• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.22 no.4
• /
• pp.303-306
• /
• 2009

This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths, $10{\mu}m$ width, and $0.4{\mu}m$ thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the $60{\sim}100{\mu}m$ long cantilevers, the fundamental frequency appeared at $373.4{\sim}908.1\;kHz$. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
• /
• pp.217-217
• /
• 2009

This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with 60 ~ 100 ${\mu}m$ lengths, $10\;{\mu}m$ width, and $0.4\;{\mu}m$ thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the 60 ~ 100 ${\mu}m$ long cantilevers, the fundamental frequency appeared at 373.4 ~ 908.1 kHz. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Steel and Composite Structures
• /
• v.50 no.2
• /
• pp.149-158
• /
• 2024

Considering that different boundary conditions can have an important impact on structural vibration characteristics. In this paper, the nonlinear forced vibration behavior of functionally graded material (FGM) doubly curved shells with initial geometric imperfections under different boundary conditions is studied. Considering initial geometric imperfections and von Karman geometric nonlinearity, the nonlinear governing equations of FGM doubly curved shells are derived using Reissner's first order shear deformation (FOSD) theory. Three different boundary conditions of four edges simply supported (SSSS), four edges clamped (CCCC), clamped-clamped-simply-simply (CCSS) were studied, and a system of nonlinear ordinary differential equations was obtained with the help of Galerkin principle. The nonlinear forced vibration response of the FGM doubly curved shell is obtained by using the modified Lindstedt Poincare (MLP) method. The accuracy of this method was verified by comparing it with published literature. Finally, the effects of curvature ratio, power law index, void coefficient, prestress, and initial geometric imperfections on the resonance of FGM doubly curved shells under different boundary conditions are fully discussed. The relevant research results can provide certain guidance for the design and application of doubly curved shell.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.11a
• /
• pp.130-130
• /
• 2009

This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The 1.2 ${\mu}m$ and 0.4 ${\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with 60 ~ 100 ${\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 ${\mu}m$ long cantilever resonators were -9.79, -7.72 and -8.0 $ppm/^{\circ}C$. On the other hand, TCF of 60, 80 and 100 ${\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 $ppm/^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.22 no.4
• /
• pp.314-317
• /
• 2009

This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The $1.2{\mu}m$ and $0.4{\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 On long cantilever resonators were -9.79, -7.72 and -8.0 ppm/$^{\circ}C$. On the other hand, TCF of 60, 80 and $100{\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 ppm/$^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

• Journal of Sensor Science and Technology
• /
• v.18 no.3
• /
• pp.207-209
• /
• 2009

This paper describes the characteristics of poly 3C-SiC micro resonators with $3{\times}10^{17}{\sim}1{\times}10^{19}cm^{-3}$ doping concentrations. The 1.2 ${\mu}m$ thick cantilever and the 0.4 ${\mu}m$ thick doubly clamped beam resonators with different lengths were fabricated using poly 3C-SiC thin films. The characteristics of poly 3C-SiC micro resonators were evaluated by quartz and a laser vibrometer in vacuum at room temperature. The resonant frequencies of micro resonators decreased with doping concentrations owing to reduction in the Young's modulus of poly 3C-SiC thin films. It was confirmed that the resonant frequencies of poly 3C-SiC resonators are controllable by doping concentrations. Therefore, poly 3C-SiC resonators could be applied to MEMS devices and bio/chemical sensor applications.

• Journal of Sensor Science and Technology
• /
• v.16 no.5
• /
• pp.377-383
• /
• 2007

We describe the fabrication and characterization of a doubly clamped multi-walled carbon nanotube (MWNT). The device was assembled by an application of electric field in solution. The MWNT was clamped on end of metal trench electrodes in solution and deposited with additional platinum (Pt) on edge of electrode for firmly suspending the MWNT by focused ion beam (FIB). The MWNTs range of diameter and length were 100 to 150 nm and 1.5 to $2{\mu}m$, respectively. Electrical characteristics of fabricated devices were measured by I-V curve and impedance analysis. The mechanical deformation was observed by resistivity in high air pressure. Resonant frequency around 6.8 MHz was detected and resistivity was linearly varied according to the magnitude of air pressure. This device could have potential applications in nanoelectronics and various sensors.

• Structural Engineering and Mechanics
• /
• v.19 no.5
• /
• pp.535-550
• /
• 2005

The non-linear static and dynamic response of doubly curved thin isotropic shells has been studied for the step and sinusoidal loadings. Dynamic analogues Von Karman-Donnel type shell equations are used. Clamped immovable and simply supported immovable boundary conditions are considered. The governing nonlinear partial differential equations of the shell are discretized in space and time domains using the harmonic differential quadrature (HDQ) and finite differences (FD) methods, respectively. The accuracy of the proposed HDQ-FD coupled methodology is demonstrated by the numerical examples. Numerical examples demonstrate the satisfactory accuracy, efficiency and versatility of the presented approach.

• Proceedings of the KIPE Conference
• /
• 2013.07a
• /
• pp.246-247
• /
• 2013

This paper investigates control algorithms for a doubly fed induction generator with a back-to-back three-level neutral-point clamped voltage source converter in medium voltage wind power system under unbalanced grid conditions. Control algorithms to compensate for unbalanced conditions have been investigated with respect to four performance factors; fault ride-through capability, instantaneous active power pulsation, harmonic distortions, and torque pulsation. The control algorithm having zero amplitude of torque ripple shows the most cost-effective performance concerning torque pulsation. The least active power pulsation is produced by control algorithm that nullifies the oscillating component of the instantaneous stator active and reactive power. Combination of these two control algorithms depending on the operating requirements and depth of grid unbalance presents most optimized performance factors under the generalized unbalanced operating conditions leading to high performance DFIG wind turbine system. The proposed control algorithms are verified through transient response in the simulation.

• Proceedings of the KIPE Conference
• /
• 2012.07a
• /
• pp.273-274
• /
• 2012

This paper investigates control algorithms for a doubly fed induction generator(DFIG) with a back-to-back three-level neutral-point clamped voltage source converter in medium voltage wind power system under unbalanced grid conditions. Two different control algorithms to compensate for unbalanced conditions are proposed. Evaluation factors of control algorithm are fault ride-through(FRT) capability, efficiency, harmonic distortions and torque pulsation. Zero regulated negative sequence stator current control algorithm has the most effective performance concerning FRT capability and efficiency. Ripple-free control algorithm nullifies oscillation component of active power and reactive power. Ripple-free control algorithm shows the least harmonic distortions and torque pulsation. Combination of zero regulated negative sequence stator current and ripple-free control algorithm control algorithm depending on the operating requirements and depth of grid unbalance presents the most optimized performance factors under the generalized unbalanced operating conditions leading to high performance DFIG wind turbine system.