• Title/Summary/Keyword: diffusion pump

Search Result 91, Processing Time 0.035 seconds

Simulation of Vacuum Characteristics in Semiconductor Processing Vacuum System by the Combination of Vacuum Pumps (진공펌프 조합에 의한 반도체공정 진공시스템 진공특성 전산모사)

  • Kim, Hyung-Taek;Kim, Dae-Yeon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.24 no.6
    • /
    • pp.449-457
    • /
    • 2011
  • Effect of pump combinations on the vacuum characteristics of vacuum system was simulated for optimum design of system. In this investigation, the feasibility of modelling mechanism for VacSimMulti simulator was proposed. Simulation results of various pumping combinations showed the possibilities and reliabilities of simulation for the performance of vacuum system in specific semiconductor processing. Simulation of roughing pump presented the expected pumping behaviors based on commercial specifications of employed pumps. Application of booster pump exhibited the high pumping efficiency for middle vacuum range. Combinations of optimum backing pump for diffusion and turbo vacuum system were obtained. And, the predictable characteristics of process application of both simulated systems were also acquired.

A Study on the Evaluation of Air Change Efficiency of Multi-Air-Conditioner with Ventilation System for Heating Season (환기시스템이 적용된 히트펌프의 난방시 급기효율 평가에 관한 연구)

  • Kwon Yong-Il;Han Hwataik;Kim Kyung-Hwan;Chung Baik-Young;Lee Gam-Gue
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
    • /
    • v.17 no.1
    • /
    • pp.56-61
    • /
    • 2005
  • Indoor air quality becomes of a concern recently in view of human health. This study investigates the air diffusion performance and the air change efficiency of a classroom, when outdoor air is introduced in addition to the heating/cooling operation of a ceiling-mounted heat pump. A CFD analysis has been performed to investigate the effect of the discharge angle of the air jets from the heat pump for both parallel and series types of outdoor air system. It is observed that the series type creates more uniform indoor environment compared to the parallel type in general. It can be concluded the discharge angle should not be larger than 40o for the parallel type, in order not to generate thermal stratification in the room.

Optimization of Vane Diffuser in a Mixed-Flow Pump for High Efficiency Design

  • Kim, Jin-Hyuk;Kim, Kwang-Yong
    • International Journal of Fluid Machinery and Systems
    • /
    • v.4 no.1
    • /
    • pp.172-178
    • /
    • 2011
  • This paper presents an optimization procedure for high-efficiency design of a mixed-flow pump. Optimization techniques based on a weighted-average surrogate model are used to optimize a vane diffuser of a mixed-flow pump. Validation of the numerical results is performed through experimental data for head, power and efficiency. Three-level full factorial design is used to generate nine design points within the design space. Three-dimensional Reynoldsaveraged Navier-Stokes equations with the shear stress transport turbulence model are discretized by using finite volume approximation and solved on hexahedral grids to evaluate the efficiency as the objective function. In order to reduce pressure loss in the vane diffuser, two variables defining the straight vane length ratio and the diffusion area ratio are selected as design variables in the present optimization. As the results of the design optimization, the efficiency at the design flow coefficient is improved by 7.05% and the off-design efficiencies are also improved in comparison with the reference design.

취급제품소개

  • 권태영
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2000.02a
    • /
    • pp.39-39
    • /
    • 2000
  • 당사는 1996년 SPUTTERING SYSTEM 제작을 시작으로 하여 진공관련장치 및 부품을 제작, 납품하는 기업입니다. 그 동안 산업체 및 대학, 연구소 등에 제작 납품된 품목은 양산용SPUTTER 연구실험용SPUTTER, ION PLATING, RIE SYSTEM, E-BEAM 증착기 산업용 AL-EVAPORATOR, 산업용 AIP SYSTEM, 고온열처리로, 진공건조장치 진공 배기SYSTEM, 기타 진공관련장치가 있으며 진공부품으로는 OIL ROTARY PUMP, DIFFUSION PUMP, VALVE 및 배관부품 등이 있습니다. 그밖에 취급하는 품목으로는 진공게이지류 및 터보펌프를 판매하고 있습니다. 일부 장치는 기술력을 인정받아 일본, 동남아시아, 중국 등에 수출되었습니다. 당사는 항상 고객이 필요로 하는 진공응용장치를 다년간 축적된 제조기술과 연구력을 바탕으로 만족스러운 제품을 공급하고 있기에 이를 소개하고자 합니다.

