• Title/Summary/Keyword: discharge cleaning

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Stability and Adhesion of Diamond-like Carbon Film under Micro-tensile Test Condition (미소 인장시험을 통한 다이아몬드상 카본 박막의 안정성 및 접합력 평가)

  • Choi Heon Woong;Lee Kwang-Ryeol;Wang Rizhi;Oh Kyu Hwan
    • Journal of the Korean Vacuum Society
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    • v.13 no.4
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    • pp.175-181
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    • 2004
  • We investigated the stability of the DLC film coated on 304 stainless steel substrate by Radio frequency assisted chemical vapor deposition method. Fracture and spallation behaviour of the coating was observed during micro-tensile test of the fil $m_strate composite. As the tensile deformation progressed, the cracks of the film were observed in the perpendicular direction to the tensile axis. Further deformation resulted in the plastic deformation with $45^{\circ}$ slip bands on the substrate surface. Spallation of the film occurred with the plastic deformation, which was initiated at the cracks of the film and was aligned along the slip directions. We found that both the cracking and the spallation behaviors are strongly dependent on the pre-treatment condition, such as Ar plasma pre-treatment. The spallation of the film was considerably suppressed in an optimized condition of the substrate cleaning by Ar glow discharge. We observed the improved stability with increasing duration of Ar plasma pre-treatment.nt.

Decrease of Global Warming Effect During Dry Etching of Silicon Nitride Layer Using C3F6O/O2 Chemistries

  • Kim, Il-Jin;Moon, Hock-Key;Lee, Jung-Hun;Jung, Jae-Wook;Cho, Sang-Hyun;Lee, Nae-Eung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.459-459
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    • 2012
  • Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

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Reduction of Tetrafluoromethane using a Waterjet Gliding Arc Plasma (워터젯 글라이딩 아크 플라즈마를 이용한 사불화탄소 저감)

  • Lee, Chae Hong;Chun, Young Nam
    • Korean Chemical Engineering Research
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    • v.49 no.4
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    • pp.485-490
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    • 2011
  • Tetrafluoromethane($CF_4$) has been used as etching and chamber cleaning gases for semiconductor manufacturing processes. These gases need to be removed efficiently because of their strong absorption of infrared radiation and long atmospheric lifetime which causes the global warming effect. We have developed a waterjet gliding arc plasma system in which plasma is combined with waterjet and investigated optimum operating conditions for efficient $CF_4$ destruction through enlarging discharge region and producing large amount of OH radicals. The operating conditions are waterjet flow rate, initial $CF_4$ concentration, total gas flow rate, specific energy input. Through the parametric studies, the highest $CF_4$ destruction of 97% was achieved at 2.2% $CF_4$, 7.2 kJ/L SEI, 9 L/min total gas flow rate and 25.5 mL/min waterjet flow rate.

Research on Step-Type Chemical Liquid Deodorizer using Liquid Catalyst

  • WOO, Hyun-Jin;KWON, Lee-Seung;JUNG, Min-Jae;YEO, Og-Gyu;KIM, Young-Do;KWON, Woo-Taeg
    • The Korean Journal of Food & Health Convergence
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    • v.6 no.5
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    • pp.19-25
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    • 2020
  • The purpose of this study was to research and develop a step-type chemical liquid deodorizer including a liquid catalyst that can prevent civil complaints due to odor due to its excellent deodorizing performance. The main composition of chemical liquid deodorizer including liquid catalyst is cleaning deodorization, catalyst deodorization, chemical deodorization, water film plate, deodorization water circulation device, deodorization water injection device, catalyst management system, gas-liquid separation device, chemical supply device, deodorizer control panel, etc. It consists of a device. The air flow of the step-type liquid catalyst chemical liquid deodorizer is a technology that firstly removes basic odor substances, and the liquid catalyst installed in the subsequent process stably removes sulfur compounds, which are acidic odor substances, to discharge clean air. The efficiency of treating the complex odor of the prototype was 98.5% for the first and 99.6% for the second, achieving the target of 95%. The hydrogen sulfide treatment efficiency of the prototype was 100% for the first and 99.9% for the second, which achieved 95%, which was the target of the project. As a result, ammonia was removed by the reaction of ammonia and hydrogen sulfide.

