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Driving and Position Sensing Algorithm for an Electrostatic Actuator Using Pulse-width Modulation  

Min, Dong-Ki (삼성종합기술원 Semiconductor Device Lab.)
Jeon, Jong-Up (울산대학교 기계자동차공학부)
Publication Information
Transactions of the Korean Society of Machine Tool Engineers / v.17, no.3, 2008 , pp. 65-70 More about this Journal
Abstract
Capacitive position sensing with modulation technique is widely used in electrostatic actuator applications. To maximize the electrostatic force and the position-sensing gain, capacitors for driving and capacitors for sensing are shared, i.e, after applying the driving voltage with high-frequency modulating signals using op amps, the position is demodulated from the modulated signal. In high-voltage applications, however, low bandwidth of a high-voltage op amp hinders adding the high-frequency modulating signal to the driving voltage. In this paper, new and very simple driving and sensing method is proposed, in which the pulse-width modulated driving voltage eliminates the need of the high-frequency modulating signal for position sensing. This new algorithm is proved by the simulation results using Matlab/SIMULINK.
Keywords
Electrostatic actuator; Position sensor; Pulsewidth modulation;
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