• 한국진공학회지
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• 제13권4호
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• pp.175-181
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• 2004

미소인장시험을 통해 304 스테인리스 스틸 판재 위에 증착된 DLC 박막의 안정성을 평가하였다. 모재의 소성 변형과 함께 코팅 층의 손상이 발생하기 시작하는데, 작은 규모의 모재 변형 시에는 인장축의 수직방향으로 박막의 균열이 발생하지만, 모재의 슬립변형이 발생하기 시작하면 인장 축과 $45^{\circ}C$의 각도를 갖는 슬립 면을 따라 필름의 박리가 발생하였다. DLC박막의 박리면적으로부터 필름의 접착력을 평가할 수 있었으며, 필름의 합성 전에 실시하는 Ar 플라즈마 스퍼터링 세척시간이 길수록 그리고 세척시 기판에 인가되는 전압이 높을수록 필름의 접착력은 향상되었다. 이러한 변화는 스테인리스 스틸 모재와 Si 접합 층간의 계면특성이 향상되면, 필름의 전체 접착력을 증진시킬 수 있음을 보여주고 있다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.459-459
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• 2012

Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

• Korean Chemical Engineering Research
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• 제49권4호
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• pp.485-490
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• 2011

사불화탄소($CF_4$)는 반도체 제조공정에서 에칭과 반응기 세척에서 사용되어온 가스이다. $CF_4$는 적외선을 강하게 흡수하고 대기 중 잔류시간이 길어서 지구온난화에 영향을 미치기 때문에 고효율의 분해가 필요하다. 본 연구에서는 플라즈마와 워터젯을 결합하여 워터젯 글라이딩 아크 플라즈마 시스템을 개발하고, 이를 이용하여 $CF_4$를 고효율로 분해할 수 있도록 방전영역을 증가시키고 다량의 OH 라디칼을 생성시킬 수 있는 최적의 조업 조건을 결정하였다. 공정 실험 변수로는 워터젯 주입량, $CF_4$ 초기 농도, 전체 가스량과 주입에너지량(SEI : Specific energy input)을 선정하였다. 변수실험을 통하여 워터젯 주입량이 25.5 mL/min, $CF_4$ 초기 농도 2.2%, 전체 가스량 9.2 L/min, SEI 7.2 kJ/L일 때 $CF_4$ 분해율은 최고 97%까지 도달하였다.

• 식품보건융합연구
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• 제6권5호
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• pp.19-25
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• 2020

The purpose of this study was to research and develop a step-type chemical liquid deodorizer including a liquid catalyst that can prevent civil complaints due to odor due to its excellent deodorizing performance. The main composition of chemical liquid deodorizer including liquid catalyst is cleaning deodorization, catalyst deodorization, chemical deodorization, water film plate, deodorization water circulation device, deodorization water injection device, catalyst management system, gas-liquid separation device, chemical supply device, deodorizer control panel, etc. It consists of a device. The air flow of the step-type liquid catalyst chemical liquid deodorizer is a technology that firstly removes basic odor substances, and the liquid catalyst installed in the subsequent process stably removes sulfur compounds, which are acidic odor substances, to discharge clean air. The efficiency of treating the complex odor of the prototype was 98.5% for the first and 99.6% for the second, achieving the target of 95%. The hydrogen sulfide treatment efficiency of the prototype was 100% for the first and 99.9% for the second, which achieved 95%, which was the target of the project. As a result, ammonia was removed by the reaction of ammonia and hydrogen sulfide.

