한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 하계학술대회 논문집
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- Pages.217-217
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- 2009
양단이 고정된 빔형 다결정 3C-SiC 마이크로 공진기의 특성
Characteristics of poly 3C-SiC doubkly clamped beam micro resonators
- Ryu, Kyeong-Il (University of Ulsan) ;
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Chung, Gwiy-Sang
(University of Ulsan)
- 발행 : 2009.06.18
초록
This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with 60 ~ 100