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http://dx.doi.org/10.5369/JSST.2007.16.5.377

Pressure sensing of air flow using multi-walled carbon nanotubes  

Song, Jin-Won (Nano-Machanical Systems Research Center, KIMM)
Lee, Jong-Hong (Nano-Machanical Systems Research Center, KIMM)
Lee, Eung-Sug (Nano-Machanical Systems Research Center, KIMM)
Han, Chang-Soo (Nano-Machanical Systems Research Center, KIMM)
Publication Information
Journal of Sensor Science and Technology / v.16, no.5, 2007 , pp. 377-383 More about this Journal
Abstract
We describe the fabrication and characterization of a doubly clamped multi-walled carbon nanotube (MWNT). The device was assembled by an application of electric field in solution. The MWNT was clamped on end of metal trench electrodes in solution and deposited with additional platinum (Pt) on edge of electrode for firmly suspending the MWNT by focused ion beam (FIB). The MWNTs range of diameter and length were 100 to 150 nm and 1.5 to $2{\mu}m$, respectively. Electrical characteristics of fabricated devices were measured by I-V curve and impedance analysis. The mechanical deformation was observed by resistivity in high air pressure. Resonant frequency around 6.8 MHz was detected and resistivity was linearly varied according to the magnitude of air pressure. This device could have potential applications in nanoelectronics and various sensors.
Keywords
multi-walled carbon nanotube; dielectrophoresis; doubly clamped; flow sensing;
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Times Cited By KSCI : 2  (Citation Analysis)
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