• 한국물환경학회지
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• 제36권6호
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• pp.535-545
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• 2020

This study aims to conserve and monitor energy use in public sewage treatment plants by utilizing data from the SCADA system and by controlling the aeration rate required for maintaining effluent water quality. Power consumption in the sewage treatment process was predicted using the equipment's uptime, efficiency, and inherent power consumption. The predicted energy consumption was calibrated by measured data. Additionally, energy efficiency indicators were proposed based on statistical data for energy use, capacity, and effluent quality. In one case study, a sewage treatment plant operated via the SBR process used ~30% of energy consumed in maintaining the bioreactors and treated water tanks (included decanting pump and cleaning systems). Energy consumption analysis with the K-ECO Tool-kit was conducted for unit processing. The results showed that about 58.7% of total energy consumed was used in the preliminary and biological treatment rotating equipment such as the blower and pump. In addition, the energy consumption rate was higher to the order of 19.2% in the phosphorus removal process, 16.0% during sludge treatment, and 6.1% during disinfection and discharge. In terms of equipment energy usage, feeding and decanting pumps accounted for 40% of total energy consumed following 27% for blowers. By controlling the aeration rate based on the proposed feedback control system, the DO concentration was reduced by 56% compared pre-controls and the aeration amount decreased by 28%. The overall power consumption of the plant was reduced by 6% via aeration control.

• Toxicological Research
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• 제23권2호
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• pp.151-158
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• 2007

tert-Butyl acetate is an organic solvent used for coatings, industrial cleaning, and surface treatment applications. This study investigated the potential adverse effects of tert-butyl acetate on pregnant dams and embryo-fetal development after maternal exposure on gestational days 6 through 19 in rats. The test chemical was administered to pregnant rats by gavage at dose levels of 0, 500, 1,000, 1,500, and 2,000 mg/kg/day. All dams were subjected to a caesarean section on day 20 of gestation and their fetuses were examined for any external, visceral, and skeletal abnormalities. At 2,000 mg/kg, treatment-related clinical signs, including piloerection, abnormal gait, decreased locomotor activity, loss of fur, reddish tear, anorexia, nasal discharge, vocalization and coma, were observed in a dose-dependent manner. All dams died between the 2nd day and 5th day of treatment due to a severe systemic toxicity. At 1,500 mg/kg, minimal maternal toxicity including an increase in the incidence of decreased locomotor activity and loss of fur, and an increase in the weights of adrenal glands and liver was observed. On the contrary, no significant adverse effect on the embryo-fetal development was detected. There were no adverse effects on either pregnant dams or embryo-fetal development at <1,000 mg/kg. These results show that a 14-day repeated oral dose of tert-butyl acetate in rats caused a minimal maternal toxicity including increases in the incidence of clinical signs and the weights of adrenal glands and liver, but no embryotoxicity and teratogenicity at 1,500 mg/kg/day. Under these experimental conditions, the no-observed-adverse-effect level (NOAEL) of tert-butyl acetate is estimated to be 1,000 mg/kg per day for dams and 1,500 mg/kg per day for embryo-fetal development.

• 대한환경공학회지
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• 제29권9호
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• pp.1060-1068
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• 2007

건강유해물질인 perchlorate로 인한 음용수의 오염은 국 내외적으로 심각히 대두되고 있으나, 전세계적으로 perchlorate에 대한 국가 차원의 규제 기준을 가진 곳은 아직 없고 발암물질로 구분되지도 않은 상황이다. 최근엔 미국 환경청(US EPA)에서 perchlorate의 예방적 복원 지침서를 발표하였으며, perchlorate 분석 및 저감기술에 관한 연구가 활발히 진행되고 있다. 현재 국내에서는 perchlorate에 대한 먹는 물 수질기준이나 배출 허용 기준 등이 설정되어 있지 않고, perchlorate에 관한 국내 연구는 초기 단계에 머무르고 있다. 본 연구에서는 perchlorate의 성상 및 인체 유해성에 관해 간단히 고찰하였고, 기존의 이온교환(Ion exchange), 생물반응기(Bioreactor), 액상 탄소 흡착(Liquid Phase Carbon Adsorption), 퇴비화 처리(Composting), 현장 생물학적 정화(In Situ Bioremediation), 투수성 반응 벽체(Permeable Reactive Barrier), 식물정화법(Phytotechnology), 막분리기술(Membrane Technologies) 등과 같은 저감 기술의 장단점 및 효율에 관해 소개하였다. 최근 활발히 진행되고 있는 투수성 반응 벽체와 생물학적 환원 기술의 통합 등에 대한 연구 및 분석기술 개발에 대해서도 소개하였다. 본 논문을 통해 향후 국내 실정에 맞는 고효율의 perchlorate 국내저감기술 개발을 위한 기초자료를 제공하고자 하였다.

