Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
권호 표지
DOI QR코드

DOI QR Code

Pressure sensing of air flow using multi-walled carbon nanotubes

다중벽 탄소 나노튜브를 이용한 유동 압력 검출

  • 송진원 (한국기계연구원 나노공정장비연구센터) ;
  • 이종홍 (한국기계연구원 나노공정장비연구센터) ;
  • 이응숙 (한국기계연구원 나노공정장비연구센터) ;
  • 한창수 (한국기계연구원 나노공정장비연구센터)
  • Published : 2007.09.29
Download PDF
⟨ Previous Next ⟩

Abstract

We describe the fabrication and characterization of a doubly clamped multi-walled carbon nanotube (MWNT). The device was assembled by an application of electric field in solution. The MWNT was clamped on end of metal trench electrodes in solution and deposited with additional platinum (Pt) on edge of electrode for firmly suspending the MWNT by focused ion beam (FIB). The MWNTs range of diameter and length were 100 to 150 nm and 1.5 to $2{\mu}m$, respectively. Electrical characteristics of fabricated devices were measured by I-V curve and impedance analysis. The mechanical deformation was observed by resistivity in high air pressure. Resonant frequency around 6.8 MHz was detected and resistivity was linearly varied according to the magnitude of air pressure. This device could have potential applications in nanoelectronics and various sensors.

Keywords

References

  1. S. Iijima, 'Helical microtubuls of graphitic carbon', Nature, vol. 354, pp. 56-58, 1991 https://doi.org/10.1038/354056a0
  2. 조우성, 문승일, 백경갑, 박정호, 주병권, '패턴이 형성된 탄소 나노튜브 매트의 이산화질소 감응특성', 센서학회지, 제15권, 제3호, pp. 199-204, 2006 https://doi.org/10.5369/JSST.2006.15.3.199
  3. 권재홍, 이경수, 이윤희, 주병권, '초정밀 스프레이 방법을 이용한 단일벽 탄소 나노튜브 pH센서 개발', 센서학회지, 제15권, 제2호, pp. 127-133, 2006 https://doi.org/10.5369/JSST.2006.15.2.127
  4. V. Sazonova, Y. Yuval, H. Ostiinel, D. Roundy, T. A. Arias, and P. L. McEuen, 'A tunable carbon nanotube electromechanical oscillator', Nature, vol. 431, pp. 284-287, 2004 https://doi.org/10.1038/nature02905
  5. B. Babic, J. Furer, S. Sahoo, S. Farangfar, and C. Schonernberger, 'Intr insic thermal vibrations of suspended doubly clamped single-wall carbon nanotubes', Nano Lett. vol. 3, pp. 1577-1580, 2003 https://doi.org/10.1021/nl0344716
  6. J. Kong, H. Soh, A. Cassel, C. F. Quate, and H. Dai, 'Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers', Nature, vol. 395, pp. 878-881, 1998 https://doi.org/10.1038/27632
  7. H. J. Lee, S. I. Moon, J. K. Kim, Y. D. Lee, S. Nahrn, J. E. Yoo, J. H. Han, Y. H. Lee, S. W. Hwang, and B. K. Ju, 'Improvement of field emission from printed carbon nanotubes by a critical bias field', J. Appl. Phys., vol. 98, pp. 0161071-3, 2005
  8. S. G. Rao, L. Huang, W. Setyawan, and S. Hong, 'Nanotube electronicsLarge-scale assembly of carbon nanotubes', Nature, vol. 425, pp. 36-37, 2003 https://doi.org/10.1038/425036a
  9. D. P. Long, J. L. Larzorcik, and R. Shashidhar, 'Magnetically directed self-assembly of carbon nanotube devices', Adv. Mater., vol. 16, pp. 814-819, 2004 https://doi.org/10.1002/adma.200306388
  10. X. Q. Chen, T. Saito, H. Yamada, and K. Matsushige, 'Aligning single-wall carbon nanotubes with an alternating-current electric field', Appl. Phys. Lett., vol. 78, pp. 3714-3716, 2001 https://doi.org/10.1063/1.1377627
  11. J. Suehiro, G. Zhou, and M. Hara, 'Fabrication of a carbon nanotube-based gas sensor using dielectrophoresis and its applicat ion for ammonia detection by impedance spectroscopy ', J. Phys. D, vol. 36, pp. L109-L114, 2003 https://doi.org/10.1088/0022-3727/36/21/L01
  12. J. Chung, K.-H. Lee, 1. Lee, and R.S. Ruoff, 'Toward large-scale integration of carbon nanotubes', Langmuir, vol. 20, pp. 3011-3017, 2004 https://doi.org/10.1021/la035726y
  13. P.G. Collins, M.S. Arnold, and P. Avouris, 'Engineering carbon nanotubes and nanotube circuits using electrical breakdown', Science, vol. 292, pp. 706-709, 2001 https://doi.org/10.1126/science.1058782
  14. H. W. Sec, C. S. Han, D. G Choi, K. S. Kim, and Y. H. Lee, 'Controlled assembly of single SWNTs bundle using dielectrophoresis', Microelectronic Eng. vol. 81, pp. 83-89, 2005 https://doi.org/10.1016/j.mee.2005.04.001