement actuating range. This paper presents a VOA that is fabricated using bosch deep silicon etching process with silicon on insulator(SOD wafer. The VOA consists of driving electrode, ground electrode, actuating microshutter, and mechanical stopper. In this VOA, actuating shutter is driven by electrostatic force and the threshold voltage is close to 28V, 46V come along with the spring width of 5${\mu}{\textrm}{m}$, 7${\mu}{\textrm}{m}$ respectively. Attenuation range is measured from 2.4㏈ to 16.7㏈.

• The Transactions of the Korean Institute of Electrical Engineers A
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• v.48 no.6
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• pp.773-780
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• 1999

A digital tracking controller is proposed for micro electrostatic actuator with input nonlinearity, where disturbance observer is utilized in cooperation with inverse function. Generally the disturbance observer is announced to be robust to modeling uncertainty, and external disturbance. But, when the nonlinearity exists in the systems, the disturbance observer may not directly be applied to that system, because the nonlinearity may destabilize the overall system. Therefore, first, we linearize the nonlinear input characteristics of micro electrostatic actuator by the use of inverse function. Secondly, we apply disturbance observer to approximately linearized system for eliminating the residuals of nonlinearity and the modeling uncertainty. Then, we get the good properties of the disturbance rejection as well as the robustness due to the own nature of disturbance observer. In this case, we propose a sufficient condition for the robust stability of overall systems. Furthermore, we discuss the problem that may be exposed when disturbance observer is applied to the internally stable system with saturation, and analyze two methods to overcome input saturation problem in the sense of internal stability. Simulations have been carried out to show the effectiveness of the proposed controller.

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.259-267
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• 2002

We present a novel 3D fabrication method with single X-ray process utilizing an X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures. 3D microstructures are revealed by development kinetics and modulated in-depth dose distribution in resist, usually PMMA. Fabrication of X-ray masks with integrated electrothermal xy-stage and electrostatic actuator is presented along with discussions on PMMA development characteristics. Both devices use $20-\mu\textrm{m}$-thick overhanging single crystal Si as a structural material and fabricated using deep reactive ion etching of silicon-on-insulator wafer, phosphorous diffusion, gold electroplating, and bulk micromachining process. In electrostatic devices, $10-\mu\textrm{m}-thick$ gold absorber on $1mm{\times}1mm$ Si shuttle mass is supported by $10-\mu\textrm{m}-wide$, 1-mm-long suspension beams and oscillated by comb electrodes during X-ray exposures. In electrothermal devices, gold absorber on 1.42 mm diameter shuttle mass is oscillated in x and y directions sequentially by thermal expansion caused by joule heating of the corresponding bent beam actuators. The fundamental frequency and amplitude of the electrostatic devices are around 3.6 kHz and $20\mu\textrm{m}$, respectively, for a dc bias of 100 V and an ac bias of 20 VP-P (peak-peak). Displacements in x and y directions of the electrothermal devices are both around $20{\;}\mu\textrm{m}$at 742 mW input power. S-shaped and conical shaped PMMA microstructures are demonstrated through X-ray experiments with the fabricated devices.