• 교육녹색환경연구
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• 제6권2호
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• pp.66-90
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• 2007

The purpose of this study is to measure and analyze primary causes of indoor air pollution, including carbon dioxide, minute dust, and total volatile organic compounds, for each room before the beginning of a class through the time of discharge after the end of the class in general classrooms, computer rooms, and science rooms of three newly-established schools that opened in 2006, examine properties of indoor air environment in each room by educational activities at school, and determine effective management schemes; the results of this study can be summarized as follows: 1) As for implications for each item found in the mean for each place, since minute dust (PM10) was more likely to occur in time slots full of students' activities, such as a traveling class and a recess, than in the middle of a class and could be expected fully, it is necessary to make a scheme for cleaning in order to reduce minute dust within a room, for example, by usually using a vacuum cleaner indoors. 2) While carbon dioxide was expected to vary with the differences in the amount of breath between higher-graders and lower-graders in a general classroom but showed insignificant difference by grades, showing differences in pollution by four times at a maximum according to the opening of a window as expected, it is necessary to implement artificial or natural ventilation and take a positive measure, for example, by presenting a concrete ventilation scheme, in order to improve indoor air pollution at a room practice. 3) Total volatile organic compounds were found to exceed the standard by more than twice in general classrooms, science rooms, and computer rooms of the schools because of building materials, furnitures including desks and chairs, panels and boards for environment beautification, and items which could be detected even from students' clothes; while a field directly-reading tool was used, obtaining high reliability for the results, it is necessary to apply an analytical method based on process test separately for actual correct measurement if a significantly great amount of total volatile organic compounds appear as compared with other schools due to measuring expenses and consecutive measurements. 4) Since formaldehyde (HCHO) was generally found to exceed the standard in general classrooms, science rooms, and computer rooms, it is necessary to establish and operate a ventilator during a class in a computer room which requires airtightness and a science room in which an organic compound should be used for a class.

• 한국토양비료학회지
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• 제37권3호
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• pp.177-183
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• 2004

최근 시설 재배지에서는 사용된 배양액을 그냥 방출하고 있어서 지표수의 부영양화와 지하수의 오염을 유발시키는 것으로 알려져 있으며, 이와 같은 폐양액 처리 기술이 요구된다. 따라서 본 연구는 국내토양에서 분리된 광합성 독립영양 세균인 cyanobactria 중 우수한 균주를 선발하고 이의 생장에 필요한 다량의 N, P와 미량 필수원소 등 각종영양 물질이 충분히 함유된 폐양액을 이용하여 광합성 세균을 대량배양 하고자 하였다. 4종 (Anabaena HA101, HA701과 Nostoc HN601, HN701)의 미세조류 중 BG-II ($NO_3{^-}$) 액체배지에서 생장과 양분흡수능이 우수한 균체는 Nostoc HN601이었고, 이 균체는 질소 고정능 뿐만 아니라 균체 내 양분 보유능이 우수하여 본 실험을 위하여 최종 선발하였다. 선발된 Nostoc HN601의 최적 배양 조건는 통기처리 시 배양액 부피의 1/2수준의 조건과 초기 폐양액의 pH를 8.0으로만 조절 해주는 non-buffering 시스템이 효과적이었다. 최적 배양 조건하에서 Nostoc HN601을 15 L의 광배양기에 토마토를 수경 재배한 10 L의 폐양액을 이용하여 배양한 결과 균체의 생장은 $16mg\;Chl-a\;L^{-1}$로 실험실조건에서 배양된 균체 ($8.3mg\;Chl-a\;L^{-1}$)보다 약 2배정도 빠르게 증가되었으며, 폐양액 내 인산도 1주일 이내에 100% 제거시킴으로서 인산 제거효율이 매우 우수하였다. 또한 선발된 Nostoc HN601의 질소 고정능은 $22.4nmol\;C_2H_4\;mg^{-1}\;Chl-a\;h^{-1}$로 매우 우수하였고, 균체 내 총 인산과 총 질소함량은 각각 19.1 mg P와 63.3 mg N으로 높게 나타났다. 이러한 결과로 광반응기에서 폐양액을 이용한 cyanobacteria의 대량배양은 부영양화와 지하수 오염을 일으키는 폐양액 내 인산제거에 큰 효과가 있고. 배양된 균체는 높은 질소와 인산을 함유하고 있어서 생물비료로도 이용할 수 있을 것으로 기대된다.