  • PDF

Characteristics of Coagulants Distribution by the Pumping Rate in Pump Diffusion Mixer (Pump Diffusion Mixer에서 압력수량에 따른 응집제 확산분포 특성)

  • Park, Youngoh;Kim, Ki-Don;Park, No-Suk;Lim, Jae-Lim;Lim, Kyung-Ho
    • Journal of Korean Society of Water and Wastewater
    • /
    • v.22 no.1
    • /
    • pp.65-71
    • /
    • 2008
  • This study collected the latest 30-year (1976~2005) continuous rainfall data hourly recorded at 61 meterological observatories in Korea, and the continuous rainfall data was divided into individual rainfall events. In addition, distribution charts of average rainfall event-depth were created to facilitate the application to the overflow risk-based design of detention storage basin. This study shows that 4 hour is appropriate for SST (storm separation time) to separate individual rainfall events from the continuous rainfall data, and the one-parameter exponential distribution is suitable for the frequency distribution of rainfall event depths for the domestic rainfall data. The analysis of the domestic rainfall data using SST of 4 hour showed that the individual rainfall event was 1380 to 2031 times, the average rainfall event-depth was 19.1 to 32.4mm, and ranged between 0.877 and 0.926. Distribution charts of average rainfall event-depth were created for 4hour and 6 hour of SST, respectively. The inland Gyeongsangbuk-do, Western coastal area and inland of Jeollabuk-do had relatively lower average rainfall event-depth, whereas Southern coastal area, such as Namhae, Yeosu, and Jeju-do had relatively higher average rainfall event-depth.

FINITE ELEMENT MODEL TO STUDY CALCIUM DIFFUSION IN A NEURON CELL INVOLVING JRYR, JSERCA AND JLEAK

  • Yripathi, Amrita;Adlakha, Neeru
    • Journal of applied mathematics & informatics
    • /
    • v.31 no.5_6
    • /
    • pp.695-709
    • /
    • 2013
  • Calcium is well known role for signal transduction in a neuron cell. Various processes and parameters modulate the intracellular calcium signaling process. A number of experimental and theoretical attempts are reported in the literature for study of calcium signaling in neuron cells. But still the role of various processes, components and parameters involved in calcium signaling is still not well understood. In this paper an attempt has been made to develop two dimensional finite element model to study calcium diffusion in neuron cells. The JRyR, JSERCA and JLeak, the exogenous buffers like EGTA and BAPTA, and diffusion coefficients have been incorporated in the model. Appropriate boundary conditions have been framed. Triangular ring elements have been employed to discretized the region. The effect of these parameters on calcium diffusion has been studied with the help of numerical results.

Study on the aquifer utilization for a ground water heat pump system (지하수 히트펌프 시스템의 대수층 활용 사레 연구)