A Study on Energy Usage Monitoring and Saving Method in the Sewage Treatment Plant (공공하수처리시설에서 에너지 사용현황 및 절감방안 연구)

  • Kim, Jongrack;Rhee, Gahee;You, Kwangtae;Kim, Dongyoun;Lee, Hosik
    • Journal of Korean Society on Water Environment
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    • v.36 no.6
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    • pp.535-545
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    • 2020
  • This study aims to conserve and monitor energy use in public sewage treatment plants by utilizing data from the SCADA system and by controlling the aeration rate required for maintaining effluent water quality. Power consumption in the sewage treatment process was predicted using the equipment's uptime, efficiency, and inherent power consumption. The predicted energy consumption was calibrated by measured data. Additionally, energy efficiency indicators were proposed based on statistical data for energy use, capacity, and effluent quality. In one case study, a sewage treatment plant operated via the SBR process used ~30% of energy consumed in maintaining the bioreactors and treated water tanks (included decanting pump and cleaning systems). Energy consumption analysis with the K-ECO Tool-kit was conducted for unit processing. The results showed that about 58.7% of total energy consumed was used in the preliminary and biological treatment rotating equipment such as the blower and pump. In addition, the energy consumption rate was higher to the order of 19.2% in the phosphorus removal process, 16.0% during sludge treatment, and 6.1% during disinfection and discharge. In terms of equipment energy usage, feeding and decanting pumps accounted for 40% of total energy consumed following 27% for blowers. By controlling the aeration rate based on the proposed feedback control system, the DO concentration was reduced by 56% compared pre-controls and the aeration amount decreased by 28%. The overall power consumption of the plant was reduced by 6% via aeration control.

Teratogenicity Study of tert-Butyl Acetate in Rats (랫드에서 초산 제3부틸의 최기형성 시험)

  • Ahn, Tai-Hwan;Yang, Young-Su;Lee, Jong-Chan;Kang, Seong-Soo;Bae, Chun-Sik;Kim, Sung-Ho;Kim, Jong-Choon;Kim, Hyeon-Yeong;Chung, Yong-Hyun
    • Toxicological Research
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    • v.23 no.2
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    • pp.151-158
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    • 2007
  • tert-Butyl acetate is an organic solvent used for coatings, industrial cleaning, and surface treatment applications. This study investigated the potential adverse effects of tert-butyl acetate on pregnant dams and embryo-fetal development after maternal exposure on gestational days 6 through 19 in rats. The test chemical was administered to pregnant rats by gavage at dose levels of 0, 500, 1,000, 1,500, and 2,000 mg/kg/day. All dams were subjected to a caesarean section on day 20 of gestation and their fetuses were examined for any external, visceral, and skeletal abnormalities. At 2,000 mg/kg, treatment-related clinical signs, including piloerection, abnormal gait, decreased locomotor activity, loss of fur, reddish tear, anorexia, nasal discharge, vocalization and coma, were observed in a dose-dependent manner. All dams died between the 2nd day and 5th day of treatment due to a severe systemic toxicity. At 1,500 mg/kg, minimal maternal toxicity including an increase in the incidence of decreased locomotor activity and loss of fur, and an increase in the weights of adrenal glands and liver was observed. On the contrary, no significant adverse effect on the embryo-fetal development was detected. There were no adverse effects on either pregnant dams or embryo-fetal development at <1,000 mg/kg. These results show that a 14-day repeated oral dose of tert-butyl acetate in rats caused a minimal maternal toxicity including increases in the incidence of clinical signs and the weights of adrenal glands and liver, but no embryotoxicity and teratogenicity at 1,500 mg/kg/day. Under these experimental conditions, the no-observed-adverse-effect level (NOAEL) of tert-butyl acetate is estimated to be 1,000 mg/kg per day for dams and 1,500 mg/kg per day for embryo-fetal development.

Review on Risks of Perchlorate and Treatment Technologies (퍼클로레이트(Perchlorate)의 위해성과 저감기술 소개)

  • Shin, Kyung-Hee;Son, Ah-Jeong;Cha, Daniel K.;Kim, Kyoung-Woong
    • Journal of Korean Society of Environmental Engineers
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    • v.29 no.9
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    • pp.1060-1068
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    • 2007
  • Perchlorate contamination in aquatic system is a growing concern due to the human health and ecological risks associated with perchlorate exposure. In spite of potential risks associated with perchlorate, drinking water standard has not been established worldwide. Recently, US EPA has issued new protective guidance for cleaning up perchlorate contamination with a preliminary clean-up goal of 24.5 ppb. In Korea, the drinking water standard and discharge standard for perchlorate has not been established yet and little information is available to address perchlorate problems. Perchlorate treatment technologies include ion exchange, microbial reactor, carbon adsorption, composting, in situ bioremediation, permeable reactive barrier, phytoremediation, and membrane technology. The process description, capability, and advantage/disadvantages of each technology were described in detail in this review. One of recent trends in perchlorate treatment is the combination of available treatment options such as combined microbial reduction and permeable reactive burier. In this review, we provided a brief perspective on perchlorate treatment technology and to identify an efficient and cost-effective approach to manage perchlorate problem.