• 대한간호학회지
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• 제24권4호
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• pp.597-615
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• 1994

This study is designed to facilitate the creation of home environment conducive to the family taking care of chronic bed-ridden patients with more effective method. The need for this study has emerged against the background of marked changes in the structure of ailments and causes of death, resulting in the number and plights of chronic bed-ridden patients as well as of a rapid increase in demand for medical care and resulting premature discharge. Keeping these in mind, this study focused on home-wards where the majority of chronic bed-ridden patients are being cared for. Despite. their overriding importance, home-words are less than efficient in caring (or chronic bed-ridden patients. These circumstances require the designing of home-wards that can offer greater comfort to patients and at the same time make things easier for caregivers, on the basis of an overall analysis of patients' life and home - ward situation. According1y this study adopted a Participant Observation Method derived cultural anthropology, Toward this end, 3 patients were chosen as subjects of this study for intensive interviewing and participant observation. In the process of this field re-search efforts were made to collect emprical data, that is, to faithfully record the words of the subjects and their caregivers for analysis and interpretation. The findings of these analyses are as follows. Firstly, the chronic bed-ridden patients are mostly being taken care by close family members. Secondly, a room for the exclusive use of the patient, floor, kitchen, bathroom and multipurpose space were found to be necessary for proper caring of the patient. These spaces were respectively used with a view to 1) accomodating the patient as well as caregivers' activities, 2) keeping general and medical supplies and other appliances for patient's care and drying the patient's washing, 3) preparing and keeping the patient's foods and beverages, 4) keeping the supplies necessary for cleaning the patient's body and treating the patient's eliminations, 5) washing the patient's clothes, underwears and bedclothes. The patient's room in turn is subdivided into six portions in terms of uses : specifically the places for accomodating 1) the patient, 2) medical supplies, 3) medicines, 4) linens St clothes, 5) bedclothes and, 6) diapers. Thirdly, the activities of the caregiver are subdivided into seven key areas : hygiene, exercise, diet, elimination, therapeutic nursing, prevention of sore, and other activities. Each area is further classified into several different activities of caring. These activities we mainly carried out in the patient's room. Fourthly, the supplies for caring the chronic bed-ridden patient is divided into two large domains : medical and general supplies. Finally, three main problems areas were found in this study on the part of caregivers, that is, sore prevention, hygiene problem related frequent urination / defecation, the caregiver's physical, psych ological and emotional burden. In consideration of the aforesaid problem areas, a model home-ward was developed in this study. The newly-developed model has been found to have the following six advantages. Firstly, the time and effort required for maintaining the patient's hygiene are reduced, thus relievins the caregiver's physical and psychological bur-den. Secondly, the patient's hygiene can be maintained in satisfactory conditions, because the patient's eliminations are more easily removed. Thirdly, skin irritations caused by the patient's eliminations were remarkably reduced and so were the patient's sores due to moisture and bacteria. Fourthly, the home-ward have a tilt-table ef-fect thanks to the inclining room floor. This improves the patient's cardiovascular function as well as constantly changes pressed skin areas and thus prevents sores. Fifthly, improved shelf arrangements help make the best use of patient's supplies. Sixthly, the trouble of continuously changing clothes, underwears, diapers & bedclothes is remarkably reduced simply by covering the patient with cotton sheets when laid in bed. This is espected to cut down expenses by reducing the comsumptions of diapers and other disposable supplies.