• Electrical & Electronic Materials
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• v.8 no.2
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• pp.171-175
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• 1995

Optimum condition of remote plasma enhanced chemical vapor deposition using orthogonal array method was chosen. Characteristics of oxide films deposited by RPECVD with SiH$_{4}$ and N$_{2}$O gases were investigated. Etching rate of the optimized SiO$_{2}$ films in P-etchant was about 6[A/s] that was almost the same as that the high temperature thermal oxide. The films showed high dielectric breakdown field of more than 7[MV/cm] and a resistivity of 8*10$^{13}$ [.ohmcm] around at 7[MV/cm]. The interface trap density of SiO$_{2}$/Si interface around the midgap derived from the high frequency C-V curve was about 5*10$^{10}$ [/cm$^{2}$eV]. It was observed that the dielectric constant of the optimized SiO$_{2}$ film was 4.29.

• Journal of the Korean earth science society
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• v.30 no.6
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• pp.699-708
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• 2009

Recently as the interest in the development of domestic ore deposits has increased, we can easily find some studies on exploration geophysics-based ore-deposit survey in literature. Based on the fact that mineralized zone are generally more conductive than surrounding media, electrical resistivity survey among several geophysical surveys has been applied to investigate metallic ore deposits. Most of them are grounded on 2-D survey. However, 2-D inversion may lead to some misinterpretation for 3-D geological structures. In this study, we investigate the feasibility of the 3-D electrical resistivity survey to 3-D vein-type ore deposits. We first simulate 2-D dipole-dipole survey data for survey lines normal to the strike and 3-D pole-pole survey data, and then perform 3-D inversion. For 3-D ore-body structures, we assume a width-varying dyke, a wedge-shaped, and a fault model. The 3-D inversion results are compared to 2-D inversion results. By comparing 3-D inversion results for 2-D dipole-dipole survey data to 3-D inversion results for 3-D pole-pole survey data, we could note that the 2-D dipole-dipole survey data yield better inversion results than the 3-D pole-pole data, which is due to the main characteristic of the pole-pole array. From these results, we are convinced that if we have certain information on the direction of the strike, it would be desirable to apply 2-D dipole-diple survey for the survey lines normal to the strike. However, in most cases, we do not have any information on the direction of the strike, because we already developed the ore deposit with the outcrops and the remaining ore deposits are buried under the surface. In that case, performing 3-D pole-pole electrical resistivity survey would be a reasonable choice to obtain more accurate interpretation on ore body structure in spite of low resolution of pole-pole array.

• Journal of Korean Tunnelling and Underground Space Association
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• v.21 no.2
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• pp.267-278
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• 2019

Variety of tunnel ahead prediction methods have been performed for safe tunnel construction during tunnel excavation. Pole-pole array among the electrical resistivity survey, which is one of the tunnel ahead prediction method, has been utilized to predict water-bearing sediments or weak zone located within 5 times of tunnel diameter. One of the most important processes is the estimation of virgin ground resistivity and it can be obtained from the following process: 1) calculation of contact area between the electrodes and the medium, and 2) assumption of the electrodes as equivalent spherical electrodes which have a same surface area with the electrodes. This assumption is valid in a small contact area and sufficient distance between the electrodes. Since the measured resistance, in general, varies with the electrode size, shape, and distance between the electrodes, it is necessary to evaluate the influence of these factors. In this study, theoretical equations were derived and experimental tests were conducted considering the electrode size, shape, and distance of cylindrical electrodes which is the most commonly utilized electrode shape. Through this theoretical and experimental study, it is known that one should be careful to use the assumption of the equivalent half-spherical electrode with large ratio between the penetrated depth and radius of the cylindrical electrode, as the error may get larger.