A Study on Changes in Indoor Air Pollution by Educational Activities -Centering on Newly-Established Elementary Schools- (교육활동에 따른 실내오염도 변화에 관한 연구 -신설 초등학교를 중심으로-)

  • Jeon, Seok-Jin
    • The Journal of Sustainable Design and Educational Environment Research
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    • v.6 no.2
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    • pp.66-90
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    • 2007
  • The purpose of this study is to measure and analyze primary causes of indoor air pollution, including carbon dioxide, minute dust, and total volatile organic compounds, for each room before the beginning of a class through the time of discharge after the end of the class in general classrooms, computer rooms, and science rooms of three newly-established schools that opened in 2006, examine properties of indoor air environment in each room by educational activities at school, and determine effective management schemes; the results of this study can be summarized as follows: 1) As for implications for each item found in the mean for each place, since minute dust (PM10) was more likely to occur in time slots full of students' activities, such as a traveling class and a recess, than in the middle of a class and could be expected fully, it is necessary to make a scheme for cleaning in order to reduce minute dust within a room, for example, by usually using a vacuum cleaner indoors. 2) While carbon dioxide was expected to vary with the differences in the amount of breath between higher-graders and lower-graders in a general classroom but showed insignificant difference by grades, showing differences in pollution by four times at a maximum according to the opening of a window as expected, it is necessary to implement artificial or natural ventilation and take a positive measure, for example, by presenting a concrete ventilation scheme, in order to improve indoor air pollution at a room practice. 3) Total volatile organic compounds were found to exceed the standard by more than twice in general classrooms, science rooms, and computer rooms of the schools because of building materials, furnitures including desks and chairs, panels and boards for environment beautification, and items which could be detected even from students' clothes; while a field directly-reading tool was used, obtaining high reliability for the results, it is necessary to apply an analytical method based on process test separately for actual correct measurement if a significantly great amount of total volatile organic compounds appear as compared with other schools due to measuring expenses and consecutive measurements. 4) Since formaldehyde (HCHO) was generally found to exceed the standard in general classrooms, science rooms, and computer rooms, it is necessary to establish and operate a ventilator during a class in a computer room which requires airtightness and a science room in which an organic compound should be used for a class.

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Selection of Filamentous Cyanobacteria and Optimization of Culture Condition for Recycling Waste Nutrient Solution (폐양액 활용을 위한 Filamentous Cyanobacteria의 선발 및 최적배양)

  • Yang, Jin-Chul;Chung, Hee-Kyung;Lee, Hyoung-Seok;Choi, Seung-Ju;Yun, Sang-Soon;Ahn, Ki-Sup;Sa, Tong-Min
    • Korean Journal of Soil Science and Fertilizer
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    • v.37 no.3
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    • pp.177-183
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    • 2004
  • The discharge of waste nutrient solution from greenhouse to natural ecosystem leads to the accumulation of excess nutrients that results in contamination or eutrophication. There is a need to recycle the waste nutrient solution in order to prevent the environmental hazards. The amount and kind of nutrients in waste nutrient solution might be enough to grow photosynthetic microorganisms. Hence in the present study, we examined the growth and mass cultivation of cyanobacteria in the waste nutrient solution with an objective of removing N and P and concomitantly, its mass cultivation. Four photosynthetic filamentous cyanobacteria (Anabaena HA101, HA701 and Nostoc HN601, HN701) isolated from composts and soils of the Chungnam province were used as culture strains. Among the isolates, Nostoc HN601 performed faster growth rate and higher N and P uptake in the BG-II ($NO_3{^-}$) medium when compared to those of other cyanobacterial strains. Finally, the selected isolate was tested under optimum conditions (airflow at the rate of $1L\;min^{-1}$. in 15 L reactor, initial pH 8) in waste nutrient solution from tomato hydroponic in green house condition. Results showed to remove 100% phosphate from the waste nutrient solution in the tomato hydroponics recorded over a period of 7 days. The growth rate of Nostoc HN601 was $16mg\;Chl-a\;L^{-1}$ in the waste nutrient solution from tomato hydroponics with optimum condition, whereas growth rate of Nostoc HN601 was only $9.8mg\;Chl-a\;L^{-1}$ in BG-11 media. Nitrogen fixing capacity of Nostoc HN601 was $20.9nmol\;C_2H_4\;mg^{-1}\;Chl-a\;h^{-1}$ in N-free BG-11. The total nitrogen and total phosphate concentration of Nostoc HN601 were 63.3 mg N gram dry weight $(GDW)^{-1}$ and $19.1mg\;P\;GDW^{-1}$ respectively. Collectively, cyanobacterial mass production using waste nutrient solution under green house condition might be suitable for recycling and cleaning of waste nutrient solution from hydroponic culture system. Biomass of cyanobacteria, cultivated in waste nutrient solution, could be used as biofertilizer.

