Simulation of Vacuum Characteristics in Semiconductor Processing Vacuum System by the Combination of Vacuum Pumps (진공펌프 조합에 의한 반도체공정 진공시스템 진공특성 전산모사)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.24 no.6
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- pp.449-457
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- 2011