• The Journal of Engineering Geology
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• v.32 no.1
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• pp.157-171
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• 2022

Electrical resistivity tomography (ERT) is a traditional and representative geophysical method for determining the resistivity distributions of surrounding soil and rock volumes. Depth resolution profiles and sensitivity distribution sections of the resistivities with respect to various electrode configurations are calculated and investigated using numerical model data. Shallow vertical resolution decreases in the order of Wenner, Schlumberger, and dipole-dipole arrays. A high investigable depth in homogeneous medium is calculated to be 0.11-0.19 times the active electrode spacing, but is counterbalanced by a low vertical resolution. For the application of ERT depth resolution profiles and sensitivity distributions, we provide subsurface structure models for two types of land-creping failure (planar and curved), subvertical fracture, and weathered layer over felsic and mafic igneous rocks. The dipole-dipole configuration appears to be most effective for mapping land-creeping failure planes (especially for curved planes), whereas the Wenner array gives the best resolution of soil horizons and shallow structures in the weathered zone.

• Proceedings of the KSR Conference
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• 2005.05a
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• pp.610-614
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• 2005

Rock mass classification by using electrical resistivity tomography(ERT) method is widely performed for the determination of rock support type in tunnel design. In the region of high electrical noise level, however, the result of the ERT will have many erroneous features. In this study, the back ground electrical noise had been measured to find out the reason why the results of ERT in this area did not agree to the expected geology confirmed by boreholes. In order to overcome this limitation of ERT, a hybrid surface-borehole array seismic refraction tomography had been followed. Using this technique, we could get P-wave velocity section including the depth level of tunnel. The comparison of the P-wave velocity and RMR shows fairly good statistical relationship to make it possible to set up the rock mass classification for the entire tunnel line.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.288-289
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• 2011

Indium Tin Oxide (ITO) is a typical highly Transparent Conductive Oxide (TCO) currently used as a transparent electrode material. Most widely used deposition method is the sputtering process for ITO film deposition because it has a high deposition rate, allows accurate control of the film thickness and easy deposition process and high electrical/optical properties. However, to apply high quality ITO thin film in a flexible microelectronic device using a plastic substrate, conventional DC magnetron sputtering (DMS) processed ITO thin film is not suitable because it needs a high temperature thermal annealing process to obtain high optical transmittance and low resistivity, while the generally plastic substrates has low glass transition temperatures. In the room temperature sputtering process, the electrical property degradation of ITO thin film is caused by negative oxygen ions effect. This high energy negative oxygen ions(about over 100eV) can be critical physical bombardment damages against the formation of the ITO thin film, and this damage does not recover in the room temperature process that does not offer thermal annealing. Hence new ITO deposition process that can provide the high electrical/optical properties of the ITO film at room temperature is needed. To solve these limitations we develop the Magnetic Field Shielded Sputtering (MFSS) system. The MFSS is based on DMS and it has the plasma limiter, which compose the permanent magnet array (Fig.1). During the ITO thin film deposition in the MFSS process, the electrons in the plasma are trapped by the magnetic field at the plasma limiters. The plasma limiter, which has a negative potential in the MFSS process, prevents to the damage by negative oxygen ions bombardment, and increases the heat(-) up effect by the Ar ions in the bulk plasma. Fig. 2. shows the electrical properties of the MFSS ITO thin film and DMS ITO thin film at room temperature. With the increase of the sputtering pressure, the resistivity of DMS ITO increases. On the other hand, the resistivity of the MFSS ITO slightly increases and becomes lower than that of the DMS ITO at all sputtering pressures. The lowest resistivity of the DMS ITO is $1.0{\times}10-3{\Omega}{\cdot}cm$ and that of the MFSS ITO is $4.5{\times}10-4{\Omega}{\cdot}cm$. This resistivity difference is caused by the carrier mobility. The carrier mobility of the MFSS ITO is 40 $cm^2/V{\cdot}s$, which is significantly higher than that of the DMS ITO (10 $cm^2/V{\cdot}s$). The low resistivity and high carrier mobility of the MFSS ITO are due to the magnetic field shielded effect. In addition, although not shown in this paper, the roughness of the MFSS ITO thin film is lower than that of the DMS ITO thin film, and TEM, XRD and XPS analysis of the MFSS ITO show the nano-crystalline structure. As a result, the MFSS process can effectively prevent to the high energy negative oxygen ions bombardment and supply activation energies by accelerating Ar ions in the plasma; therefore, high quality ITO can be deposited at room temperature.

