Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Numerical Analysis for the Image Evaluation of a Thermionic SEM

열전자형 주사전자현미경 결상특성의 수치해석

  • 정현우 (서울산업대학교 나노생산기술연구소) ;
  • 박만진 (서울산업대학교 나노생산기술연구소) ;
  • 김동환 (서울산업대학교 기계설계.자동화공학부) ;
  • 장동영 (서울산업대학교 산업정보시스템공학과) ;
  • 박근 (서울산업대학교 기계설계.자동화공학부)
  • Published : 2007.12.15
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Abstract

The present study covers numerical analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam trajectories are investigated through numerical analyses by tracing the ray path of the electron beams, and the quality of resulting image is evaluated from the analysis results.

Keywords

References

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