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http://dx.doi.org/10.9713/kcer.2011.49.4.485

Reduction of Tetrafluoromethane using a Waterjet Gliding Arc Plasma  

Lee, Chae Hong (BK21 Team for Hydrogen Production.Department of Environmental Engineering, Chosun University)
Chun, Young Nam (BK21 Team for Hydrogen Production.Department of Environmental Engineering, Chosun University)
Publication Information
Korean Chemical Engineering Research / v.49, no.4, 2011 , pp. 485-490 More about this Journal
Abstract
Tetrafluoromethane($CF_4$) has been used as etching and chamber cleaning gases for semiconductor manufacturing processes. These gases need to be removed efficiently because of their strong absorption of infrared radiation and long atmospheric lifetime which causes the global warming effect. We have developed a waterjet gliding arc plasma system in which plasma is combined with waterjet and investigated optimum operating conditions for efficient $CF_4$ destruction through enlarging discharge region and producing large amount of OH radicals. The operating conditions are waterjet flow rate, initial $CF_4$ concentration, total gas flow rate, specific energy input. Through the parametric studies, the highest $CF_4$ destruction of 97% was achieved at 2.2% $CF_4$, 7.2 kJ/L SEI, 9 L/min total gas flow rate and 25.5 mL/min waterjet flow rate.
Keywords
Tetrafluoromethane; Waterjet; Gliding arc Plasma; Energy Efficiency; OH Radical;
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Times Cited By KSCI : 1  (Citation Analysis)
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