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Atomically sculptured heart in oxide film using convergent electron beam

  • Gwangyeob Lee (Advanced Analysis Center, Korea Institute of Science and Technology) ;
  • Seung-Hyub Baek (Electronic Materials Research Center, Korea Institute of Science and Technology) ;
  • Hye Jung Chang (Advanced Analysis Center, Korea Institute of Science and Technology)
  • Received : 2020.10.12
  • Accepted : 2020.12.25
  • Published : 2021.12.31

Abstract

We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO3 grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO3/crystalline SrTiO3.

Keywords

Acknowledgement

This study was supported by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT, and Future Planning (2017R1A2B2012514), and the KIST Institutional Program (2 V08170).

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