  • Shim, Byoung-Ohan;Lee, Chul-Woo
    • 한국신재생에너지학회:학술대회논문집
    • /
    • 2006.11a
    • /
    • pp.32-35
    • /
    • 2006
  • The validation of a groundwater source heat pump system installation site is estimated by bydrogeothermic model ing. The hydraulic characteristics of the aquifer system is evaluated from pumping and recovery tests. In addition, the temperature distribution by the pumping and the injection of groundwater, and water level fluctuations are simulated by numerical modeling. The total cooling and heating load for the building is designed as 120RT(refrigeration ton) and the ground water source heat pump system covers 50RT as a subsidiary system The scenario of heat pump operation is organized as pumping and inject ion of groundwater that is performed for 8 hours per day in cooling mode for 90 days during the summer season The heat transfer by the injected warm water is limited near the inject ion wells in the simulated temperature distribution. The reason is that the given operation time is too short to expect broad thermal diffusion in large volume of the aquifer in the simulation time The simulated groundwater level and temperature distribution can be used as important data to develope an energy effective pumping and injection well system. Also it will be very useful to evaluate the hydraulic capacity of a target groundwater reservoir.

  • PDF

Thermal analysis model for electric water pumps with non-conductive cooling liquid (비전도성 충진액을 포함하는 전동워터펌프 열 해석 모델)

  • Jung, Sung-Taek;Yoon, Seon-Jhin;Ha, Seok-Jae
    • Design & Manufacturing
    • /
    • v.16 no.2
    • /
    • pp.46-52
    • /
    • 2022
  • As the consumer market in the eco-friendly vehicle industry grows, the demand for water pump in a electric car parts market. This study intend to propose a mathematical model that can verify the effect of improving thermal properties when a non-conductive cooling filler liquid is introduced into an electric vehicle water pump. Also, the pros and cons of the immersion cooling method and future development way were suggested by analyzing the cooling characteristics using on the derived analysis solution. Thermal characteristics analysis of electric water pump applied with non-conductive filler liquid was carried out, and the diffusion boundary condition in the motor body and the boundary condition the inside pump were expressed as a geometric model. As a result of analyzing the temperature change for the heat source of the natural convection method and the heat conduction method, the natural convection method has difficulty in dissipating heat because no decrease in temperature due to heat release was found even after 300 sec. Also, it can be seen that the heat dissipation effect was obtained even though the non-conductive filling liquid was applied at the 120 sec and 180 sec in the heat conduction method. It has proposed to minimize thermal embrittlement and lower motor torque by injecting a non-conductive filler liquid into the motor body and designing a partition wall thickness of 2.5 mm or less.

Analysis of High Vacuum System Based on the Applications of Vacuum Materials

  • Kim, Hyung-Taek
    • Transactions on Electrical and Electronic Materials
    • /
    • v.14 no.6
    • /
    • pp.334-338
    • /
    • 2013
  • In this study, the outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for these vacuum systems were suggested based on the simulation results. The baking-out effects of the modeled systems and materials on the performance of the vacuum system were also analyzed. The simulation predicted that the overall outgassing effect was more significant in the turbomolecular pump system than in the diffusion pump system and that the utilization of a booster pump has a greater effect on the evacuation time than on the ultimate pressure.

Evaluation of Flow Characteristics within In-Line Mixer for Water Treatment using CFD Technique (CFD모사 기법을 이용한 관내 혼화장치내 흐름 특성 평가)

  • Park, Dae-Jin;Park, Young-Oh;Park, No-Suk;Kim, Seong-Su;Wang, Chang-Kuen
    • Journal of Korean Society of Water and Wastewater
    • /
    • v.22 no.3
    • /
    • pp.351-358
    • /
    • 2008
  • The modified in-line mixer which was suggested in this study for small water treatment facilities was evaluated on the performance of coagulation. For the objectives of this research, computational fluid dynamics(CFD) simulation was applied for analysis of flow characteristics within the modified in-line mixer. For verifying the results of CFD simulation, wet tests for the pilot plant were conducted. The wet test was to measure the actual coagulant dispersion distribution on the overall cross-section at a distance of 5.5D from the chemical injection point. From the results of CFD simulation and wet test, it was shown that the coagulant dispersion within the modified in-line mixer was occurred more uniformly than within the existing PDM(Pump diffusion Mixer). The results have confirmed the modified in-line mixer had several advantages compared with the existing PDM in terms of dispersion efficiency.