• 유체기계공업학회:학술대회논문집
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• 2006.08a
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• pp.475-478
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• 2006

In electrical impedance tomography (EIT) an array of electrodes is attached on the boundary of an object and small alternating currents are injected through these electrodes, and then the resulting voltages are measured. An estimation for the cross-sectional resistivity distribution in the object is obtained by using these current and voltage data in a nondestructive manner. In this paper, the electrical impedance imaging of two-phase flows undergoing rapid transient is considered with a special emphasis on the effect of the current pattern on the image reconstruction. The trigonometric current pattern, which is commonly used in the conventional static electrical impedance imaging, shows poor performance in case of the dynamic imaging considered in this work. Extensive numerical experiments are conducted with various kinds of current patterns and their effects on the image reconstruction performance are examined.

• 한국지구물리탐사학회:학술대회논문집
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• 2006.06a
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• pp.213-219
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• 2006

The Yongjang mine is located in Masan City, Gyeongsangnamdo, which consists of a black shale possessing quartzite veins with othercompositions such as gold, silver, and sublimated sulfur. The average width of the veins is $9{\sim}17cm$ and the average degrees of the gold and silver are 3.6 g/t and 113.6 g/t respectively. A regional and a detailed scale electrical resistivity surveys are conducted to determine the existence of the mineralization zones and the linear structures in the study area. In addition, surveys of a several different array methods are conducted such as dipole-dipole array in the surface and borehole-to-surface array, surface-to-borehole array, and dipole-dipole array in the borehole. The method of element division can be applied to the region in which the borehole is curved, inclined or the distance between the electrodes is shorter than that of nodal points, because the coordinate of each electrode cannot be assigned directly to the nodal point if several electrodes are in an element. Yongjang vein is extended longer under the subsurface than on the surface in the images reconstructed from the 3D inversion. Therefore, it is recognized that the 3-D interpretation of the electrical resistivity survey is a very useful method to figure out the existence of strike and extension direction because the mineralization zones and the linear structures are shown in each depth.

• Journal of the Korean Geotechnical Society
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• v.29 no.9
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• pp.17-29
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• 2013

The geophysical methods have an advantage for investigating the wide area with low cost, and thus the application of these methods has been increased. The objective of this paper estimates the characteristics of alluvium through the geophysical methods including elastic wave, electrical resistivity and ground penetration radar. And the standard penetration test is also carried out for verifying the geophysical data with comparison. The sources of elastic wave method are divided into hammer and sissy and the electrical resistivity method is applied with different sizes, shapes and arrays of electrode for deciding the effective way. The center frequency is determined to be 270 MHz for considering the characteristics of soil. The results of ground penetration radar are also compared with those of standard penetration test. The high resolution shows when the source is a sissy in elastic wave method, however, the water level is not identified. In the electrical resistivity method, the non-polarizable electrode and schlumberger array show highly reliable data and the resolution of ground penetration radar is low. Thus, the results of this study are widely applied for determining the appropriate method when investigating the characteristics of alluvium.

• Journal of the Korean Geotechnical Society
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• v.38 no.10
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• pp.49-60
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• 2022

Underground urbanization appears to be a promising solution in response to the shortage of construction sites in the above-ground space. In this context, an accurate evaluation of a construction site ensures the long-term performance of geosystems. This study characterizes potential sites for complex plants built in underground space using geophysical methods (i.e., seismic refraction exploration and electrical resistivity survey) and in situ tests (i.e., standard penetration tests (SPTs) and downhole tests). SPTs are conducted in nine boreholes BH-1-BH-9 to estimate the groundwater level and vertical distribution of geological structures. The seismic refraction method enables us to obtain the elastic wave velocity and thickness of each soil layer for each cross-sectional area. An electrical resistivity survey conducted using the dipole array method provides the electrical resistivity profiles of the cross-sectional area. Data obtained using geophysical techniques are used to assess the classification of the soil layer and bedrock, particularly the fracture zone. This study suggests that geotechnical information using in situ tests and geophysical methods are useful references to design an underground complex plant construction.