• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.427-428
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.24 no.9
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• pp.95-102
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• 2007

The scanning electron microscope (SEM) is one of the most popular instruments available for the measurement and analysis of the micro/nano structures. It is equipped with an electron optical system that consists of an electron beam source, magnetic lenses, apertures, deflection coils, and a detector. The magnetic lenses playa role in refracting electron beams to obtain a focused spot using the magnetic field driven by an electric current from a coil. A SEM column usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present work concerns finite element analysis for the electron magnetic lenses so as to analyze their magnetic characteristics. To improve the performance of the magnetic lenses, the effect of the excitation current and pole-piece design on the amount of resulting magnetic fields and their peak locations are analyzed through the finite element analysis.

• Applied Microscopy
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• v.51
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• pp.1.1-1.2
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• 2021

We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO₃ grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO₃/crystalline SrTiO₃.

• Ceramist
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• v.22 no.4
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• pp.368-380
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• 2019

A ceramic is used as a key material in various fields. Accordingly, the use of scanning electron microscopy is increased for the purpose of evaluating the reliability and defects of advanced ceramic materials. The scanning electron microscope is developed to overcome the limitations of optical microscopy and uses accelerated electrons for imaging. Various signals such as SE, BSE and characteristic X-rays provide useful information about the surface microstructure of specimens and, the content and distribution of chemical components. The development of electron guns, such as FEG, and the improved lens system combined with the advanced in-lens detectors and STEM-in-SEM system have expanded the applications of SEM. Automated SEM-EDS analysis also greatly increases the amount of data, enabling more statistically reliable results. In addition, X-ray CT, XRF, and WDS, which are installed in scanning electron microscope, have transformed SEM a more versatile analytical equipment. The performance and specifications of the scanning electron microscope to evaluate ceramics were reviewed and the selection criteria for SEM analysis were described.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.11
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• pp.92-98
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• 2009

The scanning electron microscope (SEM) contains an electron optical system in which electrons are emitted and moved to form a focused beam, and generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present study covers the design and analysis of an objective lens for a thermionic SEM. A finite element (FE) analysis for the objective lens is performed to analyze its magnetic characteristics for various lens designs. Relevant beam trajectories are also investigated by tracing the ray path of the electron beams under the magnetic fields inside the objective lens.

• Applied Microscopy
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• v.49
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• pp.4.1-4.2
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• 2019

We applied the advanced bitmap-assisted patterning function of focused ion beam to fabricate microscale sculpture of the 'BangTanSoNyeonDan' known as BTS members, the world-wide famous K-pop boyband. With the help of an electron microscope, you can carve your idols on your accessories at micro scale. Fun applications of electron microscopes are not limited to science.

• Applied Microscopy
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• v.46 no.2
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• pp.76-82
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• 2016

Aloe vera has been used in the pharmaceutical, food and cosmetic industry for its therapeutic properties. However, there are not many current studies on the microstructure of A. vera compared to studies on the chemical constituents and health efficacy of A. vera. Therefore, we compared the morphology of an A. vera leaf using an optical microscope, a conventional scanning electron microscope (SEM) and a cryo-SEM. Especially, this study focused on observing the gel in the inner leaf of A. vera, which is challenging using standard imaging techniques. We found that cryo-SEM is most suitable method for the observation of highly hydrated biomaterials such as A. vera without removing moisture in samples. In addition, we found the optimal analytical conditions of cryo-SEM. The sublimation conditions of $-100^{\circ}C$ and 10 minutes possibly enable the surface of the inner leaf of A. vera to be observed in their "near life-like" state with retaining moisture. The experiment was repeated with A. arborescens and A. saponaria to confirm the feasibility of the conditions. The results of this study can be applied towards the basic research of aloe and further extend previous knowledge about the surface structures of the various succulent plants.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.153-158
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• 2007

The present study covers numerical analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam trajectories are investigated through numerical analyses by tracing the ray path of the electron beams, and the quality of resulting image is evaluated from the analysis results.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.12 s.255
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• pp.1557-1563
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• 2006

A scanning electron microscope (SEM) is well known as a measurement and analysis equipment in nano technology, being widely used as a crucial one in measuring objects or analyzing chemical components. It is equipped with an electron optical system that consists of an electron beam source, electromagnetic lenses, and a detector. The present work concerns numerical analysis for the electron optical system so as to facilitate design of each component. Through the numerical analysis, we investigate trajectories of electron beams emitted from a nano-scale field emission tip, and compare the result with that of experimental observations. Effects of various components such as electromagnetic lenses and an aperture are also discussed.

• Proceedings of the Korean Institute of Industrial Safety Conference
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• 1998.11a
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• pp.173-177
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• 1998

In this paper, we reported an outbreak of fire hazard of ballast for fluorescent lamp. The surface structure and composition of ballast coil analyzed by using metallurgical microscope, scanning electron microscope(SEM) and energy dispersive x-ray spectroscopy(EDX). The surface of molten mark appeared columnar structure and void. EDX analysis indicated that the molten mark spectra were composed not only of the corresponding original spectra but also of several new lines.