A Ethnographic Field Study for a Model Development of the Chronic Bed-ridden Patient s Home-ward (만성 재가 기동장애자의 가정병실 모델 개발을 위한 현장 연구)

  • 김태연;정연강
    • Journal of Korean Academy of Nursing
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    • v.24 no.4
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    • pp.597-615
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    • 1994
  • This study is designed to facilitate the creation of home environment conducive to the family taking care of chronic bed-ridden patients with more effective method. The need for this study has emerged against the background of marked changes in the structure of ailments and causes of death, resulting in the number and plights of chronic bed-ridden patients as well as of a rapid increase in demand for medical care and resulting premature discharge. Keeping these in mind, this study focused on home-wards where the majority of chronic bed-ridden patients are being cared for. Despite. their overriding importance, home-words are less than efficient in caring (or chronic bed-ridden patients. These circumstances require the designing of home-wards that can offer greater comfort to patients and at the same time make things easier for caregivers, on the basis of an overall analysis of patients' life and home - ward situation. According1y this study adopted a Participant Observation Method derived cultural anthropology, Toward this end, 3 patients were chosen as subjects of this study for intensive interviewing and participant observation. In the process of this field re-search efforts were made to collect emprical data, that is, to faithfully record the words of the subjects and their caregivers for analysis and interpretation. The findings of these analyses are as follows. Firstly, the chronic bed-ridden patients are mostly being taken care by close family members. Secondly, a room for the exclusive use of the patient, floor, kitchen, bathroom and multipurpose space were found to be necessary for proper caring of the patient. These spaces were respectively used with a view to 1) accomodating the patient as well as caregivers' activities, 2) keeping general and medical supplies and other appliances for patient's care and drying the patient's washing, 3) preparing and keeping the patient's foods and beverages, 4) keeping the supplies necessary for cleaning the patient's body and treating the patient's eliminations, 5) washing the patient's clothes, underwears and bedclothes. The patient's room in turn is subdivided into six portions in terms of uses : specifically the places for accomodating 1) the patient, 2) medical supplies, 3) medicines, 4) linens St clothes, 5) bedclothes and, 6) diapers. Thirdly, the activities of the caregiver are subdivided into seven key areas : hygiene, exercise, diet, elimination, therapeutic nursing, prevention of sore, and other activities. Each area is further classified into several different activities of caring. These activities we mainly carried out in the patient's room. Fourthly, the supplies for caring the chronic bed-ridden patient is divided into two large domains : medical and general supplies. Finally, three main problems areas were found in this study on the part of caregivers, that is, sore prevention, hygiene problem related frequent urination / defecation, the caregiver's physical, psych ological and emotional burden. In consideration of the aforesaid problem areas, a model home-ward was developed in this study. The newly-developed model has been found to have the following six advantages. Firstly, the time and effort required for maintaining the patient's hygiene are reduced, thus relievins the caregiver's physical and psychological bur-den. Secondly, the patient's hygiene can be maintained in satisfactory conditions, because the patient's eliminations are more easily removed. Thirdly, skin irritations caused by the patient's eliminations were remarkably reduced and so were the patient's sores due to moisture and bacteria. Fourthly, the home-ward have a tilt-table ef-fect thanks to the inclining room floor. This improves the patient's cardiovascular function as well as constantly changes pressed skin areas and thus prevents sores. Fifthly, improved shelf arrangements help make the best use of patient's supplies. Sixthly, the trouble of continuously changing clothes, underwears, diapers & bedclothes is remarkably reduced simply by covering the patient with cotton sheets when laid in bed. This is espected to cut down expenses by reducing the comsumptions of diapers and other disposable supplies.

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